US4929301A
Expired / Lapsed
US
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Anisotropic etching method and etchant
Assignee: International Business Machines Corp
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Filing: 1986-06-18
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Granted: 1990-05-29
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Expires: 2006-06-18
Abstract
Abstract The present invention is directed toward an improved etching solution which is a five component system and does not use ethylene-diamine. This etch will preferentially etch lightly doped, single crystalline silicon at an etch rate of 0.6 microns per minute ±0.05 microns per minute and will effectively stop at a selectively doped level in the silicon body being etched because the etch rate of this selectively doped level drops from 0.6 microns per minute to between 0.001 microns per minute and 0.0006 microns per minute. The etch is comprised of ethanol-amine, piperidine, water, pyrocatechol and 30% hydrogen peroxide. The solution preferably consists of 28 mls. ethanol-amine, 2 mls. piperidine, 5.5 mls. water, 5.5 grams pyrocatechol and 0.25 mls. hydrogen peroxide. If desired a trace of a long chain surfactant can be added to the solution.
Inventors
- 👤 Nicholas Beechko
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 07:24
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/126; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
46 words
A method for etching silicon including the steps of preparing an etch solution comprising: preparing an ethylene-diamine free etch solution comprising ethanol-amine, pyrocatechol, water, piperidine and hydrogen peroxide, applying said etch solution to said silicon at temperatures for time sufficient to affect a desired etched pattern.
Claim 2
Independent Claim
46 words
A method for etching silicon including the steps of preparing an etch solution comprising: preparing an ethylene-diamine free etch solution comprising ethanol-amine, pyrocatechol, water, piperidine and hydrogen peroxide, applying said etch solution to said silicon at temperatures for time sufficient to affect a desired etched pattern.
Claim 3
Dependent Claim
13 words
The method according to claim 1 wherein said hydrogen peroxide is 30% solution.
Claim 4
Dependent Claim
28 words
The method of claim 2 wherein the solution comprises 925 mls. ethanol-amine, 66 mls. piperidine, 181 mls. water, 181 grams pyrocatechol, and 8.5 mls. of 30% hydrogen peroxide.
Claim 5
Dependent Claim
16 words
The method of claim 1 wherein said solution is heated to a temperature of 125±1° C.
Claim 6
Dependent Claim
11 words
An etch solution comprising ethanol-amine, piperidine, water, pyrocatechol and hydrogen peroxide.
Claim 7
Dependent Claim
11 words
An etch solution comprising ethanol-amine, piperidine, water, pyrocatechol and hydrogen peroxide.
Claim 8
Dependent Claim
45 words
An etch solution free of ethylene-diamine wherein 925 mls. ethanol-amine, 66 mls. piperidine, 181 mls. water, and 181 grams pyrocatechol is heated to approximately 70° C. until the pyrocatechol is completely in solution, adding 8.5 mls. hydrogen peroxide and heating said solution to 125° C.
Claim 9
Dependent Claim
45 words
An etch solution free of ethylene-diamine wherein 925 mls. ethanol-amine, 66 mls. piperidine, 181 mls. water, and 181 grams pyrocatechol is heated to approximately 70° C. until the pyrocatechol is completely in solution, adding 8.5 mls. hydrogen peroxide and heating said solution to 125° C.
Claim 10
Dependent Claim
36 words
An etch solution free of ethylene-diamine for etching silicon comprising approximately 55 mole percent of ethanol-amine, approximately 2.3 mode percent of piperidine, approximately 5.8 mole percent of pyrocatechol, and approximately 1 mole percent of hydrogen peroxide.
Claim 11
Dependent Claim
36 words
An etch solution free of ethylene-diamine for etching silicon comprising approximately 55 mole percent of ethanol-amine, approximately 2.3 mode percent of piperidine, approximately 5.8 mole percent of pyrocatechol, and approximately 1 mole percent of hydrogen peroxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-05-28 | 1993-11-27 | 1994-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-28 | 1997-11-27 | 1998-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-28 | 2001-11-27 | 2002-05-29 | $7700.00 | Window Closed / Lapsed |