US4182793A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoelectric crystalline film of zinc oxide
Assignee: Murata Manufacturing Co Ltd
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Filing: 1978-06-08
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Granted: 1980-01-08
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Expires: 1998-06-08
Abstract
Abstract Piezoelectric crystallime film on a substrate, which is a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, the crystalline zinc oxide film containing one copper compound selected from the group consisting of copper sulphide, copper telluride, copper selenide, copper selenate, copper phosphide and copper phosphate. The copper is present in the crystalline zinc oxide film in the form of its sulphide, telluride, selenide, selenate, phosphide or phosphate and in the concentration of 0.01 to 20.0 atomic percent. The piezoelectric crystalline film have high resistivity and a smooth surface so that they can be used in a wide range of low to high frequencies.
Inventors
- 👤 Hiroshi Nishiyama
- 👤 Toshio Ogawa
- 👤 Tasuku Mashio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 05:03
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/80; H10N30/85; H10N30/853
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
79 words
A piezoelectric crystalline film having a wide applicable range from low to high frequencies on a substrate, said film consisting essentially of a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, said crystalline zinc oxide film containing one copper compound selected from the group consisting of copper sulphide, copper telluride, copper selenide, copper selenate, copper phosphide and copper phosphate the concentration of copper being 0.01 to 20.0 atomic percent.
Claim 2
Dependent Claim
79 words
A piezoelectric crystalline film having a wide applicable range from low to high frequencies on a substrate, said film consisting essentially of a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, said crystalline zinc oxide film containing one copper compound selected from the group consisting of copper sulphide, copper telluride, copper selenide, copper selenate, copper phosphide and copper phosphate the concentration of copper being 0.01 to 20.0 atomic percent.
Claim 3
Dependent Claim
16 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper (I) sulphide.
Claim 4
Dependent Claim
16 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper (II) sulphide.
Claim 5
Dependent Claim
16 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper (I) telluride.
Claim 6
Dependent Claim
16 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper (II) telluride.
Claim 7
Dependent Claim
16 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper (I) selenide.
Claim 8
Dependent Claim
15 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper selenate.
Claim 9
Dependent Claim
16 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper (I) phosphide.
Claim 10
Dependent Claim
16 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper (II) phosphide.
Claim 11
Dependent Claim
15 words
A piezoelectric crystalline film according to claim 1 wherein said copper compound is copper phosphate.
Claim 12
Dependent Claim
25 words
A piezoelectric crystalline film according to claim 1 wherein the substrate is selected from the group consisting of metal, glass, ceramics, single crystals and resin.
References Cited (Backward Citations)
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US3388002A
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US3573960A
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US3655429A
Cited
US3766041A
Cited
US3988232A
Cited
US4139678A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-01-07 | 1983-07-09 | 1984-01-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-01-07 | 1987-07-09 | 1988-01-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-01-07 | 1991-07-09 | 1992-01-08 | $7700.00 | Window Closed / Lapsed |