US5235236A
Expired / Lapsed
US
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Surface acoustic wave device
Assignee: Seiko Epson Corp
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Filing: 1992-08-28
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Granted: 1993-08-10
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Expires: 2012-08-28
Abstract
Abstract Disclosed herein is a surface acoustic wave device whose characteristics can be stably maintained against temperature changes. The surface acoustic wave device has an insulating diamond layer (2), which is provided thereon with a part (3) defined by a pair of interdigital electrodes (7, 7') and a piezoelectric layer (8), and a thermistor (4) made of semi-conductive diamond. The thermistor (4) quickly detects the temperature of the device.
Inventors
- 👤 Hideaki Nakahata
- 👤 Shinichi Shikata
- 👤 Akihiro Hachigo
- 👤 Naoji Fujimori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:29
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/08; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582; H03H9/0296; H03H9/02976
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
60 words
A surface acoustic wave device comprising: an insulating diamond layer; a semi-conductive diamond layer being provided in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and an electrode being combined with said insulating diamond layer and said piezoelectric layer for defining a surface acoustic wave element part.
Claim 2
Dependent Claim
60 words
A surface acoustic wave device comprising: an insulating diamond layer; a semi-conductive diamond layer being provided in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and an electrode being combined with said insulating diamond layer and said piezoelectric layer for defining a surface acoustic wave element part.
Claim 3
Dependent Claim
26 words
A surface acoustic wave device in accordance with claim 1, wherein said semi-conductive diamond layer is essentially made of diamond containing an impurity being added thereto.
Claim 4
Dependent Claim
35 words
A surface acoustic wave device in accordance with claim 2, wherein said impurity contained in said diamond is selected from a group of B, Aλ, P, As, Sb, Si, Li, S, Se, Cλ and N.
Claim 5
Dependent Claim
30 words
A surface acoustic wave device in accordance with claim 1, wherein said thermistor part is formed by a portion of said insulating diamond layer containing an impurity being added thereto.
Claim 6
Dependent Claim
69 words
A surface acoustic wave device in accordance with claim 1, wherein said piezoelectric layer is essentially made of one or more materials selected from a group of ZnO, AλN, Pb(Zr,Ti)O 3 , (Pb,La)(Zr,Ti)O 3 , LiTaO 3 , LiNbO 3 , SiO 2 , Ta 2 O 5 , Nb 2 O 5 , BeO, Li 2 B 4 O 7 , KNbO 3 , ZnS, ZnSe and CdS.
Claim 7
Dependent Claim
33 words
A surface acoustic wave device in accordance with claim 1, wherein said electrode is essentially made of diamond containing an impurity being added thereto or diamond containing a lattice defect being introduced thereinto.
Claim 8
Dependent Claim
57 words
A surface acoustic wave device comprising: a substrate; an insulating diamond layer being formed on said substrate; a semi-conductive diamond layer being in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 9
Dependent Claim
57 words
A surface acoustic wave device comprising: a substrate; an insulating diamond layer being formed on said substrate; a semi-conductive diamond layer being in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 10
Dependent Claim
26 words
A surface acoustic wave device in accordance with claim 7, wherein said semi-conductive diamond layer is essentially made of diamond containing an impurity being added thereto.
Claim 11
Dependent Claim
30 words
A surface acoustic wave device in accordance with claim 7, wherein said thermistor part is defined by a portion of said insulating diamond layer containing an impurity being added thereto.
Claim 12
Dependent Claim
48 words
A surface acoustic wave device comprising: a substrate being essentially made of diamond; a semi-conductive diamond layer being formed on said substrate to define a thermistor part; a piezoelectric layer being formed on said substrate; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 13
Dependent Claim
48 words
A surface acoustic wave device comprising: a substrate being essentially made of diamond; a semi-conductive diamond layer being formed on said substrate to define a thermistor part; a piezoelectric layer being formed on said substrate; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 14
Dependent Claim
26 words
A surface acoustic wave device in accordance with claim 10, wherein said semi-conductive diamond layer is essentially made of diamond containing an impurity being added thereto.
Claim 15
Dependent Claim
28 words
A surface acoustic wave device in accordance with claim 10, wherein said thermistor part is defined by a portion of said substrate containing an impurity being added thereto.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-09 | 1997-02-08 | 1997-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-09 | 2001-02-08 | 2001-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-09 | 2005-02-08 | 2005-08-10 | $7700.00 | Window Closed / Lapsed |