Mask for selectively transmitting therethrough a desired light radiant energy

Claim 1

A method of fabricating a mask for selectively transmitting therethrough a desired light radiant energy, which comprises: (a) heat treating a base comprising a copolymer of tetrafluoroethylene and hexafluoropropylene for a period of time sufficient to render it stress-relieved, essentially dimensionally stable, said base being capable of transmitting therethrough the desired light radiant energy and having a thickness of 5 to 10 mils; and (b) selectively forming a blocking film pattern, incapable of transmitting therethrough the desired light radiant energy, on a surface of said heat treated base.

Claim 2

A method of fabricating a mask for selectively transmitting therethrough a desired light radiant energy, which comprises: (a) heat treating a base comprising a copolymer of tetrafluoroethylene and hexafluoropropylene for a period of time sufficient to render it stress-relieved, essentially dimensionally stable, said base being capable of transmitting therethrough the desired light radiant energy and having a thickness of 5 to 10 mils; and (b) selectively forming a blocking film pattern, incapable of transmitting therethrough the desired light radiant energy, on a surface of said heat treated base.

Claim 5

A method for selectively depositing a metal on a surface of a substrate, which comprises: (a) coating the surface of the substrate with a sensitizing solution comprising at least a reducible salt of a non-noble metal and a radiation sensitive reducing agent for said reducible salt to form a sensitized surface; and (b) selectively exposing said sensitized surface through a mask, comprising a base comprising a copolymer of tetrafluoroethylene and hexafluoropropylene, which has been heat treated for a period of time sufficient to render it stress-relieved, essentially dimensionally stable, said base being capable of transmitting therethrough the desired light radiant energy and having a thickness of 5 to 10 mils, and a blocking film formed on at least a portion of said base for blocking the transmission of the light radiant energy through said portion of said base, to a source of light radiant energy to reduce said metal salt to a reduced metal salt species to form a catalytic real image capable of catalyzing the deposition of a metal thereon from an electroless metal deposition solution.

Claim 6

A method for selectively depositing a metal on a surface of a substrate, which comprises: (a) coating the surface of the substrate with a sensitizing solution comprising at least a reducible salt of a non-noble metal and a radiation sensitive reducing agent for said reducible salt to form a sensitized surface; and (b) selectively exposing said sensitized surface through a mask, comprising a base comprising a copolymer of tetrafluoroethylene and hexafluoropropylene, which has been heat treated for a period of time sufficient to render it stress-relieved, essentially dimensionally stable, said base being capable of transmitting therethrough the desired light radiant energy and having a thickness of 5 to 10 mils, and a blocking film formed on at least a portion of said base for blocking the transmission of the light radiant energy through said portion of said base, to a source of light radiant energy to reduce said metal salt to a reduced metal salt species to form a catalytic real image capable of catalyzing the deposition of a metal thereon from an electroless metal deposition solution.