US5324813A
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Low dielectric constant fluorinated polymers and methods of fabrication thereof
Assignee: International Business Machines Corp
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Filing: 1992-07-22
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Granted: 1994-06-28
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Expires: 2012-07-22
Abstract
Abstract Low dielectric constant polyimides formed from an optionally fluorinated dianhydride and a fluorinated diamine are described. The fluorine containing constituents are sterically disposed so that the dipole moment of the constituents tend to cancel out. Since fluorine containing diamines are generally nonreactive, to achieve a polyimide of high enough molecular weight to be practically useful, a method of fabrication of a high molecular weight polymer from monomers of low reactivity is provided. The monomers, such as a diamine and dianhydride are provided in a solution within which a low molecular weight polyamic acid is formed. The solution is dried. The polyamic acid used is cured to a low molecular weight polyimide. The polyimide is redisolved, redryed and recured enough times to build up the molecular weight to a useful level. The method is applicable to fabricating other polymers of high molecular weight, such as polyamides, polyesters and polyurethanes.
Inventors
- 👤 Gareth G. Hougham
- 👤 Jane M. Shaw
- 👤 Alfred Viehbeck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:39
CPC Classifications
C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1039
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
51 words
A low dielectric contact material comprising a plurality of molecules having structural formula: ##STR33## wherein t≧15, wherein R 1 is an organic radical containing fluorine containing constituents sterically arranged so that the dipole moments of said constituents tends to cancel; wherein a is≧0; and wherein R is a tetravalent organic radical.
Claim 2
Dependent Claim
51 words
A low dielectric contact material comprising a plurality of molecules having structural formula: ##STR33## wherein t≧15, wherein R 1 is an organic radical containing fluorine containing constituents sterically arranged so that the dipole moments of said constituents tends to cancel; wherein a is≧0; and wherein R is a tetravalent organic radical.
Claim 3
Dependent Claim
9 words
The material of claim 1, wherein R contains fluorine.
Claim 4
Dependent Claim
73 words
The material of claim 1, wherein said tetravalent organic radical is at least one selected from the group consisting of: ##STR34## wherein R 2 is selected from the group consisting of divalent aliphatic hydrocarbon radicals having from 1 to 4 carbon atoms or aromatic rings and carbonyl, oxy, sulfo, sulfide, ether, siloxane, phosphine oxide, hexafluoroisopropylidene, sulfonyl radicals; and ##STR35## wherein K≧1; wherein M is selected from the group consisting of F and fluoroalkyl.
Claim 5
Dependent Claim
15 words
The material of claim 1, wherein there are an even number of fluorine containing constituents.
Claim 6
Dependent Claim
32 words
The material of claim 3, wherein said tetravalent organic radical includes fluorine containing constituents which are sterically disposed so that the dipole moments of said constituents tend to cancel each other out.
Claim 7
Dependent Claim
15 words
The material of claim 5, wherein there are an even number of fluorine containing constituents.
Claim 8
Dependent Claim
20 words
The material of claim 4, wherein said fluorine containing constituent is selected from the group consisting of F and fluoroalkyl.
Claim 9
Dependent Claim
31 words
The material of claim 1, wherein R 1 is aromatic and contains fluorine containing constituents sterically disposed so that the dipole moments of said constituents tend to cancel each other out.
Claim 10
Dependent Claim
20 words
The material of claim 1, wherein said fluorine containing constituent is selected from the group consisting of F and fluoralkyl.
Claim 11
Dependent Claim
16 words
The material of claim 1, wherein R 1 is selected from the group consisting of: ##STR36##
Claim 12
Dependent Claim
6 words
A material, wherein n>1, comprising: ##STR37##
Claim 13
Dependent Claim
6 words
A material, wherein n>1, comprising: ##STR37##
Claim 14
Dependent Claim
15 words
The material of claim 1, wherein said molecule has molecular weight greater than about 10,000.
Claim 15
Dependent Claim
26 words
The material of claim 8, wherein said molecule has a rotation axis with respect to which the dipole moment of said fluorine containing constituents cancel out.
Claim 16
Independent Claim
86 words
A method of forming a polyimide of high molecular weight comprising the steps of: providing an admixture of a dianhydride and a diamine in a solvent; permitting said admixture to react to form polyamic acid; drying said admixture to remove said solvent; curing said polyamic acid to form a polyimide; dissolving said polyimide in a solution; redrying said solution; recuring said redryed solution; repeating said steps of dissolving, redrying and recuring a sufficient number of times to increase the number average molecular weight of said polyimide.
