Patent US5294286A successfully refreshed from Google Patents.
US5294286A
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US
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Process for forming a thin film of silicon
Assignee: Japan Science and Technology Agency
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Filing: 1993-01-12
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Granted: 1994-03-15
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Expires: 2013-01-12
Abstract
Abstract The thickness of a thin film of an element semiconductor may be determined by counting the number of cycles of gaseous component introductions within a crystal growth vessel. Each cycle permits at most one monolayer of growth since the pressure in the vessel during gaseous component introduction is maintained under a saturation condition. The temperature to which a substrate in the vessel is heated is that for which epitaxial growth results.
Inventors
- 👤 Junichi Nishizawa
- 👤 Hitoshi Abe
- 👤 Soubei Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:50
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45523; C23C16/45525; C23C16/22; C23C16/24; C23C16/45527; C23C16/45531; C23C16/45536; C23C26/00; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/60; C30B29/68; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/925
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
440 words
A process for forming a monocrystalline thin film of silicon on a silicon substrate located in a crystal growth vessel, comprising the steps of: (a) evacuating the interior of the crystal growth vessel to an evacuation pressure; (b) heating the substrate to, and maintaining the substrate at, a temperature within a range of from about 700 to 900 degrees C; (c) introducing a first supply of gaseous molecules of SiH 2 Cl 2 onto the substrate disposed in the growth vessel for a first period of time of from about 0.5 to 200 seconds while maintaining the internal pressure of the growth vessel under a saturation condition within the range of from about 3×10 -3 to 10 -1 Pascal to form a single molecular ad-layer of a second compound dissociated from the gaseous molecules of SiH 2 Cl 2 on the substrate, said second compound containing silicon; (d) evacuating the interior of said crystal growth vessel to remove molecules other than those which form said single molecular ad-layer; (e) introducing a second supply of gaseous molecules reactable with said single molecular ad-layer for a second time period of from about 0.5 to 200 seconds, while maintaining the internal pressure of the growth vessel under the saturation condition within the range of from about 3×10 -3 to 10 -1 Pascal so as to chemically react with said single molecular ad-layer to form gaseous molecules of a reactant compound; (f) evacuating said growth vessel to remove the gaseous molecules of said second supply and said reactant compound so as to leave a monocrystalline thin film with the thickness of a single molecular layer of silicon; (g) cyclically repeating the sequence of steps (c) to (f) and maintaining the substrate at said temperature to grow the monocrystalline thin film of silicon on the substrate to a desired thickness which is dimensionally as precise as that for a single molecular layer, the desired thickness being attained by cycling the sequence of steps (c) to (f) by a plurality of times equivalent to an integral result of a division of the desired thickness of the monocrystalline thin film of silicon by a thickness of the single molecular monolayer of silicon; and (h) continuously evacuating the crystal growth chamber during steps (c) to (g) at a substantially constant rate of evacuation, the gaseous molecules being introduced during steps (c) and (e) including a respective amount which is in excess of that necessary for forming just the single molecular layer of silicon during each cycle even taking into account a removal rate of the gaseous molecules caused by the evacuation taking place during steps (c) and (e).
Claim 2
Dependent Claim
440 words
A process for forming a monocrystalline thin film of silicon on a silicon substrate located in a crystal growth vessel, comprising the steps of: (a) evacuating the interior of the crystal growth vessel to an evacuation pressure; (b) heating the substrate to, and maintaining the substrate at, a temperature within a range of from about 700 to 900 degrees C; (c) introducing a first supply of gaseous molecules of SiH 2 Cl 2 onto the substrate disposed in the growth vessel for a first period of time of from about 0.5 to 200 seconds while maintaining the internal pressure of the growth vessel under a saturation condition within the range of from about 3×10 -3 to 10 -1 Pascal to form a single molecular ad-layer of a second compound dissociated from the gaseous molecules of SiH 2 Cl 2 on the substrate, said second compound containing silicon; (d) evacuating the interior of said crystal growth vessel to remove molecules other than those which form said single molecular ad-layer; (e) introducing a second supply of gaseous molecules reactable with said single molecular ad-layer for a second time period of from about 0.5 to 200 seconds, while maintaining the internal pressure of the growth vessel under the saturation condition within the range of from about 3×10 -3 to 10 -1 Pascal so as to chemically react with said single molecular ad-layer to form gaseous molecules of a reactant compound; (f) evacuating said growth vessel to remove the gaseous molecules of said second supply and said reactant compound so as to leave a monocrystalline thin film with the thickness of a single molecular layer of silicon; (g) cyclically repeating the sequence of steps (c) to (f) and maintaining the substrate at said temperature to grow the monocrystalline thin film of silicon on the substrate to a desired thickness which is dimensionally as precise as that for a single molecular layer, the desired thickness being attained by cycling the sequence of steps (c) to (f) by a plurality of times equivalent to an integral result of a division of the desired thickness of the monocrystalline thin film of silicon by a thickness of the single molecular monolayer of silicon; and (h) continuously evacuating the crystal growth chamber during steps (c) to (g) at a substantially constant rate of evacuation, the gaseous molecules being introduced during steps (c) and (e) including a respective amount which is in excess of that necessary for forming just the single molecular layer of silicon during each cycle even taking into account a removal rate of the gaseous molecules caused by the evacuation taking place during steps (c) and (e).
