US5079113A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photo-mask
Assignee: Sharp Corp
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Filing: 1989-12-14
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Granted: 1992-01-07
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Expires: 2009-12-14
Abstract
Abstract A photo-mask comprises a light-permeable substrate, a plurality of light-shielding films that are disposed on the substrate, the light-shielding films forming a mask pattern, and a light-permeable protective film that is disposed over the surface of the substrate including the light-shielding films so as to protect the light-shielding films.
Inventors
- 👤 Kenji Ohta
- 👤 Junji Hirokane
- 👤 Akira Shibata
- 👤 Yoshiyuki Nagahara
- 👤 Kazuo Van
- 👤 Michinobu Mieda
- 👤 Tetsuya Inui
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:07
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/38; G03F1/48
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
43 words
A photo-mask comprising a light-permeable substrate, a light-shielding film buried in the light-permeable substrate, and a protective film overlaying the light-shielding film and the substrate, the protective film being made of the same material as that of the light-shielding film to light-permeable thickness.
Claim 2
Dependent Claim
43 words
A photo-mask comprising a light-permeable substrate, a light-shielding film buried in the light-permeable substrate, and a protective film overlaying the light-shielding film and the substrate, the protective film being made of the same material as that of the light-shielding film to light-permeable thickness.
Claim 3
Dependent Claim
18 words
A photo-mask according to claim 1, wherein the light-shielding film and the protective film are made of metal.
Claim 4
Dependent Claim
19 words
A photo-mask according to claim 2, wherein the light-shielding film and the protective film made of Ta or Ti.
Claim 5
Dependent Claim
70 words
A photo-mask comprising: a light-permeable substrate, a light shielding film buried in said substrate so that the top surface of said light-shielding film projects from the top surface of said substrate, said light-shielding film forming a mask pattern, and a light-permeable protective, conductive film overlying the surface of said substrate and said light-shielding film, wherein the conductive light-shielding film and the conductive light-permeable film are made of the same material.
Claim 6
Dependent Claim
70 words
A photo-mask comprising: a light-permeable substrate, a light shielding film buried in said substrate so that the top surface of said light-shielding film projects from the top surface of said substrate, said light-shielding film forming a mask pattern, and a light-permeable protective, conductive film overlying the surface of said substrate and said light-shielding film, wherein the conductive light-shielding film and the conductive light-permeable film are made of the same material.
Claim 7
Dependent Claim
79 words
A photo-mask comprising: a light-permeable substrate, a conductive light-shielding film forming a mask pattern, the top surface of the light-shielding film being lower than the top surface of the substrate, and a conductive light-permeable film overlying the substrate and the conductive light shielding film, wherein the conductive light-shielding film and the conductive light-permeable film are made of the same material, and wherein the light-shielding film is made to light-shielding thickness, and the light-permeable film is made to light-permeable thickness.
Claim 8
Dependent Claim
79 words
A photo-mask comprising: a light-permeable substrate, a conductive light-shielding film forming a mask pattern, the top surface of the light-shielding film being lower than the top surface of the substrate, and a conductive light-permeable film overlying the substrate and the conductive light shielding film, wherein the conductive light-shielding film and the conductive light-permeable film are made of the same material, and wherein the light-shielding film is made to light-shielding thickness, and the light-permeable film is made to light-permeable thickness.
References Cited (Backward Citations)
CA896191A
Cited
JPS5394770A
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JPS5545019A
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JPS57207256A
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JPS5984244A
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US4544443A
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JPS6041228A
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JPS6063537A
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JPS6086545A
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JPS6087327A
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JPS60166949A
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JPS6381352A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-06 | 1995-07-08 | 1996-01-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-06 | 1999-07-08 | 2000-01-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-06 | 2003-07-08 | 2004-01-07 | $7700.00 | Window Closed / Lapsed |