US5418095A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating phase shifters with absorbing/attenuating sidewalls using an additive process
Assignee: Motorola Solutions Inc
•
Filing: 1994-09-16
•
Granted: 1995-05-23
•
Expires: 2014-09-16
Abstract
Abstract A method of fabricating phase shifters with absorbing or attenuating sidewalls in order to inhibit or prevent light scattering at quartz-air interfaces. A quartz substrate is patterned and trenches are formed to provide "shifters". A metal film layer is formed along sidewalls of the trenches to provide the light absorbing characteristics. In one technique, the conformal metal layer is anisotropically etched while in another the metal layer is removed along with the photoresist by a lift-off technique.
Inventors
- 👤 Prahalad K. Vasudev
- 👤 Kah K. Low
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:43
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/32; G03F1/38
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
227 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from nonshifting regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and nontrenched, nonshifting regions; removing said photosensitive layer; depositing a thin film layer of a light absorbing or attenuating material over said substrate and covering sidewall surfaces of said vertical trenches; etching said thin film layer such that said thin film layer substantially remains only on said sidewall surfaces of said trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 2
Independent Claim
227 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from nonshifting regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and nontrenched, nonshifting regions; removing said photosensitive layer; depositing a thin film layer of a light absorbing or attenuating material over said substrate and covering sidewall surfaces of said vertical trenches; etching said thin film layer such that said thin film layer substantially remains only on said sidewall surfaces of said trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein said thin film layer is deposited to a thickness of 100-500 angstroms.
Claim 4
Dependent Claim
16 words
The method of claim 2 wherein said thin film layer is formed from a metallic material.
Claim 5
Dependent Claim
16 words
The method of claim 2 wherein said thin film layer is formed from a silicon material.
Claim 6
Independent Claim
238 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from other regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate having opaque regions disposed thereon and in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate adjacent to said opaque regions, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and said opaque regions; removing said photosensitive layer; depositing a thin film layer of a light absorbing or attenuating material over said substrate and covering sidewall surfaces of said vertical trenches; etching said thin film layer such that said thin film layer substantially remains only on said sidewall surfaces of said trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 7
Independent Claim
238 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from other regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate having opaque regions disposed thereon and in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate adjacent to said opaque regions, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and said opaque regions; removing said photosensitive layer; depositing a thin film layer of a light absorbing or attenuating material over said substrate and covering sidewall surfaces of said vertical trenches; etching said thin film layer such that said thin film layer substantially remains only on said sidewall surfaces of said trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 8
Dependent Claim
18 words
The method of claim 5 wherein said thin film layer is deposited to a thickness of 100-500 angstroms.
Claim 9
Dependent Claim
16 words
The method of claim 6 wherein said thin film layer is formed from a metallic material.
Claim 10
Dependent Claim
16 words
The method of claim 6 wherein said thin film layer is formed from a silicon material.
Claim 11
Independent Claim
243 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from nonshifting regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and nontrenched, nonshifting regions; depositing a thin film layer of a light absorbing or attenuating material over said photosensitive layer and said substrate and covering sidewall surfaces of said vertical trenches; applying a physical force to dislodge said patterned photosensitive layer which removal also dislodges portions of said thin film layer overlying said photosensitive layer such that said thin film layer substantially remains only in said vertical trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 12
Independent Claim
243 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from nonshifting regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and nontrenched, nonshifting regions; depositing a thin film layer of a light absorbing or attenuating material over said photosensitive layer and said substrate and covering sidewall surfaces of said vertical trenches; applying a physical force to dislodge said patterned photosensitive layer which removal also dislodges portions of said thin film layer overlying said photosensitive layer such that said thin film layer substantially remains only in said vertical trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 13
Dependent Claim
18 words
The method of claim 9 wherein said thin film layer is deposited to a thickness of 100-500 angstroms.
Claim 14
Dependent Claim
16 words
The method of claim 10 wherein said thin film layer is formed from a metallic material.
Claim 15
Dependent Claim
16 words
The method of claim 10 wherein said thin film layer is formed from a silicon material.
Claim 16
Independent Claim
254 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from other regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate having opaque regions disposed thereon and in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate adjacent to said opaque regions, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and said opaque regions; depositing a thin film layer of a light absorbing or attenuating material over said photosensitive layer and said substrate and covering sidewall surfaces of said vertical trenches; applying a physical force to dislodge said patterned photosensitive layer which removal also dislodges portions of said thin film layer overlying said photosensitive layer such that said thin film layer substantially remains only in said vertical trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 17
Independent Claim
254 words
A method of fabricating a phase shifting photomask having light absorbing sidewalls along boundaries separating phase shifting regions from other regions in order to improve resolution and contrast of a projected image field, comprising the steps of: forming a patterned photosensitive layer over a mask substrate having opaque regions disposed thereon and in which patterned openings expose portions of said underlying substrate; etching said exposed portions of said substrate to form vertical trenches in said substrate adjacent to said opaque regions, said trenches functioning as said phase shifting regions for providing a phase difference in a transmission of incident light through said substrate at trenched versus nontrenched regions, said trenches having vertical sidewalls which delineate a separation between said phase shifting regions and said opaque regions; depositing a thin film layer of a light absorbing or attenuating material over said photosensitive layer and said substrate and covering sidewall surfaces of said vertical trenches; applying a physical force to dislodge said patterned photosensitive layer which removal also dislodges portions of said thin film layer overlying said photosensitive layer such that said thin film layer substantially remains only in said vertical trenches to form said light absorbing sidewalls; wherein said light absorbing sidewalls absorb at least a portion of light energy impinging on said sidewalls in order to inhibit scattering of light along said boundaries and to reduce waveguiding effects within said phase shifting regions, such that distortion and non-uniform light intensity projection are reduced to provide improved resolution and contrast of said projected image field.
Claim 18
Dependent Claim
18 words
The method of claim 13 wherein said thin film layer is deposited to a thickness of 100-500 angstroms.
Claim 19
Dependent Claim
16 words
The method of claim 14 wherein said thin film layer is formed from a metallic material.
Claim 20
Dependent Claim
16 words
The method of claim 14 wherein said thin film layer is formed from a silicon material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-05-22 | 1998-11-21 | 1999-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-22 | 2002-11-21 | 2003-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-22 | 2006-11-21 | 2007-05-23 | $7700.00 | Window Closed / Lapsed |