US4828960A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reflection limiting photoresist composition with two azo dyes
Assignee: Samsung Electronics Co Ltd
•
Filing: 1986-11-13
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Granted: 1989-05-09
•
Expires: 2006-11-13
Abstract
Abstract A reflection limiting photoresist is disclosed.
Inventors
- 👤 Craig Hertog
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
84 words
A reflection limiting photoresist consisting of a blend of approximately 1.4 to 1.6 g of Methyl Red dye and approximately 0.5 to 0.7 g of Sudan Orange dye in approximately 250 ml of a photoresist composition comprising a novolak resin and an o-quinone diazide compound such that the mixture enhances absorption of light at a particular wavelength in order to substantially eliminate reflections during photoresist exposure allows sufficient light transmission at the particular wavelength to permit mask alignment using light of the particular wavelength.
Claim 2
Dependent Claim
84 words
A reflection limiting photoresist consisting of a blend of approximately 1.4 to 1.6 g of Methyl Red dye and approximately 0.5 to 0.7 g of Sudan Orange dye in approximately 250 ml of a photoresist composition comprising a novolak resin and an o-quinone diazide compound such that the mixture enhances absorption of light at a particular wavelength in order to substantially eliminate reflections during photoresist exposure allows sufficient light transmission at the particular wavelength to permit mask alignment using light of the particular wavelength.
Claim 3
Dependent Claim
26 words
The reflection limiting photoresist of claim 1 wherein said blend formulation contains 1.6 g of Methyl Red dye and 0.6 g of Sudan Orange G dye.
Claim 4
Dependent Claim
14 words
The reflection limiting photoresist of claim 1 wherein said particular wavelength is 436 nm.
References Cited (Backward Citations)
US2113973A
Cited
GB1041463A
Cited
GB1039475A
Cited
GB1170458A
Cited
US3588215A
Cited
US3517192A
Cited
US3567453A
Cited
US3661582A
Cited
US3969120A
Cited
US4013465A
Cited
GB1586574A
Cited
US4211834A
Cited
US4320940A
Cited
US4287289A
Cited
US4268603A
Cited
US4311773A
Cited
US4229520A
Cited
US4339525A
Cited
US4353978A
Cited
US4349619A
Cited
US4282314A
Cited
US4362809A
Cited
US4370405A
Cited
US4369239A
Cited
US4414314A
Cited
US4403029A
Cited
US4575480A
Cited
US4618565A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-08 | 1992-11-07 | 1993-05-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-08 | 1996-11-07 | 1997-05-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-08 | 2000-11-07 | 2001-05-09 | $7700.00 | Window Closed / Lapsed |