Patent US6024826A successfully refreshed from Google Patents.
US6024826A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma reactor with heated source of a polymer-hardening precursor material
Assignee: Applied Materials Inc
•
Filing: 1996-10-23
•
Granted: 2000-02-15
•
Expires: 2016-10-23
Abstract
Abstract A general method of the invention is to provide a polymer-hardening precursor piece (such as silicon, carbon, silicon carbide or silicon nitride, but preferably silicon) within the reactor chamber during an etch process with a fluoro-carbon or fluoro-hydrocarbon gas, and to heat the polymer-hardening precursor piece above the polymerization temperature sufficiently to achieve a desired increase in oxide-to-silicon etch selectivity. Generally, this polymer-hardening precursor or silicon piece may be an integral part of the reactor chamber walls and/or ceiling or a separate, expendable and quickly removable piece, and the heating/cooling apparatus may be of any suitable type including apparatus which conductively or remotely heats the silicon piece.
Inventors
- 👤 Kenneth Collins
- 👤 Michael Rice
- 👤 David Groechel
- 👤 Gerald Yin
- 👤 Jon Mohn
- 👤 Craig Roderick
- 👤 Douglas Buchberger
- 👤 Chan-Lon Yang
- 👤 Jerry Wong
- 👤 Jeffrey Marks
- 👤 Peter Keswick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:32
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01F; H01F29/00; H01F29/14; H01F29/143; H01J37/32137; H01J37/32146; H01J37/32155; H01J37/32165; H01J37/32431; H01J37/32458; H01J37/32467; H01J37/32522; H01J37/3266; H01J37/32688; H01J37/32697; H01J37/32706; H01J37/32798; H01J37/32853; H01J37/32871; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H01J2237/3343; H01J2237/3345; H01J2237/3346; H01J2237/338; H01J2237/3382
Claims Analysis
Total Claims: 71
Claim 1
Independent Claim
131 words
A plasma reactor comprising: a reactor chamber comprising a ceiling having a three-dimensionally shaped interior surface facing an interior portion of said reactor chamber; plasma source power coupling apparatus disposed about said ceiling and an RF power source to supply RF power to said plasma source power coupling apparatus; a process gas inletting apparatus and a process gas supply coupled to said inletting apparatus for furnishing a process gas containing etchant and polymer precursors; a support for holding an article to be processed inside said reactor chamber; a polymer-hardening precursor piece inside said chamber; and a heater capable of heating said polymer-hardening precursor piece to a temperature at which said polymer-hardening precursor piece donates polymer-hardening precursor material into a plasma, said temperature being greater than that temperature required to scavenge fluorine.
Claim 2
Dependent Claim
131 words
A plasma reactor comprising: a reactor chamber comprising a ceiling having a three-dimensionally shaped interior surface facing an interior portion of said reactor chamber; plasma source power coupling apparatus disposed about said ceiling and an RF power source to supply RF power to said plasma source power coupling apparatus; a process gas inletting apparatus and a process gas supply coupled to said inletting apparatus for furnishing a process gas containing etchant and polymer precursors; a support for holding an article to be processed inside said reactor chamber; a polymer-hardening precursor piece inside said chamber; and a heater capable of heating said polymer-hardening precursor piece to a temperature at which said polymer-hardening precursor piece donates polymer-hardening precursor material into a plasma, said temperature being greater than that temperature required to scavenge fluorine.
Claim 3
Dependent Claim
15 words
The plasma reactor of claim 1 wherein said reactor chamber has a cylindrical side wall.
Claim 4
Dependent Claim
13 words
The plasma reactor of claim 1 wherein said interior surface is dome shaped.
Claim 5
Dependent Claim
12 words
The plasma reactor of claim 3 wherein said interior surface is hemispherical.
Claim 6
Dependent Claim
31 words
The plasma reactor of claim 3 wherein said interior surface has a multiradius dome shape having a maximum radius at a periphery thereof and a minimum radius at the center thereof.
