US5294680A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polymeric dyes for antireflective coatings
Assignee: International Business Machines Corp
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Filing: 1992-07-24
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Granted: 1994-03-15
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Expires: 2012-07-24
Abstract
Abstract A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.
Inventors
- 👤 Christopher J. Knors
- 👤 Elwood H. Macy
- 👤 Martin Moreau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 17:50
CPC Classifications
C; C09; C09B; C09B69/00; C09B69/10; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
22 words
A film forming composition comprising the N,N-disubstituted amide reaction product of at least one aminoaromatic chromophore with a polymer comprising an anhydride.
Claim 2
Dependent Claim
22 words
A film forming composition comprising the N,N-disubstituted amide reaction product of at least one aminoaromatic chromophore with a polymer comprising an anhydride.
Claim 3
Dependent Claim
15 words
The material of claim 1 wherein the imide reaction product is dissolved in a solvent.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-14 | 1997-09-13 | 1998-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-14 | 2001-09-13 | 2002-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-14 | 2005-09-13 | 2006-03-15 | $7700.00 | Window Closed / Lapsed |