US5686747A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated circuits comprising interconnecting plugs
Assignee: Micron Technology Inc
•
Filing: 1996-08-07
•
Granted: 1997-11-11
•
Expires: 2016-08-07
Abstract
Abstract A semiconductor memory device includes, a) a semiconductor substrate; b) a field effect transistor gate positioned outwardly of the semiconductor substrate; c) opposing active areas formed within the semiconductor substrate on opposing sides of the gate; d) a capacitor electrically connected with one of the active areas; e) a bit line; f) a dielectric insulating layer positioned intermediate the bit line and the active areas; g) a bit line plug extending through the insulating layer and electrically interconnecting the bit line with the other active area, the bit line plug comprising an electrically conductive annular ring. Integrated circuitry, beyond memory devices, utilizing an annular interconnection ring are also disclosed. Such constructions having additional radially inward insulating annular rings and conductive rings are also disclosed. A method of forming a bit line over capacitor array of memory cells having such rings is also disclosed.
Inventors
- 👤 Mark Jost
- 👤 Charles H. Dennison
- 👤 Kunal Parekh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 08:49
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10B12/30; H10B12/31; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H10D1/711; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/063; H10W20/069; H10W20/40; H10D1/712; H10D1/714; H10D1/716; Y; Y10; Y10S; Y10S257/00; Y10S257/915
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
91 words
A semiconductor memory device comprising: a semiconductor substrate; a field effect transistor gate positioned outwardly of the semiconductor substrate; opposing active areas formed within the semiconductor substrate on opposing sides of the gate; a capacitor electrically connected with one of the active areas; a bit line; a dielectric insulating layer positioned intermediate the bit line and the other active area; and a bit line plug extending through the insulating layer and electrically interconnecting the bit line with the other active area, the bit line plug comprising an electrically conductive annular ring.
Claim 2
Dependent Claim
91 words
A semiconductor memory device comprising: a semiconductor substrate; a field effect transistor gate positioned outwardly of the semiconductor substrate; opposing active areas formed within the semiconductor substrate on opposing sides of the gate; a capacitor electrically connected with one of the active areas; a bit line; a dielectric insulating layer positioned intermediate the bit line and the other active area; and a bit line plug extending through the insulating layer and electrically interconnecting the bit line with the other active area, the bit line plug comprising an electrically conductive annular ring.
Claim 3
Dependent Claim
42 words
The semiconductor memory device of claim 1 wherein the bit line plug comprises a non-annular solid mass base plug which electrically connects with the other active area, the electrically conductive annular ring being integral with and extending outwardly of the base plug.
Claim 4
Dependent Claim
23 words
The semiconductor memory device of claim 1 further comprising an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring.
Claim 5
Dependent Claim
62 words
The semiconductor memory device of claim 1 further comprising: an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring; and an inner electrically conductive annular ring positioned radially inward of the electrically insulating annular ring, the inner electrically conductive annular ring being isolated from ohmic electrical connection with the other active area by the electrically insulating annular ring.
Claim 6
Dependent Claim
81 words
The semiconductor memory device of claim 1 further comprising: an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring; an inner electrically conductive annular ring positioned radially inward of the electrically insulating annular ring, the inner electrically conductive annular ring being isolated from ohmic electrical connection with the other active area by the electrically insulating annular ring; and a non-annular substantially solid mass inner electrically insulating plug provided radially inward of the inner electrically conductive annular ring.
Claim 7
Dependent Claim
59 words
The semiconductor memory device of claim 1 wherein, the bit line plug comprises a non-annular solid mass base plug which electrically connects with the other active area, the electrically conductive annular ring being integral with and extending outwardly of the base plug; and further comprising: an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring.
Claim 8
Dependent Claim
72 words
An integrated circuit comprising: an active area formed relative to a semiconductor substrate; an electrically conductive line; a dielectric insulating layer positioned intermediate the electrically conductive line and the active area; an interconnecting plug extending through the insulating layer and electrically interconnecting the line with the active area, the interconnecting plug comprising an electrically conductive annular ring; and an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring.
Claim 9
Dependent Claim
72 words
An integrated circuit comprising: an active area formed relative to a semiconductor substrate; an electrically conductive line; a dielectric insulating layer positioned intermediate the electrically conductive line and the active area; an interconnecting plug extending through the insulating layer and electrically interconnecting the line with the active area, the interconnecting plug comprising an electrically conductive annular ring; and an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring.
Claim 10
Dependent Claim
39 words
The integrated circuit of claim 7 wherein the interconnecting plug comprises a non-annular solid mass base plug which electrically connects with the active area, the electrically conductive annular ring being integral with and extending outwardly of the base plug.
Claim 11
Dependent Claim
45 words
The integrated circuit of claim 7 further comprising: an inner electrically conductive annular ring positioned radially inward of the electrically insulating annular ring, the inner electrically conductive annular ring being isolated from ohmic electrical connection with the active area by the electrically insulating annular ring.
Claim 12
Dependent Claim
65 words
The integrated circuit of claim 7 further comprising: an inner electrically conductive annular ring positioned radially inward of the electrically insulating annular ring, the inner electrically conductive annular ring being isolated from ohmic electrical connection with the active area by the electrically insulating annular ring; and a non-annular substantially solid mass inner electrically insulating plug provided radially inward of the inner electrically conductive annular ring.
Claim 13
Dependent Claim
77 words
An integrated circuit comprising: an elevationally inner electrically conductive node; an elevationally outer electrically conductive node discrete from the inner electrically conductive node; a dielectric insulating layer positioned intermediate the inner and outer nodes; an interconnecting plug extending through the insulating layer and connecting the inner and outer nodes in ohmic electrical connection, the interconnecting plug comprising an electrically conductive annular ring and an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring.