Claim 7
Dependent Claim
20 words
The reactor of claim 1 wherein said plasma source power coupling apparatus comprises an inductive antenna disposed about said ceiling.
Claim 8
Dependent Claim
27 words
The plasma reactor of claim 6 wherein said inductive antenna is divided into electrically separate concentric sections with separately controlled RF power levels applied to said sections.
Claim 9
Dependent Claim
14 words
The plasma reactor of claim 6 wherein said ceiling is a semiconductor window electrode.
Claim 10
Dependent Claim
18 words
The plasma reactor of claim 8 wherein said semiconductor window electrode is connected to an RF power source.
Claim 11
Dependent Claim
26 words
The reactor of claim 8 wherein said semiconductor window electrode is divided into plural electrically separate concentric sections with separately controlled RF power levels applied thereto.
Claim 12
Dependent Claim
19 words
The plasma reactor of claim 1 wherein said ceiling is divided into plural concentric sections with separately controlled temperatures.
Claim 13
Dependent Claim
19 words
The plasma reactor of claim 10 further comprising plural independent temperature control apparatus for said plural concentric ceiling sections.
Claim 14
Dependent Claim
23 words
The plasma reactor of claim 11 further comprising temperature control apparatus for independently controlling temperatures of said plural concentric sections of said ceiling.
Claim 15
Dependent Claim
30 words
The plasma reactor of claim 12 wherein said process gas inletting apparatus comprises plural process gas inlets at respective radial locations in said chamber with independently controllable gas flow rates.
Claim 16
Dependent Claim
24 words
The plasma reactor of claim 1 wherein said polymer-hardening precursor piece is a removable expendable piece separate from structural elements of said reactor chamber.
Claim 17
Dependent Claim
24 words
The plasma reactor of claim 15 wherein said removable expendable piece is an annular ring having an inner diameter exceeding that of said support.
Claim 18
Dependent Claim
13 words
The reactor of claim 16 wherein said annular ring is adjacent said support.
Claim 19
Dependent Claim
17 words
The reactor of claim 15 wherein said removable expendable piece is an annular ring adjacent said ceiling.
Claim 20
Dependent Claim
34 words
The reactor of claim 5, further comprising a heater capable of heating said removable expendable piece to a temperature range at which said removable expendable piece can donate polymer-hardening precursor material into said plasma.
Claim 21
Dependent Claim
18 words
The reactor of claim 1 wherein said polymer-hardening precursor piece comprises at least a portion of said ceiling.
Claim 22
Dependent Claim
41 words
The reactor of claim 20 further comprising a heater for heating at least the portion of said ceiling comprised of said polymer-hardening precursor piece to a temperature at which said polymer-hardening precursor piece can donate polymer-hardening precursor material into said plasma.
Claim 23
Dependent Claim
26 words
The reactor of claim 1 wherein said three-dimensionally shaped surface is an interior ceiling surface of said ceiling facing the interior portion of said reactor chamber.
Claim 24
Dependent Claim
31 words
The reactor of claim 22 wherein said polymer-hardening precursor piece comprises a liner in said chamber, said liner having an interior liner surface facing the interior portion of said reactor chamber.
Claim 25
Dependent Claim
22 words
The reactor of claim 23 wherein said interior liner surface comprises at least a portion of said ceiling three-dimensionally shaped interior surface.
Claim 26
Dependent Claim
13 words
The reactor of claim 24 wherein said interior liner surface is domed shaped.
Claim 27
Dependent Claim
31 words
The reactor of claim 25 wherein said interior liner surface has a multi-radius dome shape having a maximum radius at a center thereof and a minimum radius at a periphery thereof.
