US6086679A — Deposition systems and processes for transport po…

Claim 1

Independent Claim 45 words

A transport deposition system (reactor) for making thin films comprising a cracker that dissociates precursors, a deposition area, a chuck adapted to hold a wafer, said chuck located in said deposition area, and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 2

Dependent Claim 45 words

A transport deposition system (reactor) for making thin films comprising a cracker that dissociates precursors, a deposition area, a chuck adapted to hold a wafer, said chuck located in said deposition area, and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 3

Dependent Claim 22 words

The transport deposition system of claim 1, wherein the moveable flow pattern adjuster is moveable in at least one of 3 dimensions.

Claim 4

Dependent Claim 26 words

The transport deposition system of claim 1, wherein the moveable flow pattern adjuster is moveable along the direction of flow from the cracker to the chuck.

Claim 5

Dependent Claim 28 words

The transport deposition system of claim 1, wherein the moveable flow pattern adjuster is moveable toward or away from at least one of the cracker and the chuck.

Claim 6

Dependent Claim 30 words

The transport deposition system of claim 1, wherein the moveable flow pattern adjuster is moveable in a direction perpendicular to the direction of flow from the cracker and the chuck.

Claim 7

Dependent Claim 48 words

The transport deposition system of claim 1, wherein the chuck has a wafer mounting surface and the cracker has an outlet port and wherein the moveable flow pattern adjuster is moveable in a direction across at least one of the wafer mounting surface and the cracker outlet port.

Claim 8

Dependent Claim 53 words

A transport deposition system for making thin films comprising a cracker that dissociates precursors, a deposition area, a chuck adapted to hold a wafer, said chuck located in said deposition area, and at least one of a moveable diffusion plate and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 9

Dependent Claim 53 words

A transport deposition system for making thin films comprising a cracker that dissociates precursors, a deposition area, a chuck adapted to hold a wafer, said chuck located in said deposition area, and at least one of a moveable diffusion plate and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 10

Dependent Claim 29 words

The transport deposition system of claim 7, wherein at least one of the moveable diffusion plate and flow pattern adjuster is moveable in at least one of 3 dimensions.

Claim 11

Dependent Claim 33 words

The transport deposition system of claim 7, wherein at least one of the moveable diffusion plate and flow pattern adjuster is moveable along the direction of flow from the cracker to the chuck.

Claim 12

Dependent Claim 35 words

The transport deposition system of claim 7, wherein at least one of the moveable diffusion plate and flow pattern adjuster is moveable toward or away from at least one of the cracker and the chuck.

Claim 13

Dependent Claim 32 words

The transport deposition system of claim 7, wherein the diffusion plate or flow pattern adjuster is moveable in a direction perpendicular to the direction of flow from the cracker and the chuck.

Claim 14

Dependent Claim 46 words

The transport deposition system of claim 7, wherein the chuck has a wafer mounting surface and the cracker has an outlet port and wherein the diffusion plate is moveable in a direction across at least one of the wafer mounting surface and the cracker outlet port.

Claim 15

Dependent Claim 55 words

A transport deposition system for making thin films comprising a cracker that dissociates precursors, a deposition area, a chuck adapted to hold a wafer, said chuck located in said deposition area, and a flow pattern adjuster and a diffusion plate, wherein at least two of the chuck, flow pattern adjuster and diffusion plate are moveable.

Claim 16

Dependent Claim 55 words

A transport deposition system for making thin films comprising a cracker that dissociates precursors, a deposition area, a chuck adapted to hold a wafer, said chuck located in said deposition area, and a flow pattern adjuster and a diffusion plate, wherein at least two of the chuck, flow pattern adjuster and diffusion plate are moveable.

Claim 17

Dependent Claim 56 words

A reaction chamber for transport polymerization comprising a non-metallic, transparent outer shell surrounding a cracker, a light source that provides radiant energy to the cracker to dissociate a precursor to generate a reactive intermediate, a hydrogen membrane, an inlet port for introducing precursors into the cracker, and an outlet port for removing product from the cracker.

Claim 18

Dependent Claim 56 words

A reaction chamber for transport polymerization comprising a non-metallic, transparent outer shell surrounding a cracker, a light source that provides radiant energy to the cracker to dissociate a precursor to generate a reactive intermediate, a hydrogen membrane, an inlet port for introducing precursors into the cracker, and an outlet port for removing product from the cracker.

