US5236545A
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Method for heteroepitaxial diamond film development
Assignee: Wayne State University
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Filing: 1992-10-05
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Granted: 1993-08-17
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Expires: 2012-10-05
Abstract
Abstract A method for preparing heteroepitaxial diamond films on silicon substrates is described. This method first involves the deposition of a cubic boron nitride layer on the silicon substrate as a first interfacial layer using laser ablation with a hexagonal boron nitride target in the presence of a nitrogen-containing atmosphere. The boron nitride layer is followed with a second interfacial layer, generally about 1 to 10 monolayers thick, of hydrogen terminated carbon which is deposited with laser ablation with a carbon target in the presence of atomic hydrogen. Finally, the heteroepitaxial diamond film is deposited using conventional chemical vapor deposition (CVD) techniques with a reactive gas mixture containing hydrogen, a carbon-containing gas or gases, and, optionally, oxygen. Large area, high quality heteroepitaxial diamond films can be prepared by this method. Silicon with such a heteroepitaxial diamond film should be especially suited for the fabrication of high-speed, high-power semiconductor devices at reasonable cost.
Inventors
- 👤 Roger W. Pryor
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 11:52
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/18; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
82 words
A method of preparing a heteroepitaxial diamond film on a silicon substrate comprising the steps of (1) depositing a first interfacial layer onto a silicon substrate, where the first interfacial layer consists essentially of a thin layer of cubic boron nitride; (2) depositing a second interfacial layer onto the first interfacial layer, where the second interfacial layer consists essentially of an ultra-thin layer of carbon with a hydrogen terminated surface; and (3) depositing a heteroepitaxial diamond film on the second interfacial layer.
Claim 2
Independent Claim
82 words
A method of preparing a heteroepitaxial diamond film on a silicon substrate comprising the steps of (1) depositing a first interfacial layer onto a silicon substrate, where the first interfacial layer consists essentially of a thin layer of cubic boron nitride; (2) depositing a second interfacial layer onto the first interfacial layer, where the second interfacial layer consists essentially of an ultra-thin layer of carbon with a hydrogen terminated surface; and (3) depositing a heteroepitaxial diamond film on the second interfacial layer.
Claim 3
Dependent Claim
76 words
A method as defined in claim 1, wherein the first interfacial layer is generated by laser ablation with a hexagonal boron nitride target in a nitrogen-containing atmosphere; wherein the second interfacial layer is generated by laser ablation with a carbon target while simultaneously flooding the first interfacial layer with atomic hydrogen; and wherein the heteroepitaxial diamond layer is generated by chemical vapor deposition using a reactive gas mixture containing hydrogen and a carbon-containing gas or gases.
Claim 4
Dependent Claim
19 words
A method as defined in claim 2, wherein the silicon substrate is (100) silicon, (110) silicon, or (111) silicon.
Claim 5
Dependent Claim
14 words
A method as defined in claim 2, wherein the silicon substrate is (100) silicon.
Claim 6
Dependent Claim
15 words
A method as defined in claim 3, wherein the silicon substrate is a silicon wafer.
Claim 7
Dependent Claim
20 words
A method as defined in claim 3, wherein the first interfacial layer is about 0.3 to 10 5 nanometers thick.
Claim 8
Dependent Claim
19 words
A method as defined in claim 6, wherein the first interfacial layer is about 1 to 100 nanometers thick.
Claim 9
Dependent Claim
26 words
A method as defined in claim 6, wherein the second interfacial layer has a thickness from about 80 percent of a monolayer to about 10 monolayers.
Claim 10
Dependent Claim
21 words
A method as defined in claim 8, wherein the second interfacial layer has a thickness from about 1 to 2 monolayers.
Claim 11
Dependent Claim
19 words
A method as defined in claim 10, wherein the heteroepitaxial diamond layer is about 1 to 100 microns thick.
Claim 12
Dependent Claim
19 words
A method as defined in claim 10, wherein the heteroepitaxial diamond layer is about 1 to 20 microns thick.
Claim 13
Dependent Claim
41 words
A method as defined in claim 3, wherein the carbon-containing gas is selected from the group consisting of methane, ethane, acetylene, methanol, ethanol, carbon dioxide, and carbon monoxide and wherein the chemical vapor deposition is microwave initiated plasma chemical vapor deposition.
Claim 14
Dependent Claim
35 words
A method as defined in claim 3, wherein the reactive gas mixture contains about 89 to 99 volume percent hydrogen, about 1 to 10 volume percent methane, and 0 to about 10 volume percent oxygen.
Claim 15
Dependent Claim
50 words
A method as defined in claim 2, wherein the first interfacial layer is generated by laser ablation using a bias ring and a magnetic plasma intensifier and particle sorter to provide increase energy to the plasma whereby the concentration of ionized nitrogen reaching the surface of the silicon substrate increases.