Claim 28
Dependent Claim
113 words
A capacitively coupled plasma reactor comprising: a reactor chamber; a capacitive electrode facing an interior portion of said chamber and an RF power source for supplying plasma source power to said capacitive electrode; process gas inletting apparatus and a process gas supply coupled to said inletting apparatus for furnishing a process gas containing etchant and polymer precursors; a support for holding an article to be processed inside said reactor chamber; a polymer-hardening precursor piece inside said chamber; and a heater capable of heating said polymer-hardening precursor piece to a temperature whereby said polymer-hardening precursor piece donates polymer-hardening precursor material into a plasma, said temperature being greater than that temperature required to scavenge fluorine.
Claim 29
Dependent Claim
113 words
A capacitively coupled plasma reactor comprising: a reactor chamber; a capacitive electrode facing an interior portion of said chamber and an RF power source for supplying plasma source power to said capacitive electrode; process gas inletting apparatus and a process gas supply coupled to said inletting apparatus for furnishing a process gas containing etchant and polymer precursors; a support for holding an article to be processed inside said reactor chamber; a polymer-hardening precursor piece inside said chamber; and a heater capable of heating said polymer-hardening precursor piece to a temperature whereby said polymer-hardening precursor piece donates polymer-hardening precursor material into a plasma, said temperature being greater than that temperature required to scavenge fluorine.
Claim 30
Dependent Claim
34 words
The reactor of claim 27 wherein said capacitive electrode comprises an overhead ceiling of said reactor chamber which faces said support, and said support comprises a capacitive counter electrode generally facing said capacitive electrode.
Claim 31
Dependent Claim
11 words
The reactor of claim 28 wherein said overhead ceiling is cylindrical.
Claim 32
Dependent Claim
23 words
The plasma reactor of claim 28 wherein said overhead ceiling has a three-dimensionally shaped interior surface facing the interior portion of said chamber.
Claim 33
Dependent Claim
22 words
The plasma reactor of claim 28 wherein said ceiling has a dome shaped interior surface facing the interior portion of said chamber.
Claim 34
Dependent Claim
12 words
The plasma reactor of claim 31 wherein said interior surface is hemispherical.
Claim 35
Dependent Claim
31 words
The plasma reactor of claim 31 wherein said interior surface has a multi-radius dome shape with a minimum radius at the periphery thereof and a maximum radius at the center thereof.
Claim 36
Dependent Claim
28 words
The plasma reactor of claim 28 wherein said overhead ceiling is divided into plural electrically separate concentric sections with separately controlled plasma source RF power levels applied thereto.
Claim 37
Dependent Claim
20 words
The plasma reactor of claim 28 wherein said overhead ceiling is divided into plural concentric sections with separately controlled temperatures.
Claim 38
Dependent Claim
22 words
The plasma reactor of claim 34 further comprising a separate temperature control system for each of said concentric sections of said ceiling.
Claim 39
Dependent Claim
42 words
The plasma reactor of claim 36 wherein said process gas inletting apparatus comprises plural inlets distributed among different radial locations in said chamber and a separate gas flow control system for each of said plural inlets for independently controlling gas flow rates.
Claim 40
Dependent Claim
24 words
The plasma reactor of claim 27 wherein said polymer-hardening precursor piece is a removable expendable piece separate from structural elements of said reactor chamber.
Claim 41
Dependent Claim
24 words
The plasma reactor of claim 38 wherein said removable expendable piece is an annular ring having an inner diameter exceeding that of said support.
Claim 42
Dependent Claim
34 words
The reactor of claim 38 further comprising a heater capable of heating said removable expendable piece to a temperature range at which said removable expendable piece can donate polymer-hardening precursor material into said plasma.
Claim 43
Dependent Claim
18 words
The reactor of claim 28 wherein said polymer precursor piece comprises at least a portion of said ceiling.
Claim 44
Dependent Claim
21 words
The reactor of claim 28 wherein said overhead ceiling has a three-dimensionally shaped surface facing the interior portion of said chamber.