Claim 19

Dependent Claim 28 words

The reaction chamber of claim 14, wherein the light source for providing radiant energy further comprises at least one of infrared radiation, ultraviolet radiation and vacuum ultraviolet radiation.

Claim 20

Dependent Claim 60 words

A reaction chamber for transport polymerization comprising a non-metallic, transparent outer shell surrounding a cracker, a light source that provides radiant energy to the cracker to dissociate precursors to generate reactive intermediates, an inlet port for introducing precursors into the cracker, a hydrogen membrane at least partially surrounding the cracker, and an outlet port for removing product from the cracker.

Claim 21

Dependent Claim 60 words

A reaction chamber for transport polymerization comprising a non-metallic, transparent outer shell surrounding a cracker, a light source that provides radiant energy to the cracker to dissociate precursors to generate reactive intermediates, an inlet port for introducing precursors into the cracker, a hydrogen membrane at least partially surrounding the cracker, and an outlet port for removing product from the cracker.

Claim 22

Dependent Claim 53 words

A reaction chamber for transport polymerization comprising an outer shell surrounding a cracker, an energy source that provides energy to the cracker to dissociate precursors to generate reactive intermediates, an inlet port for introducing precursors into the cracker, a moveable flow pattern adjuster and an outlet port for removing product from the cracker.

Claim 23

Dependent Claim 53 words

A reaction chamber for transport polymerization comprising an outer shell surrounding a cracker, an energy source that provides energy to the cracker to dissociate precursors to generate reactive intermediates, an inlet port for introducing precursors into the cracker, a moveable flow pattern adjuster and an outlet port for removing product from the cracker.

Claim 24

Dependent Claim 28 words

The reaction chamber of claim 17, wherein the energy source utilizes at least one of an RF source and a microwave source to provide energy to the cracker.

Claim 25

Dependent Claim 68 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; a source of energy associated with the cracker to dissociate the precursor; wherein the source of energy includes one of infrared radiation, ultraviolet radiation, vacuum ultraviolet radiation, radio frequency generator, and a microwave generator, a hydrogen membrane, and a chuck adapted for supporting a wafer.

Claim 26

Dependent Claim 68 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; a source of energy associated with the cracker to dissociate the precursor; wherein the source of energy includes one of infrared radiation, ultraviolet radiation, vacuum ultraviolet radiation, radio frequency generator, and a microwave generator, a hydrogen membrane, and a chuck adapted for supporting a wafer.

Claim 27

Dependent Claim 29 words

The reactor of claim 19, further comprising at least one of a flow pattern adjuster and a diffusion plate that controls the distribution of dissociated precursors onto the wafer.

Claim 28

Dependent Claim 52 words

A reaction chamber for transport polymerization comprising a non-metallic, transparent outer shell surrounding a cracker, a light source that provides incoherent excimer radiation to the cracker to dissociate precursors to generate reactive intermediates, an inlet port for introducing precursors into the cracker, and an outlet port for removing product from the cracker.

Claim 29

Dependent Claim 52 words

A reaction chamber for transport polymerization comprising a non-metallic, transparent outer shell surrounding a cracker, a light source that provides incoherent excimer radiation to the cracker to dissociate precursors to generate reactive intermediates, an inlet port for introducing precursors into the cracker, and an outlet port for removing product from the cracker.

Claim 30

Dependent Claim 63 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; a means for generating energy in one of the vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker; a moveable flow pattern adjuster; and a chuck adapted for supporting a wafer.

Claim 31

Dependent Claim 63 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; a means for generating energy in one of the vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker; a moveable flow pattern adjuster; and a chuck adapted for supporting a wafer.

Claim 32

Dependent Claim 18 words

The reactor of claim 21, further comprising means for controlling the distribution of dissociated precursors onto the wafer.

Claim 33

Dependent Claim 24 words

The reactor of claim 22, wherein the cracker is confined within a quartz vessel, and the energy source is one of IR and UV.

Claim 34

Dependent Claim 31 words

The reactor of claim 24, wherein the quartz vessel comprises one of a fused quartz crystal and a single quartz crystal and the energy source is one of IR and UV.

Claim 35

Dependent Claim 83 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; said cracker having a quartz wall and a heat shield positioned externally to the wall, and the reactor including a chamber wall surrounding a heat shield; a means for generating energy in one ofthe vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker; and a chuck adapted for supporting a wafer.

