EP0769788A2
Expired / Lapsed
EP
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Low dielectric constant material for use as an insulation element in an electronic device
Assignee: W.L. Gore and Associates Inc
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Filing: 1996-10-17
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Granted: —
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Expires: 2016-10-17
Abstract
Abstract A low dielectric constant material is provided for use as an insulation element in an electronic device, such as but not limited to an integrated circuit structure for example. Such a low dielectric constant material may be formed from an aqueous fluoropolymer microemulsion or microdispersion. The low dielectric constant material may be made porous, further lowering its dielectric constant. The low dielectric constant material may be deposited by a spin-coating process and patterned using reactive ion etching or other suitable techniques.
Inventors
- 👤 Thomas C. Rosenmayer
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 06:39
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; H10P14/687; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/44; H01B3/443; H01B3/445; H10P14/66; H10P14/665; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W74/00; H10W74/40; H10W74/47
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
34 words
An improved electronic device, the improvement comprising: a fluoropolymer or a fluorinated polymer dielectric element, said element having a weight loss of less than 0.15%/minute at 420°C, and a thickness of less than 5µm.
Claim 2
Dependent Claim
20 words
A device as claimed in claim 1 in which the dielectric element has a dielectric constant of less than 2.2.
Claim 3
Dependent Claim
24 words
A device as claimed in claim 2, wherein the dielectric element has a dielectric constant in a range from about 1.9 to about 2.2.
Claim 4
Independent Claim
18 words
A device as claimed in any of claims 1 to 3, wherein the thickness is less than 1.5µm.
Claim 5
Independent Claim
21 words
A device as claimed in any of claims 1 to 4, wherein the weight loss is less than 0.02%/minute at 420°C.
Claim 6
Dependent Claim
17 words
A device as claimed in claim 5, wherein the weight loss is less than 0.01%/minute at 420°C.
Claim 7
Independent Claim
20 words
A device as claimed in any preceding claim, wherein the fluoropolymer or the fluorinated polymer is a homopolymer of tetrafluoroethylene.
Claim 8
Independent Claim
23 words
A device as claimed in any of claims 1 to 6, wherein the fluoropolymer or the fluorinated polymer is a copolymer of tetrafluoroethylene.
Claim 9
Independent Claim
32 words
A device as claimed in any of claims 1 to 6, wherein the fluoropolymer or the fluorinated polymer includes comonomers selected from a group consisting of hexafluoropropylene and perfluoro (alkyl vinyl ether).
Claim 10
Independent Claim
18 words
A device as claimed in any preceding claim, wherein the fluoropolymer or the fluorinated polymer further includes antioxidants.
Claim 11
Independent Claim
19 words
A device as claimed in any preceding claim, wherein the fluoropolymer or the fluorinated polymer further includes silicon dioxide.
Claim 12
Independent Claim
17 words
A device as claimed in any preceding claim, wherein the fluoropolymer or the fluorinated polymer is porous.
Claim 13
Dependent Claim
45 words
An improved dielectric material for use as an insulation element in an integrated circuit structure, the improved dielectric material comprising: a fluoropolymer material or a fluorinated polymer material having a weight loss of less than 0.15%/minute at 420°C and a thickness of less than 5µm.
Claim 14
Dependent Claim
20 words
A material as claimed in claim 13, in which the dielectric material has a dielectric constant of less then 2.2.
Claim 15
Dependent Claim
24 words
A material as claimed in claim 14, wherein the dielectric material has a dielectric constant in a range from about 1.9 to about 2.2
Claim 16
Dependent Claim
18 words
A material as claimed in any of claims 13 to 15, wherein the thickness is less than 1.5µm.
Claim 17
Dependent Claim
21 words
A material as claimed in any of claims 13 to 16, wherein the weight loss is less than 0.02%/minute at 420°C.
Claim 18
Dependent Claim
17 words
A material as claimed in claim 17, wherein the weight loss is less than 0.01%/minute at 420°C.
Claim 19
Dependent Claim
23 words
A material as claimed in any of claims 13 to 18, wherein the fluoropolymer or the fluorinated polymer is a homopolymer of tetrafluoroethylene.
Claim 20
Dependent Claim
23 words
A material as claimed in any of claims 13 to 18, wherein the fluoropolymer or the fluorinated polymer is a copolymer of tetrafluoroethylene.
Claim 21
Dependent Claim
32 words
A material as claimed in any of claims 13 to 18, wherein the fluoropolymer or the fluorinated polymer includes comonomers selected from a group consisting of hexafluoropropylene and perfluoro (alkyl vinyl ether).
Claim 22
Dependent Claim
21 words
A material as claimed in any of claims 13 to 21, wherein the fluoropolymer or the fluorinated polymer further includes antioxidants.
Claim 23
Dependent Claim
22 words
A material as claimed in any of claims 13 to 22, wherein the fluoropolymer or the fluorinated polymer further includes silicon dioxide.
Claim 24
Dependent Claim
20 words
A material as claimed in any of claims 12 to 21, wherein the fluoropolymer or the fluorinated polymer is porous.
References Cited (Backward Citations)
US4384092A
Cited
US5399640A
Cited
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