Claim 45
Dependent Claim
30 words
The reactor of claim 42 wherein said polymer-hardening precursor piece comprises a liner in said reactor chamber, said liner having an interior liner surface facing the interior of said chamber.
Claim 46
Dependent Claim
20 words
The reactor of claim 43 wherein said interior liner surface comprises at least a portion of said ceiling interior surface.
Claim 47
Dependent Claim
141 words
A plasma reactor comprising: plasma source power coupling apparatus disposed about a ceiling and an RF power source to supply RF power to said plasma source power coupling apparatus; process gas inletting apparatus and a process gas supply coupled to an inlet for furnishing a process gas containing etchant and polymer precursors; a support for holding an article to be processed inside a reactor chamber; a chamber liner comprising a polymer-hardening precursor material inside said reactor chamber, said chamber liner having an outer surface adjacent an interior surface of said reactor chamber and an inner surface facing an interior portion of said reactor chamber; and a heater capable of heating said polymer-hardening precursor material to a temperature at which said polymer-hardening precursor material donates polymer-hardening precursor material into a plasma, said temperature being greater than that temperature required to scavenge fluorine.
Claim 48
Dependent Claim
141 words
A plasma reactor comprising: plasma source power coupling apparatus disposed about a ceiling and an RF power source to supply RF power to said plasma source power coupling apparatus; process gas inletting apparatus and a process gas supply coupled to an inlet for furnishing a process gas containing etchant and polymer precursors; a support for holding an article to be processed inside a reactor chamber; a chamber liner comprising a polymer-hardening precursor material inside said reactor chamber, said chamber liner having an outer surface adjacent an interior surface of said reactor chamber and an inner surface facing an interior portion of said reactor chamber; and a heater capable of heating said polymer-hardening precursor material to a temperature at which said polymer-hardening precursor material donates polymer-hardening precursor material into a plasma, said temperature being greater than that temperature required to scavenge fluorine.
Claim 49
Dependent Claim
34 words
The plasma reactor of claim 45 wherein said chamber liner is adjacent a top portion of said reactor chamber whereby said inner surface of said chamber liner comprises said ceiling of said reactor chamber.
Claim 50
Dependent Claim
13 words
The plasma reactor of claim 46 wherein said ceiling has a three-dimensional shape.
Claim 51
Dependent Claim
11 words
The plasma reactor of claim 46 wherein said ceiling is cylindrical.
Claim 52
Dependent Claim
23 words
The plasma reactor of claim 46 wherein said ceiling has a dome shaped interior surface facing the interior portion of said reactor chamber.
Claim 53
Dependent Claim
12 words
The plasma reactor of claim 49 wherein said interior surface is hemispherical.
Claim 54
Dependent Claim
31 words
The plasma reactor of claim 49 wherein said interior surface has a multiradius dome shape having a maximum radius at a periphery thereof and a minimum radius at the center thereof.
Claim 55
Dependent Claim
20 words
The reactor of claim 45 wherein said plasma source power coupling apparatus comprises an inductive antenna disposed about said ceiling.
Claim 56
Dependent Claim
27 words
The plasma reactor of claim 52 wherein said inductive antenna is divided into electrically separate concentric sections with separately controlled RF power levels applied to said sections.
Claim 57
Dependent Claim
14 words
The plasma reactor of claim 52 wherein said ceiling is a semiconductor window electrode.
Claim 58
Dependent Claim
18 words
The plasma reactor of claim 54 wherein said semiconductor window electrode is connected to an RF power source.
Claim 59
Dependent Claim
26 words
The reactor of claim 54 wherein said semiconductor window electrode is divided into plural electrically separate concentric sections with separately controlled RF power levels applied thereto.
Claim 60
Dependent Claim
35 words
The plasma reactor of claim 46 wherein said ceiling is divided into plural concentric separate sections and further comprising: a separate temperature control system for each of said plural concentric separate sections of said ceiling.
