US5424097A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Continuous vapor deposition apparatus
Assignee: Specialty Coating Systems Inc
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Filing: 1993-09-30
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Granted: 1995-06-13
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Expires: 2013-09-30
Abstract
Abstract Continuous vapor deposition apparatus for coating objects with a coating material, e.g., parylene, are disclosed. The apparatus comprise an entrance chamber for loading the objects, a process chamber for coating the objects, and an exit chamber for removing the objects. Coating material is introduced into the process chamber under vacuum conditions in a vaporized state. The pressure in the process chamber can be controlled by modulating the rate of introduction of the coating material with a modulating valve in response to the pressure in the process chamber. A process for continuously coating objects by vapor deposition under vacuum conditions, suitable for use in the apparatus, is also disclosed.
Inventors
- 👤 Roger A. Olson
- 👤 Frederick W. Kopitzke, III
- 👤 Joseph P. O'Connor
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:23
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
151 words
A continuous vapor deposition process for coating an object with parylene, comprising: introducing an object into an entrance chamber at about atmospheric pressure; establishing a vacuum pressure in the entrance chamber; establishing a vacuum pressure in a process chamber; introducing an adhesion promoter to the entrance chamber prior to advancing the object to the process chamber; advancing the object from the entrance chamber to the process chamber while maintaining a vacuum pressure in the entrance chamber; introducing the parylene into the process chamber in a vapor state at a vacuum pressure and depositing the parylene onto the object; establishing a vacuum pressure in an exit chamber; advancing the coated object from the process chamber to the exit chamber while maintaining a vacuum pressure in the process chamber and the exit chamber; rasing the pressure in the exit chamber to about atmospheric pressure; and removing the coated object from the exit chamber.
Claim 2
Dependent Claim
151 words
A continuous vapor deposition process for coating an object with parylene, comprising: introducing an object into an entrance chamber at about atmospheric pressure; establishing a vacuum pressure in the entrance chamber; establishing a vacuum pressure in a process chamber; introducing an adhesion promoter to the entrance chamber prior to advancing the object to the process chamber; advancing the object from the entrance chamber to the process chamber while maintaining a vacuum pressure in the entrance chamber; introducing the parylene into the process chamber in a vapor state at a vacuum pressure and depositing the parylene onto the object; establishing a vacuum pressure in an exit chamber; advancing the coated object from the process chamber to the exit chamber while maintaining a vacuum pressure in the process chamber and the exit chamber; rasing the pressure in the exit chamber to about atmospheric pressure; and removing the coated object from the exit chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-12 | 1998-12-12 | 1999-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-12 | 2002-12-12 | 2003-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-12 | 2006-12-12 | 2007-06-13 | $7700.00 | Window Closed / Lapsed |