Claim 14
Dependent Claim
77 words
An integrated circuit comprising: an elevationally inner electrically conductive node; an elevationally outer electrically conductive node discrete from the inner electrically conductive node; a dielectric insulating layer positioned intermediate the inner and outer nodes; an interconnecting plug extending through the insulating layer and connecting the inner and outer nodes in ohmic electrical connection, the interconnecting plug comprising an electrically conductive annular ring and an electrically insulating annular ring positioned radially inward of the electrically conductive annular ring.
Claim 15
Dependent Claim
39 words
The integrated circuit of claim 11 wherein the interconnecting plug comprises a non-annular solid mass base plug which electrically connects with the inner node, the electrically conductive annular ring being integral with and extending outwardly of the base plug.
Claim 16
Dependent Claim
45 words
The integrated circuit of claim 11 further comprising: an inner electrically conductive annular ring positioned radially inward of the electrically insulating annular ring, the inner electrically conductive annular ring being isolated from ohmic electrical connection with the inner node by the electrically insulating annular ring.
Claim 17
Dependent Claim
65 words
The integrated circuit of claim 11 further comprising: an inner electrically conductive annular ring positioned radially inward of the electrically insulating annular ring, the inner electrically conductive annular ring being isolated from ohmic electrical connection with the inner node by the electrically insulating annular ring; and a non-annular substantially solid mass inner electrically insulating plug provided radially inward of the inner electrically conductive annular ring.
Claim 18
Dependent Claim
88 words
An integrated circuit comprising an electrically conductive interconnecting plug electrically connecting between at least two different elevation circuit nodes, the integrated circuit comprising: a first lower elevation node; a second higher elevation node; and an interconnecting plug comprising: an outer electrically conductive ring in electrical contact with the first and second nodes; an electrically insulating ring laterally surrounded by the outer electrically conductive ring; an inner electrically conductive ring laterally surrounded by the electrically insulating ring; and a non-annular substantially solid mass within the inner electrically conductive ring.
Claim 19
Dependent Claim
88 words
An integrated circuit comprising an electrically conductive interconnecting plug electrically connecting between at least two different elevation circuit nodes, the integrated circuit comprising: a first lower elevation node; a second higher elevation node; and an interconnecting plug comprising: an outer electrically conductive ring in electrical contact with the first and second nodes; an electrically insulating ring laterally surrounded by the outer electrically conductive ring; an inner electrically conductive ring laterally surrounded by the electrically insulating ring; and a non-annular substantially solid mass within the inner electrically conductive ring.
Claim 20
Dependent Claim
66 words
An integrated circuit comprising an electrically conductive interconnecting plug electrically connecting between at least two different elevation circuit nodes, the integrated circuit comprising: a first lower elevation node; a second higher elevation node; and an interconnecting plug comprising: an outer electrically conductive ring in electrical contact with the first and second nodes; and an inner electrically conductive ring laterally surrounded by the outer electrically conductive ring.
Claim 21
Dependent Claim
66 words
An integrated circuit comprising an electrically conductive interconnecting plug electrically connecting between at least two different elevation circuit nodes, the integrated circuit comprising: a first lower elevation node; a second higher elevation node; and an interconnecting plug comprising: an outer electrically conductive ring in electrical contact with the first and second nodes; and an inner electrically conductive ring laterally surrounded by the outer electrically conductive ring.
Claim 22
Dependent Claim
40 words
An integrated circuit comprising an interconnecting plug, the interconnecting plug comprising: an outer electrically conductive ring; an electrically insulating ring laterally surrounded by the outer electrically conductive ring;and an inner electrically conductive ring laterally surrounded by the electrically insulating ring.
Claim 23
Dependent Claim
40 words
An integrated circuit comprising an interconnecting plug, the interconnecting plug comprising: an outer electrically conductive ring; an electrically insulating ring laterally surrounded by the outer electrically conductive ring;and an inner electrically conductive ring laterally surrounded by the electrically insulating ring.
Claim 24
Dependent Claim
52 words
An integrated circuit comprising an interconnecting plug, the interconnecting plug comprising: an outer electrically conductive ring; an electrically insulating ring laterally surrounded by the outer electrically conductive ring; an inner electrically conductive ring laterally surrounded by the electrically insulating ring; and a non-annular substantially solid mass within the inner electrically conductive ring.
Claim 25
Dependent Claim
52 words
An integrated circuit comprising an interconnecting plug, the interconnecting plug comprising: an outer electrically conductive ring; an electrically insulating ring laterally surrounded by the outer electrically conductive ring; an inner electrically conductive ring laterally surrounded by the electrically insulating ring; and a non-annular substantially solid mass within the inner electrically conductive ring.
Claim 26
Dependent Claim
56 words
An integrated circuit comprising an interconnecting plug, the interconnecting plug comprising: an outer electrically conductive layer; a first electrically insulating layer laterally surrounded by the outer electrically conductive layer; an inner electrically conductive layer laterally surrounded by the first electrically insulating layer; and a second electrically insulating layer laterally surrounded by the inner electrically conductive layer.
Claim 27
Dependent Claim
56 words
An integrated circuit comprising an interconnecting plug, the interconnecting plug comprising: an outer electrically conductive layer; a first electrically insulating layer laterally surrounded by the outer electrically conductive layer; an inner electrically conductive layer laterally surrounded by the first electrically insulating layer; and a second electrically insulating layer laterally surrounded by the inner electrically conductive layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-10 | 2001-05-12 | 2001-11-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-10 | 2005-05-12 | 2005-11-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-10 | 2009-05-12 | 2009-11-11 | $7700.00 | Window Closed / Lapsed |