Development of light-sensitive quinone diazide compositions

Claim 2

A developing composition for use in developing an imagewise-exposed layer of a light-sensitive quinone diazide composition, said developing composition comprising a quaternary alkanol ammonium hydroxide developing agent and a stabilizing concentration of a semicarbazide.

Claim 3

A developing composition as claimed in claim 1 wherein said quaternary alkanol ammonium hydroxide developing agent has the formula: ##STR16## wherein R 1 is a hydroxyalkyl radical and each of R 2 , R 3 and R 4 is independently selected from the group consisting of hydrocarbyl radicals and hydroxyalkyl radicals.

Claim 4

A developing composition as claimed in claim 1 wherein said quaternary alkanol ammonium hydroxide developing agent has the formula: ##STR17## wherein R 1 is a hydroxyalkyl radical of 2 to 8 carbon atoms, R 2 is a hydrocarbyl radical of 1 to 10 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 8 carbon atoms or a hydrocarbyl radical of 1 to 10 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 8 carbon atoms or a hydrocarbyl radical of 1 to 10 carbon atoms.

Claim 5

A developing composition as claimed in claim 1 wherein said quaternary alkanol ammonium hydroxide developing agent is selected from the group consisting of: tetraalkanolammonium hydroxides, monoalkyltrialkanolammonium hydroxides, dialkyldialkanolammonium hydroxides, trialkylmonoalkanolammonium hydroxides, monoalkylmonoaryldialkanolammonium hydroxides, dialkylmonoarylmonoalkanolammonium hydroxides, and monoaryltrialkanolammonium hydroxides.

Claim 6

A developing composition for use in developing an image-wise exposed layer of a light-sensitive quinone diazide composition, said developing composition comprising (1) a quaternary alkanol ammonium hydroxide developing agent of the formula: ##STR18## wherein R 1 is a hydroxyalkyl radical of 2 to 4 carbon atoms, R 2 is an alkyl radical of 1 to 4 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and (2) a stabilizing concentration of a semicarbazide.

Claim 7

A developing composition for use in developing an image-wise exposed layer of a light-sensitive quinone diazide composition, said developing composition comprising (1) a quaternary alkanol ammonium hydroxide developing agent of the formula: ##STR18## wherein R 1 is a hydroxyalkyl radical of 2 to 4 carbon atoms, R 2 is an alkyl radical of 1 to 4 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and (2) a stabilizing concentration of a semicarbazide.

Claim 8

A developing composition for use in developing an image-wise exposed layer of a light-sensitive quinone diazide composition, said developing composition being an aqueous composition that is substantially free of metal ions and comprises (1) from about 3 to about 25 percent by weight of a quaternary alkanol ammonium hydroxide developing agent of the formula: ##STR19## wherein R 1 is a hydroxyalkyl radical of 2 to 4 carbon atoms, R 2 is an alkyl radical of 1 to 4 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and (2) from about 0.01 to about 0.04 moles of a semicarbazide per mole of said developing agent.

Claim 9

A developing composition for use in developing an image-wise exposed layer of a light-sensitive quinone diazide composition, said developing composition being an aqueous composition that is substantially free of metal ions and comprises (1) from about 3 to about 25 percent by weight of a quaternary alkanol ammonium hydroxide developing agent of the formula: ##STR19## wherein R 1 is a hydroxyalkyl radical of 2 to 4 carbon atoms, R 2 is an alkyl radical of 1 to 4 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and (2) from about 0.01 to about 0.04 moles of a semicarbazide per mole of said developing agent.

Claim 10

A developing composition as claimed in claim 1 wherein said semicarbazide is selected from the group consisting of (1) compounds of the formula: ##STR20## where R is amino, alkylamino of 1 to 6 carbon atoms, dialkylamino of 2 to 12 carbon atoms, phenylamino, diphenylamino, hydrazino, aminocarbonyl or hydrazinocarbonyl and X is oxygen or sulfur, and (2) water-soluble acid addition salts thereof.

Claim 11

A developing composition as claimed in claim 1 wherein said semicarbazide is semicarbazide hydrochloride.

Claim 12

A developing composition for use in developing an imagewise-exposed layer of a light-sensitive quinone diazide composition, said developing composition consisting essentially of an aqueous solution of methyltriethanolammonium hydroxide and semicarbazide hydrochloride.

Claim 13

A developing composition for use in developing an imagewise-exposed layer of a light-sensitive quinone diazide composition, said developing composition consisting essentially of an aqueous solution of methyltriethanolammonium hydroxide and semicarbazide hydrochloride.

Claim 14

In a process for forming a resist image which comprises developing an imagewise-exposed layer of a light-sensitive quinone diazide composition with an alkaline developing composition, the improvement wherein said alkaline developing composition comprises a quaternary alkanol ammonium hydroxide developing agent and a stabilizing concentration of a semicarbazide.

Claim 15

In a process for forming a resist image which comprises developing an imagewise-exposed layer of a light-sensitive quinone diazide composition with an alkaline developing composition, the improvement wherein said alkaline developing composition comprises a quaternary alkanol ammonium hydroxide developing agent and a stabilizing concentration of a semicarbazide.

Claim 16

The process as claimed in claim 10 wherein said quaternary alkanol ammonium hydroxide developing agent has the formula: ##STR21## wherein R 1 is a hydroxyalkyl radical and each of R 2 , R 3 and R 4 is independently selected from the group consisting of hydrocarbyl radicals and hydroxyalkyl radicals.

Claim 17

The process as claimed in claim 10 wherein said quaternary alkanol ammonium hydroxide developing agent has the formula: ##STR22## wherein R 1 is a hydroxyalkyl radical of 2 to 8 carbon atoms, R 2 is a hydrocarbyl radical of 1 to 10 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 8 carbon atoms or a hydrocarbyl radical of 1 to 10 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 8 carbon atoms or a hydrocarbyl radical of 1 to 10 carbon atoms.

