Reflector assembly for reflecting the vapors of high temperature volatile materials

Claim 2

In apparatus for handling vapors of high temperature volatile material under reduced pressure to deposit a layer of said material upon a substrate comprising a vacuum chamber and means to position as substrate therein for deposition of said layer, the improvement which comprises a reflector assembly for reflecting said vapors of high temperature volatile material positioned within said vacuum chamber, said assembly comprising a thin fluorinated resin film coated on a support surface and heating means to heat said film to an elevated temperature.

Claim 3

The reflector assembly according to claim 1 wherein the fluorinated resin is either of polytetrafluoroethylene and polyfluoroethylenepropylene.

Claim 4

The reflector assembly according to claim 1 wherein the heat element is disposed on the opposite side of the reflecting plane of the fluorinated resin film.

Claim 5

The reflector assembly according to claim 3 wherein the heat element is fabricated in sheet form and directly disposed on the opposite side of the reflecting plane of the fluorinated resin film.

Claim 6

The reflector assembly according to claim 4 wherein the heat element is one selected from the group consisting of tin oxide, nichrome, nickel, tantalum and stainless steel.

Claim 7

The reflector assembly according to claim 5 wherein the metal constituting the heat element is mounted on a non-conductive substrate in the form of a thin film.

Claim 8

The reflector assembly according to claim 6 wherein the non-conductive substrate is either of glass and ceramics.

Claim 9

The reflector assembly according to claim 3 wherein the heat element mounted on one side of the non-conductive substrate assumes a ribbon shape bent in parallel arrangement and the reflector is disposed on the opposite side of said substrate.

Claim 10

In apparatus for handling vapors of high temperature volatile material under reduced pressure to deposit a layer of said material upon a substrate comprising a vacuum chamber and means to position a substrate therein for deposition of said layer, the improvement which comprises a viewiNg window for said chamber, said window comprising a transparent member as the body of said window having an inside surface and an outside surface and a reflector assembly positioned adjacent said inside surface, said reflector assembly comprising a thin, fluorinated resin film coated onto a transparent body and heating means to heat said film to an elevated temperature at which said film is transparent.

Claim 11

In apparatus for handling vapors of high temperature volatile material under reduced pressure to deposit a layer of said material upon a substrate comprising a vacuum chamber and means to position a substrate therein for deposition of said layer, the improvement which comprises a viewiNg window for said chamber, said window comprising a transparent member as the body of said window having an inside surface and an outside surface and a reflector assembly positioned adjacent said inside surface, said reflector assembly comprising a thin, fluorinated resin film coated onto a transparent body and heating means to heat said film to an elevated temperature at which said film is transparent.

Claim 12

A viewing window assembly for apparatus for handling vapors of high temperature volatile material under reduced pressure to deposit a layer of said material upon a substrate which comprises a plate of transparent material constituting the viewing window, said plate being fitted to and sealing an opening in said apparatus presenting an inside surface across said opening and a reflector assembly positioned adjacent said inside surface, said reflector assembly comprising a thin, fluorinated resin film coating on a transparent body which is substantially parallel to said inside surface and heating means to heat said film to an elevated temperature at which said film is transparent.

Claim 13

A viewing window assembly for apparatus for handling vapors of high temperature volatile material under reduced pressure to deposit a layer of said material upon a substrate which comprises a plate of transparent material constituting the viewing window, said plate being fitted to and sealing an opening in said apparatus presenting an inside surface across said opening and a reflector assembly positioned adjacent said inside surface, said reflector assembly comprising a thin, fluorinated resin film coating on a transparent body which is substantially parallel to said inside surface and heating means to heat said film to an elevated temperature at which said film is transparent.

Claim 14

In vacuum deposition apparatus comprising a vacuum chamber, an opening in said vacuum chamber and a viewing window fitted to and sealing said opening, the improvement which comprises a reflector assembly to mitigate deposition of vapors of high temperature volatile materials existing in said chamber upon the inner surface of said window, said reflector assembly comprising a thin, fluorinated resin film coated onto a transparent body positioned adjacent said inner surface substantially parallel thereto and heating means to heat said film to an elevated temperature at which said film is transparent.

Claim 15

In vacuum deposition apparatus comprising a vacuum chamber, an opening in said vacuum chamber and a viewing window fitted to and sealing said opening, the improvement which comprises a reflector assembly to mitigate deposition of vapors of high temperature volatile materials existing in said chamber upon the inner surface of said window, said reflector assembly comprising a thin, fluorinated resin film coated onto a transparent body positioned adjacent said inner surface substantially parallel thereto and heating means to heat said film to an elevated temperature at which said film is transparent.

Claim 16

A viewing window assembly in vacuum deposition apparatus comprising a tubular member extending from said apparatus and communicating with a vacuum chamber forming part of said apparatus, a plate of transparent material fitted across the outer end of said tubular member forming a seal for said tubular member through which said vacuum chamber may be viewed from without said apparatus, a reflector assembly positioned within said tubular member between said plate and said vacuum chamber, said reflector assembly comprising a glass plate, a thin film of fluorinated resin coated upon the surface of said glass plate opposite to said plate of transparent material and on the opposite side of said glass plate a transparent film of electrically conductive material constituting a heating element for said reflector assembly and electrodes connected to said transparent film by which to energize said film with current to heat the reflector assembly to an elevated temperature at which said film of fluorinated resin is transparent.

Claim 17

A viewing window assembly in vacuum deposition apparatus comprising a tubular member extending from said apparatus and communicating with a vacuum chamber forming part of said apparatus, a plate of transparent material fitted across the outer end of said tubular member forming a seal for said tubular member through which said vacuum chamber may be viewed from without said apparatus, a reflector assembly positioned within said tubular member between said plate and said vacuum chamber, said reflector assembly comprising a glass plate, a thin film of fluorinated resin coated upon the surface of said glass plate opposite to said plate of transparent material and on the opposite side of said glass plate a transparent film of electrically conductive material constituting a heating element for said reflector assembly and electrodes connected to said transparent film by which to energize said film with current to heat the reflector assembly to an elevated temperature at which said film of fluorinated resin is transparent.