Claim 61
Dependent Claim
19 words
The plasma reactor of claim 57 further comprising plural independent temperature control apparatus for said plural concentric ceiling sections.
Claim 62
Dependent Claim
43 words
The plasma reactor of claim 58 wherein said process gas inletting apparatus comprises plural inlets distributed among different radial locations in said reactor chamber and a separate gas flow control system for each of said plural inlets for independently controlling gas flow rates.
Claim 63
Dependent Claim
23 words
The plasma reactor of claim 45 wherein said polymer-hardening precursor material is a removable expendable piece separate from structural elements of said chamber.
Claim 64
Dependent Claim
24 words
The plasma reactor of claim 60 wherein said removable expendable piece is an annular ring having an inner diameter exceeding that of said support.
Claim 65
Dependent Claim
13 words
The reactor of claim 61 wherein said annular ring is adjacent said support.
Claim 66
Dependent Claim
16 words
The reactor of claim 60 wherein said expendable piece is an annular ring adjacent said ceiling.
Claim 67
Dependent Claim
33 words
The reactor of claim 60 further comprising a heater capable of heating said removable expendable piece to a temperature range at which said expendable piece can donate polymer-hardening precursor material into said plasma.
Claim 68
Dependent Claim
18 words
The reactor of claim 46 wherein said polymer-hardening precursor material comprises at least a portion of said ceiling.
Claim 69
Dependent Claim
39 words
The reactor of claim 65 further comprising a heater for heating at least said protion of said ceiling comprised of said polymer-hardening precursor material to a temperature at which said polymer-hardening precusror material can donate polymer-hardening into said plasma.
Claim 70
Dependent Claim
22 words
The reactor of claim 46 wherein said ceiling has a three dimensionally shaped surface facing the interior portion of said reactor chamber.
Claim 71
Dependent Claim
25 words
The reactor of claim 45 wherein said chamber liner having said inner surface comprises at least a portion of an interior surface of said ceiling.
References Cited (Backward Citations)
US4123316A
Cited
JPS55154582A
Cited
US4261762A
Cited
US4430547A
Cited
JPS57155732A
Cited
US4350578A
Cited
US4427516A
Cited
US4427762A
Cited
US4512391A
Cited
US4457359A
Cited
US4565601A
Cited
JPS6191377A
Cited
JPS61142744A
Cited
JPS61147531A
Cited
US4870245A
Cited
US4810935A
Cited
JPS6212129A
Cited
US4807016A
Cited
US4711698A
Cited
JPS62254428A
Cited
JPS639120A
Cited
US4786352A
Cited
US4756810A
Cited
US4842683A
Cited
US5000113A
Cited
US4793897A
Cited
US4786359A
Cited
US5006220A
Cited
US4918031A
Cited
US5015330A
Cited
US4990229A
Cited
EP0403418A2
Cited
EP0413282A2
Cited
US4948458A
Cited
US5556501A
Cited
US5203956A
Cited
US5085727A
Cited
US5258824A
Cited
US5169487A
Cited
US5074456A
Cited
WO1992020833A1
Cited
EP0520519A1
Cited
US5392018A
Cited
US5276693A
Cited
US5249251A
Cited
US5326404A
Cited
US5187454A
Cited
US5349313A
Cited
EP0552490A1
Cited
EP0552491A1
Cited
US5241245A
Cited
US5277751A
Cited
US5423945A
Cited
EP0596551A1
Cited
US5346578A
Cited
EP0601468A1
Cited
US5401350A
Cited
US5529657A
Cited
US5477975A
Cited
EP0651434A2
Cited
US5414246A
Cited
US5399237A
Cited
EP0680072A2
Cited
US5514246A
Cited
EP0727807A1
Cited
EP0742577A2
Cited
EP0807952A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-14 | 2003-08-16 | 2004-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-14 | 2007-08-16 | 2008-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-14 | 2011-08-16 | 2012-02-15 | $7700.00 | Window Closed / Lapsed |