US5654376A
Expired / Lapsed
US
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Polymeric dyes for antireflective coatings
Assignee: GlobalFoundries Inc
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Filing: 1995-06-06
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Granted: 1997-08-05
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Expires: 2015-06-06
Abstract
Abstract A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.
Inventors
- 👤 Christopher John Knors
- 👤 Elwood Herbert Macy
- 👤 Wayne Martin Moreau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 19:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; C; C08; C08F; C08F8/00; C08F8/48; C09; C09B; C09B69/00; C09B69/10; Y; Y10; Y10S; Y10S522/00; Y10S522/904
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
58 words
A method for producing an antireflective layer on a lithographic substrate comprising the steps of: dissolving, in an organic solvent, a composition comprising the imide reaction product of at least one aminoaromatic chromophore with a polymer comprising an anhydride unit; and applying the solution to a lithographic substrate and removing at least a portion of said organic solvent.
Claim 2
Independent Claim
58 words
A method for producing an antireflective layer on a lithographic substrate comprising the steps of: dissolving, in an organic solvent, a composition comprising the imide reaction product of at least one aminoaromatic chromophore with a polymer comprising an anhydride unit; and applying the solution to a lithographic substrate and removing at least a portion of said organic solvent.
Claim 3
Dependent Claim
24 words
The method of claim 1 having the additional step of applying a photosensitive film forming material over said antireflective layer on a lithographic substrate.
Claim 4
Dependent Claim
25 words
The method of claim 1 wherein the amount of the chromophore in the composition is greater than the amount of the polymer in the composition.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein the amount of the chromophore in the composition is greater than about 55 weight percent.
Claim 6
Dependent Claim
26 words
The method of claim 1 wherein the amount of the chromophore in the composition is in a range of about 55 to about 75 weight percent.
Claim 7
Dependent Claim
28 words
The method of claim 1 wherein the polymer comprises a repeat unit of the form ##STR4## where R1 and R2 may be independently H, alkyl, phenyl or hydrogen.
Claim 8
Dependent Claim
29 words
The method of claim 1 wherein the polymer comprises repeat unit of the form ##STR5## where R3, R4, R5, and R6 may be independently H, alkyl, phenyl or hydrogen.
Claim 9
Dependent Claim
14 words
The method of claim 1 wherein the aminoaromatic chromophore is a primary aryl amine.
Claim 10
Dependent Claim
29 words
The method of claim 1 wherein the aminoaromatic chromophore is selected from the group consisting of aminoanthracenes, aminonaphthalenes, benzylamines, N-(2,4-dinitrophenyl)-1,4-benzenediamine, p-(2,4-dinitrophenylazo)aniline, p-(4-N,N-dimethylaminophenylazo)aniline, 4-amino-2-(9-(6-hydroxy-3-xanthenonyl))-benzoic acid, 2,4-dintrophenylhydrazine, dinitroaniline, aminobenzothiazoline, and aminofluorenone.
Claim 11
Dependent Claim
38 words
The method of claim 1 wherein said polymer comprising an anhydride unit is a copolymer comprising a first repeat unit having an anhydride group and a second repeat unit having an ethylene group with at least one substituent.
Claim 12
Dependent Claim
27 words
The method of claim 10 wherein said first repeat unit is of the form ##STR6## where R1 and R2 may be independently H, alkyl, phenyl or hydrogen.
Claim 13
Dependent Claim
29 words
The method of claim 10 wherein said first repeat unit is of the form ##STR7## where R3, R4, R5, and R6 may be independently H, alkyl, phenyl or hydrogen.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-04 | 2001-02-03 | 2001-08-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-04 | 2005-02-03 | 2005-08-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-04 | 2009-02-03 | 2009-08-05 | $7700.00 | Window Closed / Lapsed |