Patent US4606806A successfully refreshed from Google Patents.
US4606806A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetron sputter device having planar and curved targets
Assignee: Varian Semiconductor Equipment Associates Inc
•
Filing: 1985-12-16
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Granted: 1986-08-19
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Expires: 2005-12-16
Abstract
Abstract A magnetron sputter device includes a first target having an emitting surface and a second target having a concave emitting target defined by a side wall of a frustum of cone. Separate plasma discharges for the targets are confined by separate electromagnet derived magnetic fields, coupled to the targets by pole pieces.
Inventors
- 👤 John C. Helmer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 19:49
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3423; H01J37/3402; H01J37/3405; H01J37/3408; H01J37/345; H01J37/3458
Claims Analysis
Total Claims: 63
Claim 1
Independent Claim
143 words
A vacuum sputtering device for causing material from a target means to be sputtered onto a workpiece, the target means including a first target having a first material emitting surface and a second target positioned outside said first target having a second emitting surface, the second emitting surface being inclined at an angle to the first material emitting surface, the device comprising means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and workpiece, means for establishing an ionizing electric field for the gas in the space, means for establishing a confining magnetic field for the gas ionized by the electric field in the vicinity of the emitting surfaces of the first and second targets, and means for mounting the targets so that emitted material is sputtered from the first and second emitting surfaces.
Claim 2
Dependent Claim
143 words
A vacuum sputtering device for causing material from a target means to be sputtered onto a workpiece, the target means including a first target having a first material emitting surface and a second target positioned outside said first target having a second emitting surface, the second emitting surface being inclined at an angle to the first material emitting surface, the device comprising means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and workpiece, means for establishing an ionizing electric field for the gas in the space, means for establishing a confining magnetic field for the gas ionized by the electric field in the vicinity of the emitting surfaces of the first and second targets, and means for mounting the targets so that emitted material is sputtered from the first and second emitting surfaces.
Claim 3
Dependent Claim
148 words
The device of claim 1 wherein the electric field establishing means and the magnetic field confining means include means for establishing separate first and second discharges in the ionized gas immediately above the emitting surfaces of the first and second targets, said separate discharge establishing means including: means for establishing separate first and second ionizing electric fields for the gas above the first and second targets, respectively, and means for establishing different confining magnetic fields for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets, said magnetic field confining means including first and second magnetic circuits through the first and second targets, respectively, the first and second magnetic circuits respectively including first and second magnetic field sources and pole pieces for coupling flux from the first and second magnetic field sources to the first and second targets.
Claim 4
Dependent Claim
21 words
The device of claim 2 further including means for adjusting the relative magnitudes of the first and second magnetic field sources.
Claim 5
Dependent Claim
18 words
The device of claim 3 wherein the magnetic field sources are electromagnets responsive to different adjustable current sources.
Claim 6
Dependent Claim
36 words
The device of claim 4 wherein the first target initially has a planar emitting surface and the means for mounting the targets mounts the second emitting surface at an angle displaced from the planar emitting surface.
Claim 7
Dependent Claim
37 words
The device of claim 4 wherein the first target initially has a planar emitting surface and the means for mounting the targets mounts the second emitting surface at an angle 45° displaced from the planar emitting surface.
Claim 8
Dependent Claim
59 words
The device of claim 4 wherein the first and second targets both have emitting surfaces that are displaced from longitudinal axes thereof by like angles, and the means for mounting the targets mounts the first and second targets so that longitudinal axes thereof are aligned and the emitting surfaces thereof subtend the same angle relative to the longitudinal axes.
Claim 9
Dependent Claim
20 words
The device of claim 7 wherein the first and second targets are mounted so that the surfaces thereof are aligned.
Claim 10
Dependent Claim
128 words
A vacuum sputtering device for causing material to impinge on a workpiece comprising target means for sputtering the material, the target means including a first target having a first material emitting surface and a second target initially having a second emitting surface, the first and second targets being arranged so that emitted material is sputtered from the second emitting surface outside of the first target means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and article, means for establishing an ionizing electric field for the gas in the space, and means for establishing a confining magnetic field for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets.
Claim 11
Dependent Claim
128 words
A vacuum sputtering device for causing material to impinge on a workpiece comprising target means for sputtering the material, the target means including a first target having a first material emitting surface and a second target initially having a second emitting surface, the first and second targets being arranged so that emitted material is sputtered from the second emitting surface outside of the first target means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and article, means for establishing an ionizing electric field for the gas in the space, and means for establishing a confining magnetic field for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets.
