US5139813A
Expired / Lapsed
US
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Method for inducing fluorescence in parylene films by an active plasma
Assignee: Union Carbide Chemicals and Plastics Technology LLC
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Filing: 1990-09-28
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Granted: 1992-08-18
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Expires: 2010-09-28
Abstract
Abstract A method is provided for inducing fluorescence in films or coatings comprised in whole or in part of parylene which involves exposure of the parylene to an active plasma. A method is also provided which utilizes plasma induced fluorescence as a means for quality control inspection of films and coatings of parylene such as those contained on electronic components or for identification and/or authentication of various articles.
Inventors
- 👤 Joseph H. Yira
- 👤 William F. Beach
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 00:04
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; B05D3/00; B05D3/14; B05D3/141; B05D3/145; G; G01; G01N; G01N21/00; G01N21/62; H; H05; H05K; H05K1/00; H05K1/02; H05K1/0266; H05K3/00; H05K3/22; H05K3/28; H05K3/284
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
112 words
A method for determining whether an article which has been coated with a thin transparent layer of parylene by a vapor deposition method contains parylene on those areas intended to be coated, which comprises the steps of: (a) exposing the parylene coating on said article to an active plasma generated at a power level of up to about 1500 watts under conditions and for a period of time sufficient to induce fluorescence in the surface layer of said parylene, (b) exposing the parylene coating to light of a wavelength suitable for the detection of fluorescence in said coating, and (c) observing those areas of said article wherein fluorescence is present or absent.
Claim 2
Independent Claim
112 words
A method for determining whether an article which has been coated with a thin transparent layer of parylene by a vapor deposition method contains parylene on those areas intended to be coated, which comprises the steps of: (a) exposing the parylene coating on said article to an active plasma generated at a power level of up to about 1500 watts under conditions and for a period of time sufficient to induce fluorescence in the surface layer of said parylene, (b) exposing the parylene coating to light of a wavelength suitable for the detection of fluorescence in said coating, and (c) observing those areas of said article wherein fluorescence is present or absent.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein said active plasma uses an inert gas containing less than 10 percent by volume of oxygen.
Claim 4
Dependent Claim
11 words
The method of claim 2 wherein said inert gas is argon.
Claim 5
Dependent Claim
11 words
The method of claim 2 wherein said inert gas is helium.
Claim 6
Dependent Claim
12 words
The method of claim 2 wherein said inert gas is carbon tetrafluoride.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein said fluorescence is induced by said active plasma at a pressure of from about 0.10 to about 5 torr.
Claim 8
Dependent Claim
25 words
The method of claim 1 wherein said fluorescence is induced by said active plasma at a pressure of from about 0.20 to about 2 torr.
Claim 9
Dependent Claim
29 words
The method of claim 1 wherein said fluorescence is induced by said active plasma at a gas flow of from about 100 to about 1000 std cm 3 /m.
Claim 10
Dependent Claim
28 words
The method of claim 1 wherein said fluorescence is induced by said active plasma at gas flow of from about 200 to about 400 std cm 3 /m.
Claim 11
Dependent Claim
26 words
The method of claim 1 wherein said fluorescence is induced by said active plasma at a temperature of from about 25° C. to about 200° C.
Claim 12
Dependent Claim
27 words
The method of claim 1 wherein said fluorescence is induced by said active plasma at a temperature of from about 50° C. to about 100° C .
Claim 13
Dependent Claim
11 words
The method of claim 1 wherein said parylene is parylene C.
Claim 14
Dependent Claim
11 words
The method of claim 1 wherein said parylene is parylene D.
Claim 15
Dependent Claim
22 words
The method of claim 1 wherein said active plasma is generated at a power level of from about 50 to 1500 watts.
Claim 16
Dependent Claim
24 words
The method of claim 1 wherein said fluorescence is substantially included only in about the first micrometer of the surface layer of said parylene.
Claim 17
Independent Claim
93 words
A method for creating selective sites of fluorescence in articles comprised in whole or in part of parylene, which comprises the steps of: 1) shielding with shielding means, those portions of parylene in which fluorescent sites are not desired, 2) exposing the remainder of the parylene to an active plasma generated at a power level of up to about 1500 watts capable of inducing fluorescent sites in the surface layer of said parylene under conditions and for a period of time sufficient to create such sites, and 3) thereafter removing the shielding means.
Claim 18
Independent Claim
93 words
A method for creating selective sites of fluorescence in articles comprised in whole or in part of parylene, which comprises the steps of: 1) shielding with shielding means, those portions of parylene in which fluorescent sites are not desired, 2) exposing the remainder of the parylene to an active plasma generated at a power level of up to about 1500 watts capable of inducing fluorescent sites in the surface layer of said parylene under conditions and for a period of time sufficient to create such sites, and 3) thereafter removing the shielding means.
Claim 19
Dependent Claim
22 words
The method of claim 16 wherein said active plasma uses an inert gas containing less than 10 percent by volume of oxygen.
Claim 20
Dependent Claim
11 words
The method of claim 17 wherein said inert gas is argon.
Claim 21
Dependent Claim
11 words
The method of claim 17 wherein said inert gas is helium.
Claim 22
Dependent Claim
25 words
The method of claim 16 wherein said fluorescence is induced by said active plasma at a pressure of from about 0.2 to about 5 torr.
Claim 23
Dependent Claim
25 words
The method of claim 16 wherein said fluorescence is induced by said active plasma at a pressure of from about 0.20 to about 2 torr.
Claim 24
Dependent Claim
29 words
The method of claim 16 wherein said fluorescence is induced by said active plasma at a gas flow of from about 100 to about 1000 std cm 3 /m.
Claim 25
Dependent Claim
28 words
The method of claim 16 wherein said fluorescence is induced by said active plasma at gas flow of from about 200 to about 400 std cm 3 /m.
Claim 26
Dependent Claim
26 words
The method of claim 16 wherein said fluorescence is induced by said active plasma at a temperature of from about 25° C. to about 200° C.
Claim 27
Dependent Claim
27 words
The method of claim 16 wherein said fluorescence is induced by said active plasma at a temperature of from about 50° C. to about 100° C .
Claim 28
Dependent Claim
11 words
The method of claim 16 wherein said parylene is parylene C.
Claim 29
Dependent Claim
11 words
The method of claim 16 wherein said parylene is parylene D.
Claim 30
Independent Claim
126 words
A method of identifying and insuring the authenticity of an article which comprises the steps of: 1) coating at least a portion of said article with parylene; 2) shielding with shielding means of a particular configuration, those portions of the parylene coating in which fluorescent sites are not desirable; 3) exposing the remainder of the parylene to active plasma generated at a power level of up to about 1500 watts capable of inducing fluorescent sites in the surface layer of said parylene under conditions and for a period of time sufficient to create such sites; 4) removing the shielding means; and 5) exposing the article to light of a wavelength suitable for the detection of the fluorescent sites to confirm the presence of the predetermined configuration.
Claim 31
Independent Claim
126 words
A method of identifying and insuring the authenticity of an article which comprises the steps of: 1) coating at least a portion of said article with parylene; 2) shielding with shielding means of a particular configuration, those portions of the parylene coating in which fluorescent sites are not desirable; 3) exposing the remainder of the parylene to active plasma generated at a power level of up to about 1500 watts capable of inducing fluorescent sites in the surface layer of said parylene under conditions and for a period of time sufficient to create such sites; 4) removing the shielding means; and 5) exposing the article to light of a wavelength suitable for the detection of the fluorescent sites to confirm the presence of the predetermined configuration.
References Cited (Backward Citations)
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