US4174219A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making a negative exposure mask
Assignee: International Business Machines Corp
•
Filing: 1977-10-31
•
Granted: 1979-11-13
•
Expires: 1997-10-31
Abstract
Abstract A negative exposure mask is prepared by forming a positive mask image of a first metal layer on a transparent substrate and applying a layer of resist which is exposed through the back of the substrate and developed to form a lift-off mask. The lift-off mask is used to form a negative mask image of a second layer of metal on the substrate in the areas not covered by the first metal layer. The first metal layer is then etched away to leave the negative mask image on the substrate.
Inventors
- 👤 Heinrich A. Andres
- 👤 Hartmut F. Kolbe
- 👤 Horst Schlagdenhaufen
- 👤 Frank A. Schwarzbach
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2002; G03F7/0035
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
155 words
A method of making an exposure mask comprising: forming on a transparent substrate a positive pattern of masking material which is opaque to UV light, said material being selected from the group consisting of metals and inorganic metallic compounds, forming on said substrate and pattern a resist layer of positive photoresist, exposing said resist layer to UV light through the back of said substrate such that the portions of said resist layer in contact with the substrate are exposed, developing said resist layer so as to remove the exposed portions of said resist layer, depositing a second layer of masking material, which is opaque to UV light, on the substrate and on the remaining portions of the resist layer, removing the remaining portions of the resist layer and the overlying masking material, and removing the positive pattern of masking material to leave a negative pattern of said second layer of masking material on said substrate.
Claim 2
Independent Claim
155 words
A method of making an exposure mask comprising: forming on a transparent substrate a positive pattern of masking material which is opaque to UV light, said material being selected from the group consisting of metals and inorganic metallic compounds, forming on said substrate and pattern a resist layer of positive photoresist, exposing said resist layer to UV light through the back of said substrate such that the portions of said resist layer in contact with the substrate are exposed, developing said resist layer so as to remove the exposed portions of said resist layer, depositing a second layer of masking material, which is opaque to UV light, on the substrate and on the remaining portions of the resist layer, removing the remaining portions of the resist layer and the overlying masking material, and removing the positive pattern of masking material to leave a negative pattern of said second layer of masking material on said substrate.
Claim 3
Independent Claim
111 words
A method of making a negative exposure mask comprising: forming a positive mask of the required geometry of a first metal on a transparent substrate; applying a positive-working photoresist layer to the substrate on the mask side; exposing the layer through the substrate; dissolving the exposed areas of the resist with an aqueous alkaline developer; vapor depositing a second metal on the surface of substrate and the remaining photoresist; removing the remaining photoresist with its covering layer of the second metal in a lift-off process; and etching the positive mask of the first metal until there remains on the substrate a negative mask of said second metal of the required geometry.
Claim 4
Independent Claim
111 words
A method of making a negative exposure mask comprising: forming a positive mask of the required geometry of a first metal on a transparent substrate; applying a positive-working photoresist layer to the substrate on the mask side; exposing the layer through the substrate; dissolving the exposed areas of the resist with an aqueous alkaline developer; vapor depositing a second metal on the surface of substrate and the remaining photoresist; removing the remaining photoresist with its covering layer of the second metal in a lift-off process; and etching the positive mask of the first metal until there remains on the substrate a negative mask of said second metal of the required geometry.
Claim 5
Dependent Claim
17 words
The method of claim 2 wherein the first metal is chromium and the second metal is titanium.
Claim 6
Dependent Claim
17 words
The method of claim 2 wherein the masks are produced in a thickness of approx. 1000 A.
Claim 7
Dependent Claim
17 words
The method of claim 3 wherein the etchant for the chromium is an alkaline potassium permanganate solution.
Claim 8
Dependent Claim
10 words
The method of claim 2 wherein the substrate is glass.
Claim 9
Dependent Claim
16 words
The method of claim 2 wherein the exposure of the photoresist is performed with UV light.
Claim 10
Dependent Claim
41 words
The method of claim 2 wherein prior to the steps of etching the positive mask, the process steps of resist coating, exposure, developing and vapor-deposition of the second metal and lift-off of the photoresist with its covering metal layer are repeated.
References Cited (Backward Citations)
US3712816A
Cited
US3615462A
Cited
US3661580A
Cited
US3669665A
Cited
US3745094A
Cited
US3878007A
Cited
US4018938A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-11-12 | 1983-05-14 | 1983-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-11-12 | 1987-05-14 | 1987-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-11-12 | 1991-05-14 | 1991-11-13 | $7700.00 | Window Closed / Lapsed |