Claim 12
Dependent Claim
29 words
The device of claim 9 wherein the first target initially has a planar emitting surface and the second surface is at an angle displaced from the planar emitting surface.
Claim 13
Dependent Claim
30 words
The device of claim 9 wherein the first target initially has a planar emitting surface and the second surface is at an angle displaced 45° from the planar emitting surface.
Claim 14
Dependent Claim
26 words
The device of claim 9 wherein the first and second targets both have emitting surfaces that are displaced from aligned longitudinal axes thereof by like angles.
Claim 15
Dependent Claim
17 words
The device of claim 12 wherein the emitting surfaces of the first and second targets are aligned.
Claim 16
Dependent Claim
72 words
The device of claim 9 wherein the emitting surface of the first target has an annular configuration with inner and outer radii of R 1 and R 2 , respectively, the second emitting surface being symmetrical about a longitudinal axis of the emitting surface of the first target and respectively having inner and outer radii of R 3 and R 4 , wherein R 1 <R 2 <R 3 <R 4 .
Claim 17
Dependent Claim
21 words
The device of claim 14 wherein the second surface is defined by a side wall of a frustum of a cone.
Claim 18
Dependent Claim
20 words
The device of claim 15 wherein the second surface is inclined at approximately 45° relative to the planar emitting surface.
Claim 19
Dependent Claim
148 words
The device of claim 15 wherein the electric field establishing means and the magnetic field confining means includes means for establishing separate first and second discharges in the ionized gas immediately above the emitting surfaces of the first and second targets, said separate discharge establishing means including: means for establishing separate first and second ionizing electric fields for the gas above the first and second targets, respectively, and means for establishing different confining magnetic fields for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets, said magnetic field confining means including first and second magnetic circuits through the first and second targets, respectively, the first and second magnetic circuits respectively including first and second magnetic field sources and pole pieces for coupling flux from the first and second magnetic field sources to the first and second targets.
Claim 20
Dependent Claim
100 words
The device of claim 17 wherein the first magnetic circuit includes a first pole piece extending axially along the axis for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including a second annular pole piece concentric with the axis for coupling magnetic flux to radius R 4 of the second target, the first magnetic circuit including first pole piece means for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including second pole piece means for coupling magnetic flux to radius R 3 of the second target.
Claim 21
Dependent Claim
148 words
The device of claim 14 wherein the electric field establishing means and the magnetic field confining means include means for establishing separate first and second discharges in the ionized gas immediately above the emitting surfaces of the first and second targets, said separate discharge establishing means including: means for establishing separate first and second ionizing electric fields for the gas above the first and second targets, respectively, and means for establishing different confining magnetic fields for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets, said magnetic field confining means including first and second magnetic circuits through the first and second targets, respectively, the first and second magnetic circuits respectively including first and second magnetic field sources and pole pieces for coupling flux from the first and second magnetic field sources to the first and second targets.
Claim 22
Dependent Claim
100 words
The device of claim 19 wherein the first magnetic circuit includes a first pole piece extending axially along the axis for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including a second annular pole piece concentric with the axis for coupling magnetic flux to radius R 4 of the second target, the first magnetic circuit including first pole piece means for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including second pole piece means for coupling magnetic flux to radius R 3 of the second target.
Claim 23
Dependent Claim
29 words
The device of claim 9 wherein the second surface includes a straight cross sectional edge inclined at a constant angle relative to the emitting surface of the first target.
Claim 24
Dependent Claim
12 words
The device of claim 21 wherein the constant angle is approximately 45°.
Claim 25
Dependent Claim
12 words
The device of claim 21 wherein the constant angle is approximately 0°.
Claim 26
Dependent Claim
52 words
The device of claim 9 wherein the emitting surface of the first target has a circular perimeter about a longitudinal axis, the second surface being defined by a side wall of a frustum of a cone having an axis coincident with the transverse axis of the emitting surface of the first target.
Claim 27
Dependent Claim
57 words
A target set for a vacuum sputtering device comprising a first target element having an emitting surface, a second target element initially having a second emitting surface, the geometries of the first and second targets being such that, when they are in a vacuum, material is sputtered from the second emitting surface outside of the first target.
Claim 28
Dependent Claim
57 words
A target set for a vacuum sputtering device comprising a first target element having an emitting surface, a second target element initially having a second emitting surface, the geometries of the first and second targets being such that, when they are in a vacuum, material is sputtered from the second emitting surface outside of the first target.
Claim 29
Dependent Claim
31 words
The target set of claim 25 wherein the emitting surface of the first target is planar and the second emitting surface is at an angle displaced from the planar emitting surface.