Claim 36

Dependent Claim 83 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; said cracker having a quartz wall and a heat shield positioned externally to the wall, and the reactor including a chamber wall surrounding a heat shield; a means for generating energy in one ofthe vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker; and a chuck adapted for supporting a wafer.

Claim 37

Dependent Claim 99 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; said cracker having a wall being transparent to one of wavelengths of vacuum ultraviolet or wavelengths in the range of ultraviolet and wavelengths of infrared radiation; a heat shield positioned externally to the wall; a chamber wall surrounding the heat shield; a means for generating energy in one of the vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker; and a chuck adapted for supporting a wafer.

Claim 38

Dependent Claim 99 words

A reactor used for making fluorinated polymer thin films comprising: a source of precursor; a cracker that is adapted to process the precursor; said cracker having a wall being transparent to one of wavelengths of vacuum ultraviolet or wavelengths in the range of ultraviolet and wavelengths of infrared radiation; a heat shield positioned externally to the wall; a chamber wall surrounding the heat shield; a means for generating energy in one of the vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker; and a chuck adapted for supporting a wafer.

Claim 39

Dependent Claim 71 words

A transport deposition system (reactor) for making thin films comprising: a cracker that dissociates precursors, said cracker being confined within a vessel which is transparent to one of wavelengths of vacuum ultraviolet or wavelengths in the range of ultraviolet and infrared; a deposition area; a chuck adapted to hold a wafer said chuck located in said deposition area; and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 40

Dependent Claim 71 words

A transport deposition system (reactor) for making thin films comprising: a cracker that dissociates precursors, said cracker being confined within a vessel which is transparent to one of wavelengths of vacuum ultraviolet or wavelengths in the range of ultraviolet and infrared; a deposition area; a chuck adapted to hold a wafer said chuck located in said deposition area; and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 41

Dependent Claim 24 words

The reactor of claims 1, 14 or 22, wherein the cracker dissociates a precursor which is a source for generating aromatic fluorine containing radicals.

Claim 42

Dependent Claim 25 words

The reactor of claims 1, 14 or 22, wherein the cracker dissociates a precursor which is a source for generating aromatic fluorine containing bi-functional radicals.

Claim 43

Dependent Claim 16 words

The reactor of claims 1, 14 or 22, further comprising a means for cooling the chuck.

Claim 44

Dependent Claim 21 words

The reactor of claims 1, 14 or 22, wherein the cracker produces a bi-functional aromatic radical which polymerizes on the wafer.

Claim 45

Dependent Claim 19 words

The reactor of claims 1, 14 or 22, wherein the product of the cracker is polymerized on the wafer.

Claim 46

Dependent Claim 26 words

The reactor of claims 1, 14 or 22, further including an exhaust port leading to a vacuum pump, which exhaust port is associated with the chuck.

Claim 47

Dependent Claim 90 words

A transport deposition system (reactor) for making thin films comprising: a source of precursor; a cracker that dissociates precursors; a means for generating energy in one of the vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker and is enclosed within a transparent tube located inside the flow stream of precursor; a deposition area; a chuck adapted to hold a wafer, said chuck located in said deposition area, and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 48

Dependent Claim 90 words

A transport deposition system (reactor) for making thin films comprising: a source of precursor; a cracker that dissociates precursors; a means for generating energy in one of the vacuum ultraviolet range and in the range from ultraviolet to infrared, which means is associated with the cracker and is enclosed within a transparent tube located inside the flow stream of precursor; a deposition area; a chuck adapted to hold a wafer, said chuck located in said deposition area, and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 49

Dependent Claim 20 words

The reactor of claims 1, 14 or 22, further comprising a dimer filter placed between the cracker and the chuck.

Claim 50

Dependent Claim 35 words

The reactor of claims 1, 14 or 22, further comprising a dimer filter placed between the cracker and the chuck, wherein the dimer filter has pores in the range of 0.01 μm to 1 μm.

Claim 51

Dependent Claim 20 words

The reactor of claims 1, 14 or 22, further comprising a powder filter placed between the cracker and the chuck.

Claim 52

Dependent Claim 35 words

The reactor of claims 1, 14 or 22, further comprising a powder filter placed between the cracker and the chuck, wherein the powder filter has pores in the range of 0.01 μm to 1 μm.

Claim 53

Dependent Claim 16 words

The reactor of claims 1, 14 or 22, further comprising a filter for removing re-associated intermediates.

