US3873203A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Durable high resolution silicon template
Assignee: Motorola Solutions Inc
•
Filing: 1973-03-19
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Granted: 1975-03-25
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Expires: 1993-03-19
Abstract
Abstract A template including a polycrystalline silicon layer on a glass substrate and a protective coating on the polycrystalline silicon layer and method of manufacturing same. In one embodiment, the protective coating is an oxide layer which protects the silicon layer from abrasive damage and further functions as a mask to silicon etchant during manufacture of the template, to provide a template having substantially improved resolution. A mixture of hydrazine and catechol is used as a silicon etchant, to eliminate fogging of the substrate material.
Inventors
- 👤 Alden Stevenson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 01:33
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/50; G03F1/38; G03F1/48
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
56 words
A TEMPLATE COMPRISING: A GLASS SUBSTRATE, SAID GLASS SUBSTRATE BEING TTRANSPARENT TO ULTRAVIOLET LIGHT, A LAYER OF POLYCRYSTALLINE SILICON ON SAID GLASS SUBSTRATE, SAID LAYER OF POLYCRYSTALLINE SILICON BEING PATTERNED, AND PROTECTIVE COATING MEANS ON AND COEHTENSIVE WITH SAID LAYER OF OLYCRYSTALINE SILICON FOR DEFINING THE EDGES OF SAID LAYER OF POLYCRYSTALLINE SILICON, SAID PROTECTIVE COSTING
Claim 2
Dependent Claim
56 words
A TEMPLATE COMPRISING: A GLASS SUBSTRATE, SAID GLASS SUBSTRATE BEING TTRANSPARENT TO ULTRAVIOLET LIGHT, A LAYER OF POLYCRYSTALLINE SILICON ON SAID GLASS SUBSTRATE, SAID LAYER OF POLYCRYSTALLINE SILICON BEING PATTERNED, AND PROTECTIVE COATING MEANS ON AND COEHTENSIVE WITH SAID LAYER OF OLYCRYSTALINE SILICON FOR DEFINING THE EDGES OF SAID LAYER OF POLYCRYSTALLINE SILICON, SAID PROTECTIVE COSTING
Claim 3
Dependent Claim
20 words
The template as recited in claim 1 wherein said layer of polycrystalline silicon is less than 10,000 angstrom units thick.
Claim 4
Dependent Claim
25 words
The template as recited in claim 1 wherein the thickness of said protective coating is in the range from 50 to several thousand angstrom units.
Claim 5
Dependent Claim
81 words
A template for masking ultraviolet light in manufacture of semiconductor devices including a glass substrate, said glass substrate being transparent to ultraviolet light, and a layer of polycrystalline silicon on said glass substrate, said layer of polycrystalline silicon being patterned comprising protective coating means on and coextensive with said layer of polycrystalline silicon for defining the edges of said layer of polycrystalline silicon, said protective coating means being chosen from the group consisting of silicon dioxide, silicon nitride and silicon oxynitride.
Claim 6
Dependent Claim
81 words
A template for masking ultraviolet light in manufacture of semiconductor devices including a glass substrate, said glass substrate being transparent to ultraviolet light, and a layer of polycrystalline silicon on said glass substrate, said layer of polycrystalline silicon being patterned comprising protective coating means on and coextensive with said layer of polycrystalline silicon for defining the edges of said layer of polycrystalline silicon, said protective coating means being chosen from the group consisting of silicon dioxide, silicon nitride and silicon oxynitride.
Claim 7
Dependent Claim
17 words
The template as recited in claim 4 wherein said protective coating means is pyrolitically deposited silicon dioxide.
Claim 8
Dependent Claim
17 words
The template as recited in claim 4 wherein said protective coating means is thermally grown silicon dioxide.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-03-24 | 1978-09-23 | 1979-03-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-03-24 | 1982-09-23 | 1983-03-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-03-24 | 1986-09-23 | 1987-03-25 | $7700.00 | Window Closed / Lapsed |