US5753601A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Organic stripping composition
Assignee: Air Products and Chemicals Inc
•
Filing: 1997-10-27
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Granted: 1998-05-19
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Expires: 2017-10-27
Abstract
Abstract Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.
Inventors
- 👤 Irl E. Ward
- 👤 Francis W. Michelotti
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:48
CPC Classifications
C; C09; C09D; C09D9/00; C09D9/005; C11; C11D; C11D3/00; C11D3/16; C11D3/20; C11D3/2075; C11D3/2086; C11D3/26; C11D3/30; C11D3/34; C11D3/3445; C11D3/43; C23; C23G; C23G5/00; C23G5/02; C23G5/032; C23G5/036; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425; C11D2111/00; C11D2111/10; C11D2111/14
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
75 words
In a process of stripping comprising the steps of applying an aqueous stripping composition consisting of organic polar solvent and a basic amine to a substrate having a photoresist coating and organic and/or inorganic residues and removing said stripping composition, said photoresist coating, and said residues from said substrate, the improvement wherein said composition has a pH of at least 11 and is an admixture which further consists of an effective inhibiting amount of pyrogallol.
Claim 2
Dependent Claim
75 words
In a process of stripping comprising the steps of applying an aqueous stripping composition consisting of organic polar solvent and a basic amine to a substrate having a photoresist coating and organic and/or inorganic residues and removing said stripping composition, said photoresist coating, and said residues from said substrate, the improvement wherein said composition has a pH of at least 11 and is an admixture which further consists of an effective inhibiting amount of pyrogallol.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-05-18 | 2001-11-17 | 2002-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-18 | 2005-11-17 | 2006-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-18 | 2009-11-17 | 2010-05-19 | $7700.00 | Window Closed / Lapsed |