US4575399A
Expired / Lapsed
US
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Method of pattern detection
Assignee: Hitachi Ltd
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Filing: 1985-01-08
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Granted: 1986-03-11
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Expires: 2005-01-08
Abstract
Abstract An anti-reflective coating film is formed on a resist film formed on a substrate having a target pattern formed on its surface, thereby to reduce multiple reflection of light in said resist film. The distortion of the pattern detection signal due to multiple reflection in said resist film is thereby prevented to improve the mask positioning accuracy.
Inventors
- 👤 Toshihiko Tanaka
- 👤 Norio Hasegawa
- 👤 Tetsuya Hayashida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 00:55
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/20; H10P74/203; G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076; G01; G01N; G01N21/00; G01N21/75; G03F7/00; G03F7/004; G03F7/09; G03F7/091; G03F9/7084; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
59 words
A method of pattern detection comprising the steps of forming a resist film on a substrate having a target pattern formed on its surface; forming on said resist film an anti-reflective coating film for reducing multiple reflection in said resist film; and applying light for detecting said pattern to the surface of said substrate and detecting the reflected light.
Claim 2
Independent Claim
59 words
A method of pattern detection comprising the steps of forming a resist film on a substrate having a target pattern formed on its surface; forming on said resist film an anti-reflective coating film for reducing multiple reflection in said resist film; and applying light for detecting said pattern to the surface of said substrate and detecting the reflected light.
Claim 3
Dependent Claim
65 words
The method according to claim 1, wherein when the wavelength of said light is given as λ and the refractive index of said resist film to said light is given as n, then the refractive index n' of said anti-reflective coating film to said light is substantially equal to √n and the thickness of said anti-reflective coating film is approximately an odd multiple of λ/4n'.
Claim 4
Dependent Claim
59 words
The method according to claim 1, wherein said anti-reflective coating film is selected from polysiloxane film, polymethylvinylether film, polyethylvinylether film, polyvinyl alcohol film, polyethylene glycol film, SiO 2 film, hexamethyldisilazane film, silicon oil film, and alginic acid salt film such as alginic acid sodium salt film, alginic acid tetramethylammonium hydroxide salt film and alginic acid tetraethylammonium hydroxide salt film.
Claim 5
Dependent Claim
25 words
The method according to claim 1, wherein said resist film is selected from photoresist film, electron-ray resist film, X-ray resist film and ion-beam resist film.
Claim 6
Dependent Claim
18 words
The method according to claim 1, wherein said light is laser light or bright line spectrum of mercury.
Claim 7
Independent Claim
64 words
A method of pattern detection comprising the steps of laminating an organic film, an inorganic film, a resist film and an anti-reflective coating film for reducing multiple reflection in said resist film on the surface of a substrate having a target pattern formed on its surface; and applying light for detecting said pattern to the surface of said substrate and detecting the reflected light.
Claim 8
Independent Claim
64 words
A method of pattern detection comprising the steps of laminating an organic film, an inorganic film, a resist film and an anti-reflective coating film for reducing multiple reflection in said resist film on the surface of a substrate having a target pattern formed on its surface; and applying light for detecting said pattern to the surface of said substrate and detecting the reflected light.
Claim 9
Dependent Claim
63 words
The method according to claim 6, wherein when the wavelength of said light is given as λ and the refractive index of said resist film is given as n, then the refractive index n' of said anti-reflective coating film to said light is substantially equal to ·n and the depth of said anti-reflective coating film is approximately an odd integer multiple of λ/4n'.
Claim 10
Dependent Claim
59 words
The method according to claim 6, wherein said anti-reflective coating film is selected from polysiloxane film, polymethylvinylether film, polyethylvinylether film, polyvinyl alcohol film, polyethylene glycol film, SO 2 film, hexamethyldisilazane film, silicon oil film, and alginic acid salt film such as alginic acid sodium salt film, alginic acid tetramethylammonium hydroxide salt film and alginic acid tetraethylammonium hydroxide salt film.
Claim 11
Dependent Claim
25 words
The method according to claim 6, wherein said resist film is selected from photoresist film, electron-ray resist film, X-ray resist film and ion-beam resist film.
Claim 12
Dependent Claim
18 words
The method according to claim 6, wherein said light is laser light or bright line spectrum of mercury.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-03-10 | 1989-09-09 | 1990-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-03-10 | 1993-09-09 | 1994-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-03-10 | 1997-09-09 | 1998-03-11 | $7700.00 | Window Closed / Lapsed |