Claim 16
Dependent Claim
41 words
A method as defined in claim 2, wherein the laser ablation procedure used to deposit both the first and second interfacial layers uses a pulsed excimer laser and a single rotating target comprising separate sections of hexagonal boron nitride and carbon.
Claim 17
Independent Claim
136 words
A method of preparing a heteroepitaxial diamond film on a silicon substrate comprising the steps of (1) depositing a first interfacial layer onto a silicon substrate, where the first interfacial layer consists essentially of a thin layer of cubic boron nitride generated by a laser ablation procedure with a hexagonal boron nitride target in a nitrogen-containing atmosphere; (2) depositing a second interfacial layer onto the first interfacial layer, where the second interfacial layer consists essentially of an ultra-thin layer of hydrogen terminated carbon generated by a laser ablation procedure with a carbon target while simultaneously flooding the first interfacial layer with atomic hydrogen; and (3) depositing a heteroepitaxial diamond film on the second interfacial layer by a microwave chemical vapor deposition procedure using a reactive gas mixture containing hydrogen, oxygen, and a carbon-containing gas or gases.
Claim 18
Independent Claim
136 words
A method of preparing a heteroepitaxial diamond film on a silicon substrate comprising the steps of (1) depositing a first interfacial layer onto a silicon substrate, where the first interfacial layer consists essentially of a thin layer of cubic boron nitride generated by a laser ablation procedure with a hexagonal boron nitride target in a nitrogen-containing atmosphere; (2) depositing a second interfacial layer onto the first interfacial layer, where the second interfacial layer consists essentially of an ultra-thin layer of hydrogen terminated carbon generated by a laser ablation procedure with a carbon target while simultaneously flooding the first interfacial layer with atomic hydrogen; and (3) depositing a heteroepitaxial diamond film on the second interfacial layer by a microwave chemical vapor deposition procedure using a reactive gas mixture containing hydrogen, oxygen, and a carbon-containing gas or gases.
Claim 19
Dependent Claim
19 words
A method as defined in claim 16, wherein the silicon substrate is (100) silicon, (110) silicon, or (111) silicon.
Claim 20
Dependent Claim
14 words
A method as defined in claim 16, wherein the silicon substrate is (100) silicon.
Claim 21
Dependent Claim
15 words
A method as defined in claim 17, wherein the silicon substrate is a silicon wafer.
Claim 22
Dependent Claim
20 words
A method as defined in claim 17, wherein the first interfacial layer is about 0.3 to 10 5 nanometers thick.
Claim 23
Dependent Claim
19 words
A method as defined in claim 20, wherein the first interfacial layer is about 1 to 100 nanometers thick.
Claim 24
Dependent Claim
26 words
A method as defined in claim 20, wherein the second interfacial layer has a thickness from about 80 percent of a monolayer to about 10 monolayers.
Claim 25
Dependent Claim
20 words
A method as defined in claim 22, wherein the second interfacial layer has a thickness from about 1 to 2monolayers.
Claim 26
Dependent Claim
19 words
A method as defined in claim 22, wherein the heteroepitaxial diamond layer is about 1 to 100 microns thick.
Claim 27
Dependent Claim
19 words
A method as defined in claim 24, wherein the heteroepitaxial diamond layer is about 1 to 20 microns thick.
Claim 28
Dependent Claim
28 words
A method as defined in claim 17, wherein the carbon-containing gas is selected from the group consisting of methane, ethane, acetylene, methanol, ethanol, carbon dioxide, and carbon monoxide.
Claim 29
Dependent Claim
35 words
A method as defined in claim 17, wherein the reactive gas mixture contains about 89 to 99 volume percent hydrogen, about 1 to 10 volume percent methane, and 0 to about 10 volume percent oxygen.
Claim 30
Dependent Claim
50 words
A method as defined in claim 16, wherein the first interfacial layer is generated by laser ablation using a bias ring and a magnetic plasma intensifier and particle sorter to provide increase energy to the plasma whereby the concentration of ionized nitrogen reaching the surface of the silicon substrate increases.
Claim 31
Dependent Claim
45 words
A method as defined in claim 16, wherein the laser ablation procedure used to deposit both the first and second interfacial layers uses a pulsed excimer laser and a single rotating target comprising both the hexagonal boron nitride target and carbon target as separate portions.
References Cited (Backward Citations)
US4859493A
Cited
US4869924A
Cited
US4935303A
Cited
US5023068A
Cited
US4987002A
Cited
US4940015A
Cited
US4981568A
Cited
US4997636A
Cited
US5130111A
Cited
EP0439135A1
Cited
US4981818A
Cited
EP0445754A1
Cited
US5174983A
Cited
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