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US5235236A
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US
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Surface acoustic wave device
Assignee: Seiko Epson Corp
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Filing: 1992-08-28
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Granted: 1993-08-10
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Expires: 2012-08-28
Abstract
Abstract Disclosed herein is a surface acoustic wave device whose characteristics can be stably maintained against temperature changes. The surface acoustic wave device has an insulating diamond layer (2), which is provided thereon with a part (3) defined by a pair of interdigital electrodes (7, 7') and a piezoelectric layer (8), and a thermistor (4) made of semi-conductive diamond. The thermistor (4) quickly detects the temperature of the device.
Inventors
- 👤 Hideaki Nakahata
- 👤 Shinichi Shikata
- 👤 Akihiro Hachigo
- 👤 Naoji Fujimori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:51
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/08; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582; H03H9/0296; H03H9/02976
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
60 words
A surface acoustic wave device comprising: an insulating diamond layer; a semi-conductive diamond layer being provided in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and an electrode being combined with said insulating diamond layer and said piezoelectric layer for defining a surface acoustic wave element part.
Claim 2
Dependent Claim
60 words
A surface acoustic wave device comprising: an insulating diamond layer; a semi-conductive diamond layer being provided in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and an electrode being combined with said insulating diamond layer and said piezoelectric layer for defining a surface acoustic wave element part.
Claim 3
Dependent Claim
26 words
A surface acoustic wave device in accordance with claim 1, wherein said semi-conductive diamond layer is essentially made of diamond containing an impurity being added thereto.
Claim 4
Dependent Claim
35 words
A surface acoustic wave device in accordance with claim 2, wherein said impurity contained in said diamond is selected from a group of B, Aλ, P, As, Sb, Si, Li, S, Se, Cλ and N.
Claim 5
Dependent Claim
30 words
A surface acoustic wave device in accordance with claim 1, wherein said thermistor part is formed by a portion of said insulating diamond layer containing an impurity being added thereto.
Claim 6
Dependent Claim
69 words
A surface acoustic wave device in accordance with claim 1, wherein said piezoelectric layer is essentially made of one or more materials selected from a group of ZnO, AλN, Pb(Zr,Ti)O 3 , (Pb,La)(Zr,Ti)O 3 , LiTaO 3 , LiNbO 3 , SiO 2 , Ta 2 O 5 , Nb 2 O 5 , BeO, Li 2 B 4 O 7 , KNbO 3 , ZnS, ZnSe and CdS.
Claim 7
Dependent Claim
33 words
A surface acoustic wave device in accordance with claim 1, wherein said electrode is essentially made of diamond containing an impurity being added thereto or diamond containing a lattice defect being introduced thereinto.
Claim 8
Dependent Claim
57 words
A surface acoustic wave device comprising: a substrate; an insulating diamond layer being formed on said substrate; a semi-conductive diamond layer being in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 9
Dependent Claim
57 words
A surface acoustic wave device comprising: a substrate; an insulating diamond layer being formed on said substrate; a semi-conductive diamond layer being in contact with said insulating diamond layer for defining a thermistor part; a piezoelectric layer being formed on said insulating diamond layer; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 10
Dependent Claim
26 words
A surface acoustic wave device in accordance with claim 7, wherein said semi-conductive diamond layer is essentially made of diamond containing an impurity being added thereto.
Claim 11
Dependent Claim
30 words
A surface acoustic wave device in accordance with claim 7, wherein said thermistor part is defined by a portion of said insulating diamond layer containing an impurity being added thereto.
Claim 12
Dependent Claim
48 words
A surface acoustic wave device comprising: a substrate being essentially made of diamond; a semi-conductive diamond layer being formed on said substrate to define a thermistor part; a piezoelectric layer being formed on said substrate; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 13
Dependent Claim
48 words
A surface acoustic wave device comprising: a substrate being essentially made of diamond; a semi-conductive diamond layer being formed on said substrate to define a thermistor part; a piezoelectric layer being formed on said substrate; and a pair of interdigital electrodes being in contact with said piezoelectric layer.
Claim 14
Dependent Claim
26 words
A surface acoustic wave device in accordance with claim 10, wherein said semi-conductive diamond layer is essentially made of diamond containing an impurity being added thereto.
Claim 15
Dependent Claim
28 words
A surface acoustic wave device in accordance with claim 10, wherein said thermistor part is defined by a portion of said substrate containing an impurity being added thereto.
References Cited (Backward Citations)
JPS5438874A
Cited
US4518944A
Cited
JPS6462911A
Cited
JPH02299309A
Cited
US4952832A
Cited
US5160869A
Cited
US5045355A
Cited
US5152930A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-09 | 1997-02-08 | 1997-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-09 | 2001-02-08 | 2001-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-09 | 2005-02-08 | 2005-08-10 | $7700.00 | Window Closed / Lapsed |