US4987002A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming a crystalline diamond film
Assignee: Namiki Precision Jewel Co Ltd
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Filing: 1989-05-04
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Granted: 1991-01-22
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Expires: 2009-05-04
Abstract
Abstract A crystalline diamond film is formed on a thin substrate. Energy is applied by a thermal plasma torch to a gas mixture to deposit carbon particles onto the substrate. The substrate is positioned on a pedestal with a cooling facility in which an intermediate layer of thermally conductive powder is interposed between the substrate and the pedestal.
Inventors
- 👤 Masakatu Sakamoto
- 👤 Youichi Yaguchi
- 👤 Hiroaki Toshima
- 👤 Toshiroh Kotaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:20
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/276; C23C16/01; C23C16/44; C23C16/458; H; H04; H04R; H04R31/00; H04R31/003; H04R7/00; H04R7/02; H04R2307/00; H04R2307/023
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
100 words
A crystalline diamond film forming process comprising the steps of: arranging a pedestal cooled with cooling facility during the film forming process; positioning a thin substrate on said pedestal with an intermediate layer which is interposed between the pedestal and the substrate, the intermediate layer comprising a thermally conductive powder; feeding a mixture of gas composed of argon, a hydrocarbon, and hydrogen to a thermal plasma generating means; and applying energy to the gas mixture via said thermal plasma generating means to produce decomposed carbon particles and depositing the carbon particles onto the substrate to form a crystalline diamond film.
Claim 2
Dependent Claim
100 words
A crystalline diamond film forming process comprising the steps of: arranging a pedestal cooled with cooling facility during the film forming process; positioning a thin substrate on said pedestal with an intermediate layer which is interposed between the pedestal and the substrate, the intermediate layer comprising a thermally conductive powder; feeding a mixture of gas composed of argon, a hydrocarbon, and hydrogen to a thermal plasma generating means; and applying energy to the gas mixture via said thermal plasma generating means to produce decomposed carbon particles and depositing the carbon particles onto the substrate to form a crystalline diamond film.
Claim 3
Dependent Claim
34 words
The process according to claim 1, wherein said energy applying and carbon particle depositing step is implemented by a plasma torch gun for generating a thermal plasma to which the gas mixture is fed.
Claim 4
Dependent Claim
13 words
The process according to claim 1, wherein said intermediate layer comprises ceramic powders.
Claim 5
Dependent Claim
16 words
The process according to claim 1, wherein the thickness of the substrate is below 40 microns.
Claim 6
Dependent Claim
13 words
The process according to claim 1, wherein the substrate is an acoustic diaphragm.
Claim 7
Dependent Claim
13 words
The process according to claim 1, wherein the substrate is made of titanium.
Claim 8
Dependent Claim
23 words
The process according to claim 1, wherein the temperature on the substrate surface is in the range of 800 to 1000 degrees centigrade.
Claim 9
Dependent Claim
22 words
The process according to claim 1, wherein the gas mixture comprises Argon, Methane and Hydrogen, the mixture ratio of which is 100:0.1:7.
Claim 10
Dependent Claim
28 words
The process according to claim 1, wherein the material of the thermal conductive powder is selected from the group consisting of diamond, cubic boron nitride and silicon carbide.
Claim 11
Dependent Claim
37 words
The process according to claim 1, wherein the material of the thermal conductive powder has a melting point in excess of 1500 degrees centigrade and a thermal conductivity equal to or greater than that of the pedestal.
Claim 12
Dependent Claim
17 words
The process according to claim 1, wherein said energy applied to said gas mixture is thermal energy.
Claim 13
Dependent Claim
113 words
A crystalline diamond film forming process comprising the steps of: arranging a pedestal; positioning a thin substrate on said pedestal with an intermediate layer which is interposed between the pedestal and the substrate, the intermediate layer comprising a thermally conductive powder; feeding a mixture of gas composed of argon, a hydrocarbon, and hydrogen to a thermal plasma generating means; applying energy to the gas mixture via said thermal plasma generating means to produce decomposed carbon particles and depositing the carbon particles onto the substrate to form a crystalline diamond film; and cooling said pedestal so that the temperature on the substrate surface is maintained in the rang of 800 to 1000 degrees centigrade.
Claim 14
Dependent Claim
113 words
A crystalline diamond film forming process comprising the steps of: arranging a pedestal; positioning a thin substrate on said pedestal with an intermediate layer which is interposed between the pedestal and the substrate, the intermediate layer comprising a thermally conductive powder; feeding a mixture of gas composed of argon, a hydrocarbon, and hydrogen to a thermal plasma generating means; applying energy to the gas mixture via said thermal plasma generating means to produce decomposed carbon particles and depositing the carbon particles onto the substrate to form a crystalline diamond film; and cooling said pedestal so that the temperature on the substrate surface is maintained in the rang of 800 to 1000 degrees centigrade.
Claim 15
Dependent Claim
13 words
The process according to claim 12, wherein said substrate is made of titanium.
Claim 16
Dependent Claim
34 words
The process according to claim 12, wherein said energy applying and carbon particle depositing step is implemented by a plasma torch gun for generating a thermal plasma to which the gas mixture is fed.
Claim 17
Dependent Claim
13 words
The process according to claim 12, wherein said substrate is an acoustic diaphragm.
Claim 18
Dependent Claim
17 words
The process according to claim 12, wherein said energy applied to said gas mixture is thermal energy.
Claim 19
Dependent Claim
28 words
The process according to claim 12, wherein the material of said thermal conductive powder is selected from the group consisitng of diamond, cubic boron nitride and silicon carbide.
References Cited (Backward Citations)
US4115721A
Cited
US4470479A
Cited
US4772395A
Cited
US4769094A
Cited
US4725345A
Cited
US4767608A
Cited
US4870672A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-21 | 1994-07-23 | 1995-01-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-21 | 1998-07-23 | 1999-01-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-21 | 2002-07-23 | 2003-01-22 | $7700.00 | Window Closed / Lapsed |