Claim 3
Dependent Claim
19 words
A process as claimed in claim 1 wherein the second supply of gaseous molecules is a supply of hydrogen.
Claim 4
Dependent Claim
35 words
A process as claimed in claim 1, wherein the step of heating is accomplished by an infrared radiation source provided to direct radiation toward and onto said substrate, thereby heating said substrate to said temperature.
Claim 5
Dependent Claim
52 words
A process as claimed in claim 1, wherein the surface reaction during the crystal growth is promoted by a radiation source provided to direct radiation having a wavelength between 180 and 600 nm toward and onto said substrate so as to obtain the crystal of higher quality grown at a lower temperature.
Claim 6
Dependent Claim
61 words
A process as claimed in claim 3 further including the step of introducing gaseous molecules containing a dopant of the element semiconductor alternately with said first supply of gaseous molecules so that growth of a monocrystalline thin film of silicon having a desired dopant concentration distribution in the thicknesswise direction is attained with precision as precise as a single molecular layer.
Claim 7
Dependent Claim
32 words
A process as claimed in claim 5, wherein the gaseous molecules containing those of a dopant element contain at least two dopant elements, said at least two dopant elements being cyclically introduced.
Claim 8
Dependent Claim
35 words
A process as claimed in claim 6, wherein said at least two dopant elements are introduced in respectively different cycles, whereby the at least two dopant elements are cyclically doped in respectively different molecular layers.
Claim 9
Dependent Claim
49 words
A process as claimed in claim 7, wherein the atomic radius of one of the at least two dopant elements is larger than that of said element semiconductor, and the atomic radius of another of the at least two dopant elements is smaller than that of said element semiconductor.
Claim 10
Dependent Claim
23 words
A process as claimed in claim 7, wherein one of the at least two impurity elements is an element of the IV group.
Claim 11
Dependent Claim
20 words
A process as claimed in claim 7, wherein the at least two dopant elements are of the same conductivity type.
Claim 12
Dependent Claim
36 words
A process as claimed in claim 7, wherein said at least two dopant elements are introduced at respectively different times so that the at least two dopant elements are cyclically doped in respectively different molecular layers.
Claim 13
Dependent Claim
65 words
A process as claimed in claim 1 wherein, during the step of cyclically repeating the sequence of steps (c) to (f), gaseous molecules containing those of a dopant element of silicon are cyclically introduced simultaneously with said second supply of gaseous molecules so that a molecular layer doped with the dopant element and a molecular layer not doped with the dopant element are cyclically formed.
Claim 14
Dependent Claim
32 words
A process as claimed in claim 12, wherein the gaseous molecules containing those of a dopant element contain at least two dopant elements, said at least two dopant elements being cyclically introduced.
Claim 15
Dependent Claim
34 words
A process as claimed in claim 13, wherein said at least two dopant elements are introduced in respectively different cycles whereby the at least two dopant elements are doped in respectively different molecular layers.
Claim 16
Dependent Claim
49 words
A process as claimed in claim 14, wherein the atomic radius of one of the at least two dopant elements is larger than that of said element semiconductor, and the atomic radius of another of the at least two dopant elements is smaller than that of said element semiconductor.
