US5164286A
Expired / Lapsed
US
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Photoresist developer containing fluorinated amphoteric surfactant
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1992-01-24
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Granted: 1992-11-17
•
Expires: 2012-01-24
Abstract
Abstract Described herein is a developer for alkali developable photoresists which comprises the addition of a selected fluorinated amphoteric surfactant to an aqueous basic solution.
Inventors
- 👤 Andrew J. Blakeney
- 👤 Robert Rogler
- 👤 Medhat Toukhy
- 👤 David Brzozowy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/322
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
84 words
An aqueous developer composition for alkali developable photoresists which comprises (a) at least one water-soluble base and (b) and at least one fluorinated amphoteric surfactant of the following formula (II): ##STR5## wherein Rf is F (CF 2 -CF 2 ) 3-8 ; R is (CH 2 ) x wherein x is an integer of 1 to 4; R 1 is lower alkyl of 1 to 6 carbon atoms, aryl or substituted aryl; and R 2 is lower alkyl of 1 to 6 carbon atoms.
Claim 2
Dependent Claim
84 words
An aqueous developer composition for alkali developable photoresists which comprises (a) at least one water-soluble base and (b) and at least one fluorinated amphoteric surfactant of the following formula (II): ##STR5## wherein Rf is F (CF 2 -CF 2 ) 3-8 ; R is (CH 2 ) x wherein x is an integer of 1 to 4; R 1 is lower alkyl of 1 to 6 carbon atoms, aryl or substituted aryl; and R 2 is lower alkyl of 1 to 6 carbon atoms.
Claim 3
Dependent Claim
52 words
A developer as defined in calim 1 wherein said surfactant has formula (III): ##STR6## wherein `Rf is F (CF 2 -CF 2 ) 3-8 ; R is (CH 2 ) x wherein x is an integer of 1 to 4; and R 3 is lower alkyl of 1 to 6 carbon atoms.
Claim 4
Dependent Claim
52 words
A developer as defined in calim 1 wherein said surfactant has formula (III): ##STR6## wherein `Rf is F (CF 2 -CF 2 ) 3-8 ; R is (CH 2 ) x wherein x is an integer of 1 to 4; and R 3 is lower alkyl of 1 to 6 carbon atoms.
Claim 5
Dependent Claim
14 words
A developer as defined in claim 1 wherein said surfactant has formula (IV): ##STR7##
Claim 6
Dependent Claim
15 words
A developer as defined in claim 1 wherein said base is an alkali metal hydroxide.
Claim 7
Dependent Claim
17 words
A developer as defined in claim 1 wherein said alkali metal hydroxide is sodium or potassium hydroxide.
Claim 8
Dependent Claim
13 words
A developer as defined in claim 1 wherein said base is a silicate.
Claim 9
Dependent Claim
13 words
A developer as defined in claim 1 wherein said base is a carbonate.
Claim 10
Dependent Claim
64 words
A developer as defined in claim 1 wherein said base is a quaternary ammonium hydroxide represented by formula (I): ##STR8## wherein R a , R b , and R c are respectively alkyl groups each having 1 to 4 carbon atoms, and R d is an alkyl group having 1 to 4 carbon atoms or a hydroxyalkyl group having 1 to 3 carbon atoms.
Claim 11
Dependent Claim
22 words
A developer as defined in claim 8 wherein R a R b , R c , and R d are each methyl.
Claim 12
Dependent Claim
26 words
A developer as defined in claim 8 wherein R a , R b , and R c , are each methyl and R d is hydroxyethyl.
Claim 13
Dependent Claim
28 words
A developer as defined in claim 8 wherein said fluorinated amphoteric surfactant is used in amounts of from 0.001 to about 1.0 weight percent of said developer composition.
Claim 14
Dependent Claim
26 words
A developer as defined in claim 8 wherein said base is used in amounts of from about 0.5% to about 5% by weight of said composition.
References Cited (Backward Citations)
US3891439A
Cited
US3993799A
Cited
US4089804A
Cited
JPS5566909A
Cited
US4628023A
Cited
US4741989A
Cited
US4610953A
Cited
US4661436A
Cited
US4464461A
Cited
US4613561A
Cited
US4914006A
Cited
US4784937A
Cited
US4710449A
Cited
US4806453A
Cited
US4820621B1
Cited
US4820621A
Cited
US4847004A
Cited
US4880724A
Cited
JPS6472155A
Cited
US4997748A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-17 | 1996-05-18 | 1996-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-17 | 2000-05-18 | 2000-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-17 | 2004-05-18 | 2004-11-17 | $7700.00 | Window Closed / Lapsed |