Claim 18

The process as claimed in claim 10 wherein said quaternary alkanol ammonium hydroxide developing agent is selected from the group consisting of tetraalkanolammonium hydroxides, monoalkyltrialkanolammonium hydroxides, dialkyldialkanolammonium hydroxides, trialkylmonoalkanolammonium hydroxides, monoalkylmonoaryldialkanolammonium hydroxides, dialkylmonoarylmonoalkanolammonium hydroxides, and monoaryltrialkanolammonium hydroxides.

Claim 19

The process as claimed in claim 10 wherein said quaternary alkanol ammonium hydroxide developing agent has the formula: ##STR23## wherein R 1 is a hydroxyalkyl radical of 2 to 4 carbon atoms, R 2 is an alkyl radical of 1 to 4 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms.

Claim 20

The process as claimed in claim 10 wherein said developing composition is an aqueous composition that is substantially free of metal ions and comprises: (1) from about 3 to about 25 percent by weight of a quaternary alkanol ammonium hydroxide developing agent of the formula: ##STR24## wherein R 1 is a hydroxyalkyl radical of 2 to 4 carbon atoms, R 2 is an alkyl radical of 1 to 4 carbon atoms, R 3 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and (2) from about 0.01 to about 0.04 moles of a semicarbazide per mole of said developing agent.

Claim 21

The process as claimed in claim 10 wherein said semicarbazide is selected from the group consisting of (1) compounds of the formula: ##STR25## wherein R is amino, alkylamino of 1 to 6 carbon atoms, dialkylamino of 2 to 12 carbon atoms, phenylamino, diphenylamino, hydrazino, aminocarbonyl or hydrazinocarbonyl and X is oxygen or sulfur, and (2) water-soluble acid addition salts thereof.

Claim 22

The process as claimed in claim 10 wherein said semicarbazide is semicarbazide hydrochloride.

Claim 23

The process as claimed in claim 10 wherein said developing composition consists essentially of an aqueous solution of methyltriethanolammonium hydroxide and semicarbazide hydrochloride.

Claim 24

The process as claimed in claim 10 wherein said quinone diazide composition is comprised of a monomeric quinone diazide incorporated in an alkali-soluble resinous binder.

Claim 25

The process as claimed in claim 10 wherein said quinone diazide composition is comprised of a monomeric quinone diazide that has been reacted with an alkali-soluble resinous material.

Claim 26

The process as claimed in claim 10 wherein said quinone diazide composition comprises a polymeric compound formed from the condensation reaction of a quinone diazide with a phenol-formaldehyde resin.

Claim 27

The process as claimed in claim 10 wherein said quinone diazide composition comprises a polymeric compound formed from the condensation reaction of a naphthoquinone diazide with a phenol-formaldehyde resin.

Claim 28

The process as claimed in claim 10 wherein said quinone diazide has a linkage selected from the group consisting of sulfonyl, carbonyl, carbonyloxy and sulfinyloxy.

Claim 29

The process as claimed in claim 10 wherein said quinone diazide composition comprises a polymeric compound formed from the condensation reaction of 1,2-naphthoquinone-2-diazide-5-sulfonyl chloride with a phenol-formaldehyde resin.

Claim 30

The process as claimed in claim 10 wherein said quinone diazide composition comprises a non-light-sensitive film-forming polymeric binder and a polymeric compound formed from the condensation reaction of a quinone diazide with a phenol-formaldehyde resin.

Claim 31

The process as claimed in claim 10 wherein said layer of light-sensitive quinone diazide composition is a coating on a silicon wafer.

Claim 32

In a process for forming a resist image which comprises developing an imagewise-exposed layer of a light-sensitive quinone diazide composition with an alkaline developing composition, the improvement wherein said alkaline developing composition is an aqueous composition which is substantially free of metal ions, and contains a sufficient concentration of methyltriethanolammonium hydroxide to remove the exposed areas of said layer of light-sensitive quinone diazide composition without substantial removal of the unexposed areas, and a stabilizing concentration of a semicarbazide.

Claim 33

In a process for forming a resist image which comprises developing an imagewise-exposed layer of a light-sensitive quinone diazide composition with an alkaline developing composition, the improvement wherein said alkaline developing composition is an aqueous composition which is substantially free of metal ions, and contains a sufficient concentration of methyltriethanolammonium hydroxide to remove the exposed areas of said layer of light-sensitive quinone diazide composition without substantial removal of the unexposed areas, and a stabilizing concentration of a semicarbazide.

Claim 36

The method as claimed in claim 28 wherein said quaternary alkanol ammonium hydroxide developing agent has the formula: ##STR26## wherein R 1 is a hydroxyalkyl radical of 2 to 4 carbon atoms, R 2 is an alkyl radical of 2 to 4 carbon atoms, R 3 is an hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and R 4 is a hydroxyalkyl radical of 2 to 4 carbon atoms or an alkyl radical of 1 to 4 carbon atoms, and said semicarbazide is selected from the group consisting of (1) compounds of the formula: ##STR27## where R is amino, alkylamino of 1 to 6 carbon atoms, dialkylamino of 2 to 12 carbon atoms, phenylamino, diphenylamino, hydrazino, aminocarbonyl, or hydrazinocarbonyl and X is oxygen or sulfur, and (2) water-soluble acid addition salts thereof.

Claim 37

The method as claimed in claim 28 wherein said quaternary alkanol ammonium hydroxide developing agent is methyltriethanolammonium hydroxide and said semicarbazide is semicarbazide hydrochloride.