US4618565A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Absorptive layer for optical lithography
Assignee: Intersil Corp
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Filing: 1985-06-05
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Granted: 1986-10-21
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Expires: 2005-06-05
Abstract
Abstract Multilayer photoresist recording media containing an absorptive layer are improved by forming the absorptive layer from a composition comprising PMMA or a copolymer of methylmethacrylate and methacrylic acid, certain dyes such as hydroxyazobenzoic acid or Sudan Orange G and a suitable solvent. The dyes are insoluble in the solvent of an overlying photoresist layer. The media are substantially free of loss of resolution due to dissolution of the dye into the photoresist layer.
Inventors
- 👤 Lawrence K. White
- 👤 Nancy A. Miszkowski
- 👤 Aaron W. Levine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; G03F7/094
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
72 words
A multilayer resist recording medium disposed on a substrate comprising a planarizing layer overlying the substrate, an absorptive layer overlying the planarizing layer and a photoresist layer overlying the absorptive layer, wherein the absorptive layer comprises poly(methylmethacrylate) or a copolymer of methylmethacrylate and methacrylic acid, and a dye that is absorptive at the light frequency used to irradiate the photoresist layer and that is insoluble in the solvent for the photoresist layer.
Claim 2
Dependent Claim
72 words
A multilayer resist recording medium disposed on a substrate comprising a planarizing layer overlying the substrate, an absorptive layer overlying the planarizing layer and a photoresist layer overlying the absorptive layer, wherein the absorptive layer comprises poly(methylmethacrylate) or a copolymer of methylmethacrylate and methacrylic acid, and a dye that is absorptive at the light frequency used to irradiate the photoresist layer and that is insoluble in the solvent for the photoresist layer.
Claim 3
Dependent Claim
20 words
A recording medium in accordance with claim 1, wherein the molecular weight of poly(methylmethacrylate) is from about 100,000 to 1,000,000.
Claim 4
Dependent Claim
25 words
A recording medium in accordance with claim 1, wherein said copolymer has a weight ratio of from about 85/15 to 99/1 methylmethacrylate to methacrylic acid.
Claim 5
Dependent Claim
38 words
A recording medium in accordance with claim 1, wherein the dye is selected from the group consisting of 1-phenylazo-2,4-dihydroxybenzene, hydroxyazobenzoic acid, Methyl Red, Stilbene yellow, a carboxy-substituted diazo dye, a hydroxy-substituted diazo dye and a hydroxy-substituted naphthoquinone dye.
Claim 6
Dependent Claim
13 words
A recording medium in accordance with claim 4, wherein the dye is 1-phenylazo-2,4-dihydroxybenzene.
Claim 7
Dependent Claim
14 words
A recording medium in accordance with claim 4, wherein the dye is hydroxyazobenzoic acid.
Claim 8
Dependent Claim
128 words
A process for forming a relief pattern on a substrate comprising: (a) coating the substrate with a composition comprising poly(methylmethacrylate) or a copolymer of methylmethacrylate and methacrylic acid, a suitable dye and a solvent therefor; (b) drying the coating to form an absorptive layer; (c) applying thereover a coating of a photoresist composition comprising a light-sensitive resist material and a solvent therefor, the solvent being a nonsolvent for the dye so that substantially no dye is dissolved into the photoresist layer; (d) drying said coating to form a photoresist layer; (e) irradiating and developing the photoresist layer, thus exposing a portion of the absorptive layer; and (f) plasma etching the exposed portion of the absorptive layer in an oxygen plasma, thus exposing a corresponding portion of the substrate.
Claim 9
Dependent Claim
128 words
A process for forming a relief pattern on a substrate comprising: (a) coating the substrate with a composition comprising poly(methylmethacrylate) or a copolymer of methylmethacrylate and methacrylic acid, a suitable dye and a solvent therefor; (b) drying the coating to form an absorptive layer; (c) applying thereover a coating of a photoresist composition comprising a light-sensitive resist material and a solvent therefor, the solvent being a nonsolvent for the dye so that substantially no dye is dissolved into the photoresist layer; (d) drying said coating to form a photoresist layer; (e) irradiating and developing the photoresist layer, thus exposing a portion of the absorptive layer; and (f) plasma etching the exposed portion of the absorptive layer in an oxygen plasma, thus exposing a corresponding portion of the substrate.
Claim 10
Dependent Claim
49 words
A process in accordance with claim 7 wherein the solvent for the dye-containing composition is glacial acetic acid and the composition contains from about 2 to about 6 percent by weight of the polymer or copolymer and from about 1 to about 4 percent by weight of the dye.
Claim 11
Dependent Claim
47 words
A process in accordance with claim 7, wherein the solvent for the dye-containing composition is N-methyl-2-pyrrolidinone and the composition contains from about 8 to about 13 percent by weight of the polymer or copolymer and from about 2 to about 7 percent by weight of the dye.
Claim 12
Dependent Claim
20 words
A process in accordance with claim 7, wherein the light-sensitive material comprises a novolak resin and a diazoquinone sensitizer therefor.
Claim 13
Dependent Claim
27 words
A process in accordance with claim 9, wherein the dye-containing composition comprises a solution of hydroxyazobenzoic acid and a copolymer of methylmethacrylate and methacrylic acid in N-methyl-2-pyrrolidinone.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-20 | 1990-04-21 | 1990-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-20 | 1994-04-21 | 1994-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-20 | 1998-04-21 | 1998-10-21 | $7700.00 | Window Closed / Lapsed |