Claim 30
Dependent Claim
19 words
The target set of claim 26 wherein the second surface is inclined by approximately 45° relative to the axis.
Claim 31
Dependent Claim
53 words
The target set of claim 26 wherein the emitting surface of the first target has a circular perimeter about a longitudinal axis, the second surface being defined by a side wall of a frustum of a cone having an axis coincident with the longitudinal axis of the emitting surface of the first target.
Claim 32
Dependent Claim
53 words
The target set of claim 25 wherein the emitting surface of the first target has a circular perimeter about a longitudinal axis, the second surface being defined by a side wall of a frustum of a cone having an axis coincident with the longitudinal axis of the emitting surface of the first target.
Claim 33
Dependent Claim
31 words
The target set of claim 29 wherein the emitting surface of the first target is planar and the second emitting surface is at an angle displaced from the planar emitting surface.
Claim 34
Dependent Claim
19 words
The target set of claim 30 wherein the second surface is inclined by approximately 45° relative to the axis.
Claim 35
Dependent Claim
25 words
The target assembly of claim 29 wherein the emitting surfaces are both frusto conical and inclined by the same angle relative to the longitudinal axis.
Claim 36
Dependent Claim
16 words
The target assembly of claim 29 wherein the emitting surfaces are frustums of the same cone.
Claim 37
Dependent Claim
19 words
The target set of claim 29 wherein the second surface is inclined by approximately 45° relative to the axis.
Claim 38
Dependent Claim
41 words
The target set of claim 29 wherein the circular perimeter has a radius R 2 , and the second surface has inner and outer radii of R 3 and R 4 , respectively, where R 2 <R 3 <R 4 .
Claim 39
Dependent Claim
28 words
The target assembly of claim 35 wherein the first target is formed as a ring having an inner radius of R 1 where R 1 <R 2 .
Claim 40
Dependent Claim
163 words
A vacuum sputtering device for causing material from a target means to be sputtered onto a workpiece, the target means including a first target having a planar material emitting surface with a circular outer perimeter and a second target having a sloped emitting surface relative to said planar emitting surface, said second target being a circular annulus having an axial thickness at an outer perimeter which is greater than an axial thickness at an inner perimeter, the device comprising means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and workpiece, means for establishing an ionizing electric field for the gas in the space, means for establishing a confining magnetic field for the gas ionized by the electric field in the vicinity of the emitting surfaces of the first and second targets, and means for mounting the targets so that emitted material is sputtered from the sloped emitting surface outside of the first target.
Claim 41
Dependent Claim
163 words
A vacuum sputtering device for causing material from a target means to be sputtered onto a workpiece, the target means including a first target having a planar material emitting surface with a circular outer perimeter and a second target having a sloped emitting surface relative to said planar emitting surface, said second target being a circular annulus having an axial thickness at an outer perimeter which is greater than an axial thickness at an inner perimeter, the device comprising means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and workpiece, means for establishing an ionizing electric field for the gas in the space, means for establishing a confining magnetic field for the gas ionized by the electric field in the vicinity of the emitting surfaces of the first and second targets, and means for mounting the targets so that emitted material is sputtered from the sloped emitting surface outside of the first target.
Claim 42
Dependent Claim
141 words
The device of claim 37 wherein the electric field establishing means and the magnetic field confining means include means for establishing separate first and second discharges in the ionized gas immediately above the emitting surfaces of the first and second targets, said separate discharge establishing means including: means for establishing separate first and second ionizing electric fields for the gas above the first and second targets, respectively, and means for establishing different confining magnetic fields for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets, said magnetic field confining means including first and second targets, respectively, the first and second magnetic circuits respectively including first and second magnetic field surfaces and pole pieces for coupling flux from the first and second magnetic field sources to the first and second targets.
Claim 43
Dependent Claim
21 words
The device of claim 38 further including means for adjusting the relative magnitudes of the first and second magnetic field sources.
Claim 44
Dependent Claim
18 words
The device of claim 39 wherein the magnetic field sources are electromagnets responsive to different adjustable current sources.
Claim 45
Dependent Claim
26 words
The device of claim 40 wherein the means for mounting the targets mounts the sloped surface of an angle 45° displaced from the planar emitting surface.