Claim 54

Dependent Claim 21 words

The reactor of claims 1, 14 or 22, further comprising a conically shaped guide extending from the cracker toward the chuck.

Claim 55

Dependent Claim 25 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a dimer filter between the cracker and the chuck.

Claim 56

Dependent Claim 25 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a dimer filter between the cracker and the chuck.

Claim 57

Dependent Claim 25 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a powder filter between the cracker and the chuck.

Claim 58

Dependent Claim 25 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a powder filter between the cracker and the chuck.

Claim 59

Dependent Claim 29 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a device for removing re-associated intermediates, located between the cracker and the chuck.

Claim 60

Dependent Claim 29 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a device for removing re-associated intermediates, located between the cracker and the chuck.

Claim 61

Dependent Claim 26 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a conical guide located between the cracker and the chuck.

Claim 62

Dependent Claim 26 words

A reactor for transport polymerization, comprising a cracker, a chuck, a moveable flow pattern adjuster and a conical guide located between the cracker and the chuck.

Claim 63

Dependent Claim 24 words

The reactor of claim 45, wherein the conical guide extends from about the periphery of the cracker to about the periphery of the chuck.

Claim 64

Dependent Claim 37 words

The reactor of claim 45, wherein the conical guide extends from about the periphery of the cracker to about the periphery of the chuck to direct gases from the cracker around the chuck toward an exhaust source.

Claim 65

Dependent Claim 29 words

A reactor for transport polymerization, comprising a cracker, a hydrogen membrane at least partially surrounding the cracker, a chuck, and a guide located between the cracker and the chuck.

Claim 66

Dependent Claim 29 words

A reactor for transport polymerization, comprising a cracker, a hydrogen membrane at least partially surrounding the cracker, a chuck, and a guide located between the cracker and the chuck.

Claim 67

Dependent Claim 23 words

The reactor of claim 48, wherein the guide extends from about the periphery of the cracker to about the periphery of the chuck.

Claim 68

Dependent Claim 15 words

The reactor of claim 48, wherein the guide inhibits hydrogen from mixing with dissociated intermediates.

Claim 69

Dependent Claim 17 words

The reactor of claim 48, wherein the guide directs the hydrogen around the periphery of the chuck.

Claim 70

Dependent Claim 17 words

The reactor of claims 1, 14 or 22, wherein a wafer pre-cleaner is associated with the chuck.

Claim 71

Dependent Claim 67 words

A transport deposition system (reactor) for making thin films comprising: a cracker that dissociates precursors; a deposition area; a chuck adapted to hold a wafer, said chuck located in said deposition area; a wafer pre-cleaner includes a source of one of ultraviolet or vacuum ultraviolet energy; and at least one of a moveable flow pattern adjuster located between the cracker and the chuck and a hydrogen membrane.

Claim 72

Dependent Claim 67 words

A transport deposition system (reactor) for making thin films comprising: a cracker that dissociates precursors; a deposition area; a chuck adapted to hold a wafer, said chuck located in said deposition area; a wafer pre-cleaner includes a source of one of ultraviolet or vacuum ultraviolet energy; and at least one of a moveable flow pattern adjuster located between the cracker and the chuck and a hydrogen membrane.

Claim 73

Dependent Claim 13 words

The reactor of claim 53, wherein the pre-cleaner includes a UV excimer laser.

Claim 74

Dependent Claim 15 words

The reactor of claim 53, wherein the pre-cleaner includes a source of incoherent excimer radiation.

Claim 75

Dependent Claim 14 words

The reactor of claims 1, 14 or 22, wherein the cracker contains a catalyst.

Claim 76

Dependent Claim 65 words

A transport deposition system (reactor) for making thin films comprising: a cracker having a catalyst selected from the group consisting of a dehydrogenation catalyst, a reforming catalyst and an oxidative dehydration catalyst that dissociates precursors; a deposition area; a chuck adapted to hold a wafer, said chuck located in said deposition area; and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 77

Dependent Claim 65 words

A transport deposition system (reactor) for making thin films comprising: a cracker having a catalyst selected from the group consisting of a dehydrogenation catalyst, a reforming catalyst and an oxidative dehydration catalyst that dissociates precursors; a deposition area; a chuck adapted to hold a wafer, said chuck located in said deposition area; and a moveable flow pattern adjuster located between the cracker and the chuck.

Claim 78

Dependent Claim 24 words

The reactor of claim 57, wherein the dehydrogenation catalyst is selected from the group consisting transition metal oxides and noble metals on acid supports.