Claim 17
Dependent Claim
23 words
A process as claimed in claim 14, wherein one of the at least two dopant elements is an element of the IV group.
Claim 18
Dependent Claim
20 words
A process as claimed in claim 14, wherein the at least two dopant elements are of the same conductivity type.
Claim 19
Dependent Claim
35 words
A process as claimed in claim 14, wherein said at least two dopant elements are introduced at respectively different times so that the at least two dopant elements are doped in respectively different molecular layers.
Claim 20
Dependent Claim
59 words
A process as claimed in claim 1 further including the step of introducing gaseous molecules containing a dopant element of silicon alternately with said second supply of gaseous molecules so that growth of monocrystalline thin film of silicon having a desired dopant concentration distribution in the thicknesswise direction is attained with precision as precise as a single molecular layer.
Claim 21
Dependent Claim
60 words
A process as claimed in claim 1 further including the step of introducing gaseous molecules containing a dopant element of silicon simultaneously with said second supply of gaseous molecules so that growth of a monocrystalline thin film of silicon having a desired dopant concentration distribution in the thicknesswise direction is attained with precision as precise as a single molecular layer.
Claim 22
Dependent Claim
67 words
A process as claimed in claim 1 wherein, during the step of cyclically repeating the sequence of steps (c) to (f), gaseous molecules containing those of a dopant element of said element semiconductor are cyclically introduced simultaneously with said first supply of gaseous molecules so that a molecular layer doped with the dopant element and a molecular layer not doped with the dopant element are cyclically formed.
Claim 23
Dependent Claim
30 words
A process as claimed in claim 20 wherein the gaseous molecules containing a dopant element contain at least two dopant elements, said at least two dopant elements being cyclically introduced.
Claim 24
Dependent Claim
33 words
A process as claimed in claim 22, wherein the gaseous molecules containing those of a dopant element contain at least two a dopant elements, said at least two dopant elements being cyclically introduced.
Claim 25
Dependent Claim
34 words
A process as claimed in claim 23, wherein said at least two dopant elements are introduced in respectively different cycles whereby the at least two dopant elements are doped in respectively different molecular layers.
Claim 26
Dependent Claim
49 words
A process as claimed in claim 23, wherein the atomic radius of one of the at least two dopant elements is larger than that of said element semiconductor, and the atomic radius of another of the at least two dopant elements is smaller than that of said element semiconductor.
Claim 27
Dependent Claim
20 words
A process as claimed in claim 23, wherein the at least two dopant elements are of the same conductivity type.
Claim 28
Dependent Claim
35 words
A process as claimed in claim 23, wherein said at least two dopant elements are introduced at respectively different times so that the at least two dopant elements are doped in respectively different molecular layers.
Claim 29
Dependent Claim
98 words
A process as claimed in claim 1, further comprising the step of selecting a pressure and duration of evacuation of the crystal growth vessel between each successive one of the steps of introducing by taking into account a size of the growth chamber, further comprising the step of selecting a pressure and duration of introducing each gaseous supply of molecules by taking into account the pressure and duration of evacuation and a number of molecules necessary for growing substantially one molecular monolayer of silicon on the substrate at an end of each repetition of the cyclically repeating step.
Claim 30
Dependent Claim
43 words
A process as claimed in claim 1, further comprising the step of selecting the temperature being based on varying the temperature within the crystal growth vessel until monolayer growth is observed within the crystal growth vessel immediately after completing steps (a) to (f).
Claim 31
Dependent Claim
41 words
A process as claimed in claim 1, further comprising the step of counting a plurality of cycles of the sequence of steps (c) to (f) and stopping step (g) after a count from the step of counting equals the integral result.
Claim 32
Dependent Claim
43 words
A process as claimed in claim 1, wherein step (g) takes place without measuring an amount of growth which has taken place on the substrate before repeating the sequence of steps (c) to (f) in accordance with the cyclically repeating of step (g).
