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US5349313A Expired / Lapsed US ⏱️ 0.0 years remaining

Variable RF power splitter

Assignee: Applied Materials Inc
•
Filing: 1993-10-22
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Granted: 1994-09-20
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Expires: 2013-10-22
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Abstract

Abstract A variable RF power splitter including three serially connected inductors (14, 15, 16) powered by an RF power source (11, 12). Two loads (17, 18), between which the RF power is to be split, are connected to ground from two different points in the inductance string. A variable reactance (19) connected to ground from another point in the inductance string controls the RF power splitting.

Inventors

  • 👤 Kenneth S. Collins
  • 👤 John R. Trow
  • 👤 Craig A. Roderick

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 16:43
CPC Classifications
H; H03; H03H; H03H7/00; H03H7/48; H01; H01F; H01F29/00; H01F29/14; H01F29/143

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 195 words
An adjustable RF power splitter for coupling power received at an input terminal to two output terminals, wherein the ratio of RF voltage to the two outputs is adjustable, comprising: first, second, and third mutually coupled inductors connected in series so that the first inductor is connected between a first electrical junction and a second junction, the second inductor is connected between the second junction and a third junction, and the third inductor is connected between the third junction and a fourth junction; an input terminal and a reference terminal adapted for receiving an RF power input signal therebetween, the input terminal being connected to one of the four junctions; a variable reactance whose impedance is adjustable over a range, the variable reactance being connected between one of the other three junctions and the reference terminal; a first output terminal connected t one of the other two junctions; and a second output terminal connected to the remaining junction; whereby first and second output voltages are produced between the first and second output terminals, respectively, and the reference terminal, and whereby adjusting the variable reactance operates to vary the ratio between the first and second voltages.
Claim 2
Dependent Claim 195 words
An adjustable RF power splitter for coupling power received at an input terminal to two output terminals, wherein the ratio of RF voltage to the two outputs is adjustable, comprising: first, second, and third mutually coupled inductors connected in series so that the first inductor is connected between a first electrical junction and a second junction, the second inductor is connected between the second junction and a third junction, and the third inductor is connected between the third junction and a fourth junction; an input terminal and a reference terminal adapted for receiving an RF power input signal therebetween, the input terminal being connected to one of the four junctions; a variable reactance whose impedance is adjustable over a range, the variable reactance being connected between one of the other three junctions and the reference terminal; a first output terminal connected t one of the other two junctions; and a second output terminal connected to the remaining junction; whereby first and second output voltages are produced between the first and second output terminals, respectively, and the reference terminal, and whereby adjusting the variable reactance operates to vary the ratio between the first and second voltages.
Claim 3
Dependent Claim 21 words
A power splitter according to claim 1, wherein the junction to which the input terminal is connected is the first junction.
Claim 4
Dependent Claim 29 words
A power splitter according to claim 1, wherein the first, second, and third inductors are constructed by winding first, second, and third coils, respectively, around a common ferromagnetic core.
Claim 5
Dependent Claim 67 words
A power splitter according to claim 1, wherein the variable reactance resonates at the frequency of the RF input signal when the variable reactance is adjusted to a point near the middle of its adjustment range, whereby the variable reactance can be adjusted to a capacitive impedance at one end of its adjustment range and to an inductive impedance at the opposite end of its adjustment range.
Claim 6
Dependent Claim 21 words
A power splitter according to claim 4, wherein the variable reactance comprises a fixed inductor in series with a variable capacitor.
Claim 7
Dependent Claim 21 words
A power splitter according to claim 4, wherein the variable reactance comprises a fixed capacitor in series with a variable inductor.
Claim 8
Dependent Claim 42 words
A power splitter according to claim 6, wherein the variable inductor comprises a coil wound on a nonlinear ferromagnetic core, and wherein a magnetic field of adjustable intensity is applied to the nonlinear core to adjust the inductance of the variable inductor.
Claim 9
Dependent Claim 38 words
A power splitter according to claim 1, where said first, second, and third mutually coupled inductors have values of pairwise mutual coefficients of coupling K 12 , K 13 , and K 23 therebetween of at least 0.8.
Claim 10
Dependent Claim 126 words
An RF power splitter, comprising: first, second, and third mutually coupled inductors connected in series, the first inductor connected between a first terminal and a second terminal, the second inductor connected between the second terminal and a third terminal, and the third inductor connected between the third terminal and a fourth terminal; an RF power input signal connected between one of said four terminals and a reference terminal; a first and a second load, each load connected between a different one of the other three terminals, respectively, and said reference terminal; and a variable reactance connected between a remaining one of the four terminals and said reference terminal, said variable reactance being operable to vary the voltage ratio between the first load and the second load.
Claim 11
Dependent Claim 126 words
An RF power splitter, comprising: first, second, and third mutually coupled inductors connected in series, the first inductor connected between a first terminal and a second terminal, the second inductor connected between the second terminal and a third terminal, and the third inductor connected between the third terminal and a fourth terminal; an RF power input signal connected between one of said four terminals and a reference terminal; a first and a second load, each load connected between a different one of the other three terminals, respectively, and said reference terminal; and a variable reactance connected between a remaining one of the four terminals and said reference terminal, said variable reactance being operable to vary the voltage ratio between the first load and the second load.
Claim 12
Dependent Claim 21 words
A power splitter according to claim 9, wherein the junction to which the input signal is connected is the first junction.
Claim 13
Dependent Claim 29 words
A power splitter according to claim 9, wherein the first, second, and third inductors are constructed by winding first, second, and third coils, respectively, around a common ferromagnetic core.
Claim 14
Dependent Claim 67 words
A power splitter according to claim 9, wherein the variable reactance resonates at the frequency of the RF input signal when the variable reactance is adjusted to a point near the middle of its adjustment range, whereby the variable reactance can be adjusted to a capacitive impedance at one end of its adjustment range and to an inductive impedance at the opposite end of its adjustment range.
Claim 15
Dependent Claim 21 words
A power splitter according to claim 12, wherein the variable reactance comprises a fixed inductor in series with a variable capacitor.
Claim 16
Dependent Claim 21 words
A power splitter according to claim 12, wherein the variable reactance comprises a fixed capacitor in series with a variable inductor.
Claim 17
Dependent Claim 42 words
A power splitter according to claim 14, wherein the variable inductor comprises a coil wound on a nonlinear ferromagnetic core, and wherein a magnetic field of adjustable intensity is applied to the nonlinear core to adjust the inductance of the variable inductor.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-09-19 1998-03-21 1998-09-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-09-19 2002-03-21 2002-09-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-09-19 2006-03-21 2006-09-20 $7700.00 Window Closed / Lapsed

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