Claim 79

Dependent Claim 23 words

The reactor of claim 57, wherein said catalyst is selected from the group consisting of noble metals or metal sulfide on active carbon.

Claim 80

Dependent Claim 28 words

The reactor of claim 57, wherein the catalyst is selected from the group consisting of Ga 13 , Cr 12 , GaAl 12 and Al 13 on PILCs.

Claim 81

Dependent Claim 18 words

The reactor of claim 57, wherein the catalyst comprises M--Al 2 O 3 where M is a lanthanide.

Claim 82

Dependent Claim 35 words

The reactor of claim 57, wherein the catalyst comprises Al 2 O 3 kneaded with Bi and Sb compounded with a metal selected from the group consisting of periodic table Group VIB & VIIB metals.

Claim 83

Dependent Claim 47 words

The reactor of claim 57, wherein the catalyst is selected from the group consisting of M-modified H-ZSM-5 and H-ZSM-11 where M is selected from the group consisting of Zn, Ga, Pt--Ga, Pt--Na, Mo, Cr, K, Ca, Mg, Al, and metals selected from periodic table Group VIII metals.

Claim 84

Dependent Claim 25 words

The reactor of claim 57, wherein the catalyst comprises M-modified MFI (H-GalloSilicates) where M is selected from the group consisting of Si/Ga, Na/Ga, and Al.

Claim 85

Dependent Claim 15 words

The reactor of claim 57, wherein the catalyst comprises a rare earth metal exchanged Y-zeolite.

Claim 86

Dependent Claim 17 words

The reactor of claim 57, wherein the catalyst comprises a rare earth metal exchanged ultra stable Y-zeolite.

Claim 87

Dependent Claim 15 words

The reactor of claim 57, wherein the catalyst comprises Ti oxide paired with Zr oxide.

Claim 88

Dependent Claim 28 words

The reactor of claim 57, wherein the catalyst comprises M plated onto aluminum, where M is selected from the group consisting of Ni, Cr, Ni/Cr, and Ni/Cr/Al alloys.

Claim 89

Dependent Claim 12 words

The reactor of claims 1 or 22, further comprising a hydrogen membrane.

Claim 90

Dependent Claim 21 words

The reactor of claims 1 or 22, further comprising a hydrogen membrane to permit separation of processed precursor from a by-product.

Claim 91

Dependent Claim 22 words

The hydrogen membrane of claim 69 wherein the hydrogen membrane contains pores with diameters between about 3 Å and about 5 Å.

Claim 92

Dependent Claim 31 words

The hydrogen membrane of claim 69 wherein the said hydrogen membrane comprises holes sufficiently small to permit by-products to pass through, but does not permit processed precursor molecules to pass through.

Claim 93

Dependent Claim 37 words

The reactor of claims 1, 14 or 22, wherein said precursor for the synthesis of fluorinated polymers comprises a compound with the structure: ##STR9## wherein Ar is a fluorinated aromatic moiety, and Y is a leaving group.

Claim 94

Dependent Claim 47 words

The reactor of claim 14, wherein said precursor for the synthesis of fluorinated polymers comprises a compound with the structure: ##STR10## wherein Ar is a non fluorinated phenylene moiety, Y is a leaving group, and said reactor utilizes at least one infrared radiation and vacuum ultraviolet radiation.

Claim 95

Dependent Claim 15 words

The reactor of claims 1, 14 or 22, wherein the cracker includes a free-radical initiator.

Claim 96

Dependent Claim 53 words

A reactor for transport polymerization or chemical vapor deposition comprising: a chamber, a gas injector associated with the chamber, a chuck located in the chamber and spaced from the gas injector, an energy source located adjacent to the gas injector, and a radiation source associated with the chamber wall to decompose exhaust gases.

Claim 97

Dependent Claim 53 words

A reactor for transport polymerization or chemical vapor deposition comprising: a chamber, a gas injector associated with the chamber, a chuck located in the chamber and spaced from the gas injector, an energy source located adjacent to the gas injector, and a radiation source associated with the chamber wall to decompose exhaust gases.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2003-07-11	2004-01-10	2004-07-11	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2007-07-11	2008-01-10	2008-07-11	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2011-07-11	2012-01-10	2012-07-11	$7700.00	Window Closed / Lapsed

Deposition systems and processes for transport polymerization and chemical vapor deposition

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