Claim 33
Dependent Claim
437 words
A process for forming a monocrystalline thin film of silicon on a silicon substrate located in a crystal growth vessel, comprising the steps of: (a) evacuating the interior of the crystal growth vessel to an evacuation pressure; (b) heating the substrate to, and maintaining the substrate at, a temperature within a range of from about 700 to 900 degrees C; (c) introducing a first supply of gaseous molecules of SiH 2 Cl 2 onto the substrate disposed in the growth vessel for a first period of time of from 0.5 to 200 seconds while maintaining the internal pressure of the growth vessel under a saturation condition within the range of from about 10 -1 to 1 Pascal to form a multiple molecular ad-layer of a second compound dissociated from the gaseous molecules of SiH 2 Cl 2 on the substrate, said second compound containing silicon; (d) evacuating the interior of said crystal growth vessel to remove molecules other than those which form said multiple molecular ad-layer; (e) introducing a second supply of gaseous molecules reactable with said multiple molecular ad-layer for a second time period of from about 0.5 to 200 seconds, while maintaining the internal pressure of the growth vessel under the saturation condition within the range of from about 10 -1 to 1 Pascal so as to chemically react with said multiple molecular ad-layer to form gaseous molecules of a reactant compound; (f) evacuating said growth vessel to remove the gaseous molecules of said second supply and said reactant compound so as to leave a monocrystalline thin film with the thickness of a multiple molecular layer of silicon; (g) cyclically repeating the sequence of steps (c) to (f) and maintaining the substrate at said temperature to grow the monocrystalline thin film of silicon on the substrate to a desired thickness which is dimensionally as precise as that for a multiple molecular layer, the desired thickness being attained by cycling the sequence of steps (c) to (f) by a plurality of times equivalent to an integral result of a division of the desired thickness of the monocrystalline thin film of silicon by a thickness of the multiple molecular monolayer of silicon; and (h) continuously evacuating the crystal growth chamber during steps (c) to (g) at a substantially constant rate of evacuation, the gaseous molecules being introduced during steps (c) and (e) including a respective amount which is in excess of that necessary for forming just the multiple molecular layer of silicon during each cycle even taking into account a removal rate of the gaseous molecules caused by the evacuation taking place during steps (c) and (e).
Claim 34
Dependent Claim
437 words
A process for forming a monocrystalline thin film of silicon on a silicon substrate located in a crystal growth vessel, comprising the steps of: (a) evacuating the interior of the crystal growth vessel to an evacuation pressure; (b) heating the substrate to, and maintaining the substrate at, a temperature within a range of from about 700 to 900 degrees C; (c) introducing a first supply of gaseous molecules of SiH 2 Cl 2 onto the substrate disposed in the growth vessel for a first period of time of from 0.5 to 200 seconds while maintaining the internal pressure of the growth vessel under a saturation condition within the range of from about 10 -1 to 1 Pascal to form a multiple molecular ad-layer of a second compound dissociated from the gaseous molecules of SiH 2 Cl 2 on the substrate, said second compound containing silicon; (d) evacuating the interior of said crystal growth vessel to remove molecules other than those which form said multiple molecular ad-layer; (e) introducing a second supply of gaseous molecules reactable with said multiple molecular ad-layer for a second time period of from about 0.5 to 200 seconds, while maintaining the internal pressure of the growth vessel under the saturation condition within the range of from about 10 -1 to 1 Pascal so as to chemically react with said multiple molecular ad-layer to form gaseous molecules of a reactant compound; (f) evacuating said growth vessel to remove the gaseous molecules of said second supply and said reactant compound so as to leave a monocrystalline thin film with the thickness of a multiple molecular layer of silicon; (g) cyclically repeating the sequence of steps (c) to (f) and maintaining the substrate at said temperature to grow the monocrystalline thin film of silicon on the substrate to a desired thickness which is dimensionally as precise as that for a multiple molecular layer, the desired thickness being attained by cycling the sequence of steps (c) to (f) by a plurality of times equivalent to an integral result of a division of the desired thickness of the monocrystalline thin film of silicon by a thickness of the multiple molecular monolayer of silicon; and (h) continuously evacuating the crystal growth chamber during steps (c) to (g) at a substantially constant rate of evacuation, the gaseous molecules being introduced during steps (c) and (e) including a respective amount which is in excess of that necessary for forming just the multiple molecular layer of silicon during each cycle even taking into account a removal rate of the gaseous molecules caused by the evacuation taking place during steps (c) and (e).
Claim 35
Dependent Claim
16 words
A process as in claim 32, wherein said multiple molecular layer is a double molecular layer.
Claim 36
Dependent Claim
16 words
A process as in claim 32, wherein said multiple molecular layer is a triple molecular layer.
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