Claim 17
Independent Claim
86 words
A method of forming a polyimide of high molecular weight comprising the steps of: providing an admixture of a dianhydride and a diamine in a solvent; permitting said admixture to react to form polyamic acid; drying said admixture to remove said solvent; curing said polyamic acid to form a polyimide; dissolving said polyimide in a solution; redrying said solution; recuring said redryed solution; repeating said steps of dissolving, redrying and recuring a sufficient number of times to increase the number average molecular weight of said polyimide.
Claim 18
Dependent Claim
15 words
The method of claim 14, wherein said diamine and said dianhydride have low chemical reactivity.
Claim 19
Dependent Claim
33 words
The method of claim 15, wherein said dianhydride contains a plurality of fluorine containing constituents which are sterically disposed so that the dipole moments of said constituents tend to cancel each other out.
Claim 20
Dependent Claim
20 words
The method of claim 15, wherein said fluorine containing constituents are selected from the group consisting of F and fluoroalkyl.
Claim 21
Dependent Claim
33 words
The method of claim 15, wherein said diamine contains a plurality of fluorine containing constituents sterically disposed so that the dipole moments of said fluorine containing constituents tend to cancel each other out.
Claim 22
Dependent Claim
31 words
The method of claim 14, wherein the dipole moments of said fluorine containing constituents tend to cancel each other out with respect to the principle axis of rotation of said polyimide.
Claim 23
Dependent Claim
21 words
The method of claim 18, wherein said fluorine containing constituent is selected from the group consisting of F and fluoro alkyl.
Claim 24
Dependent Claim
37 words
The method of claim 14, wherein said diamine is aromatic and contains an even number of fluorine containing constituents sterically disposed so that the dipole moments of said fluorine containing constituents tend to cancel each other out.
Claim 25
Dependent Claim
16 words
The method of claim 14, wherein said diamine is selected from the group consisting of: ##STR38##
Claim 26
Independent Claim
89 words
A method of forming a polymer comprising the steps of: providing an admixture of a first monomer and a second monomer in a solvent; heating said admixture to form a polymer precursor; drying said admixture to remove said solvent; curing said polymer precursor to form a polymer having a number average molecular weight; dissolving said polymer in a solution; redrying said solution; recuring said redryed solution; repeating said steps of dissolving, redrying and recuring a sufficient number of times to increase said number average molecular weight of said polymer.
Claim 27
Independent Claim
89 words
A method of forming a polymer comprising the steps of: providing an admixture of a first monomer and a second monomer in a solvent; heating said admixture to form a polymer precursor; drying said admixture to remove said solvent; curing said polymer precursor to form a polymer having a number average molecular weight; dissolving said polymer in a solution; redrying said solution; recuring said redryed solution; repeating said steps of dissolving, redrying and recuring a sufficient number of times to increase said number average molecular weight of said polymer.
Claim 28
Dependent Claim
34 words
The method of claim 23, wherein said first monomer contains a plurality of fluorine containing constituents which are sterically disposed so that the dipole moments of said constituents tend to cancel each other out.
Claim 29
Dependent Claim
21 words
The method of claim 24, wherein said fluorine containing constituents are selected from the group consisting of F and fluoro alkyl.
Claim 30
Dependent Claim
34 words
The method of claim 23, wherein said second monomer contains a plurality of fluorine containing constituents sterically disposed so that the dipole moments of said fluorine containing constituents tend to cancel each other out.
Claim 31
Dependent Claim
21 words
The method of claim 26, wherein said fluorine containing constituent is selected from the group consisting of F and fluoro alkyl.
Claim 32
Dependent Claim
16 words
The method of claim 23, wherein said number average molecular weight is greater than about 10,000.
Claim 33
Dependent Claim
26 words
The method of claim 23, wherein said first monomer is a dianhydride, wherein said second monomer is a diamine and wherein said polymer is a polyimide.
Claim 34
Dependent Claim
27 words
The method of claim 23, wherein said first monomer di-alcohol, said second monomer is a di-isodyanate and wherein said polymer of high molecular weight is a polurethane.
Claim 35
Dependent Claim
29 words
The method of claim 23, wherein said first monomer is a diamine said second monomer is a dicarboxylic acid and wherein polymer of high molecular weight is a polyamide.
Claim 36
Dependent Claim
30 words
The method of claim 23, wherein said first monomer is a di-alcohol said second monomer is a dicarboxylic acid and wherein said polymer of high molecular weight is a polyester.
Claim 37
Dependent Claim
27 words
The method of claim 26, wherein said fluorine containing constituents tend to cancel each other out with respect to the principle axis of rotation of said polymer.
Claim 38
Dependent Claim
30 words
The method of claim 26, wherein said first monomer is a dialcohol; said second monomer is a diaryl fluoride and wherein said polymer of high molecular weight is a polyarylether.
Claim 39
Dependent Claim
27 words
The structure of claim 1, wherein said compounds contains at least one phenyl group having a plurality of fluorine containing constituents which are non-ortho to each other.
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