Claim 46
Dependent Claim
164 words
A vacuum sputtering device for causing material to impinge on a workpiece comprising target means for sputtering the material, the target means including a first target having a planar material emitting surface with a circular outer perimeter and a second target having a sloped emitting surface relative to said planar emitting surface, said second target being a circular annulus having an axial thickness at an outer perimeter which is greater than an axial thickness at an inner perimeter, the first and second targets being arranged so that emitted material is sputtered from the sloped emitting surface outside of the first target means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and article, means for establishing an ionizing electric field for the gas in the space, and means for establishing a confining magnetic field for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets.
Claim 47
Dependent Claim
164 words
A vacuum sputtering device for causing material to impinge on a workpiece comprising target means for sputtering the material, the target means including a first target having a planar material emitting surface with a circular outer perimeter and a second target having a sloped emitting surface relative to said planar emitting surface, said second target being a circular annulus having an axial thickness at an outer perimeter which is greater than an axial thickness at an inner perimeter, the first and second targets being arranged so that emitted material is sputtered from the sloped emitting surface outside of the first target means for supplying an ionizable gas to a space adapted to be evacuated, the space being between the target and article, means for establishing an ionizing electric field for the gas in the space, and means for establishing a confining magnetic field for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets.
Claim 48
Dependent Claim
20 words
The device of claim 42 wherein the sloped surface is at an angle displaced 45° from the planar emitting surface.
Claim 49
Dependent Claim
72 words
The device of claim 42 wherein the emitting surface of the first target has an annular configuration with inner and outer radii of R 1 and R 2 , respectively, the sloped emitting surface being symmetrical about a longitudinal axis of the emitting surface of the first target and respectively having inner and outer radii of R 3 and R 4 , wherein R 1 <R 2 <R 3 <R 4 .
Claim 50
Dependent Claim
21 words
The device of claim 44 wherein the sloped surface is defined by a side wall of a frustum of a cone.
Claim 51
Dependent Claim
20 words
The device of claim 45 wherein the sloped surface is inclined at approximately 45° relative to the planar emitting surface.
Claim 52
Dependent Claim
148 words
The device of claim 45 wherein the electric field establishing means and the magnetic field confining means includes means for establishing separate first and second discharges in the ionized gas immediately above the emitting surfaces of the first and second targets, said separate discharge establishing means including: means for establishing separate first and second ionizing electric fields for the gas above the first and second targets, respectively, and means for establishing different confining magnetic fields for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets, said magnetic field confining means including first and second magnetic circuits through the first and second targets, respectively, the first and second magnetic circuits respectively including first and second magnetic field sources and pole pieces for coupling flux from the first and second magnetic field sources to the first and second targets.
Claim 53
Dependent Claim
100 words
The device of claim 47 wherein the first magnetic circuit includes a first pole piece extending axially along the axis for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including a second annular pole piece concentric with the axis for coupling magnetic flux to radius R 4 of the second target, the first magnetic circuit including first pole piece means for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including second pole piece means for coupling magnetic flux to radius R 3 of the second target.
Claim 54
Dependent Claim
148 words
The device of claim 44 wherein the electric field establishing means and the magnetic field confining means include means for establishing separate first and second discharges in the ionized gas immediately above the emitting surfaces of the first and second targets, said separate discharge establishing means including: means for establishing separate first and second ionizing electric fields for the gas above the first and second targets, respectively, and means for establishing different confining magnetic fields for the gas ionized by the electric fields in the vicinity of the emitting surfaces of the first and second targets, said magnetic field confining means including first and second magnetic circuits through the first and second targets, respectively, the first and second magnetic circuits respectively including first and second magnetic field sources and pole pieces for coupling flux from the first and second magnetic field sources to the first and second targets.
Claim 55
Dependent Claim
100 words
The device of claim 49 wherein the first magnetic circuit includes a first pole piece extending axially along the axis for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including a second annular pole piece concentric with the axis for coupling magnetic flux to radius R 4 of the second target, the first magnetic circuit including first pole piece means for coupling magnetic flux to radius R 1 of the first target, the second magnetic circuit including second pole piece means for coupling magnetic flux to radius R 3 of the second target.
Claim 56
Dependent Claim
95 words
A target set for a vacuum sputtering device comprising a first target element having a planar emitting surface with a circular outer perimeter, a second target element initially having a sloped emitting surface relative to said planar emitting surface, said second target being a circular annulus having an axial thickness at an outer perimeter which is greater than an axial thickness at an inner perimeter, the geometries of the first and second targets being such that, when they are in a vacuum, material is sputtered from the sloped emitting surface outside of the first target.
Claim 57
Dependent Claim
95 words
A target set for a vacuum sputtering device comprising a first target element having a planar emitting surface with a circular outer perimeter, a second target element initially having a sloped emitting surface relative to said planar emitting surface, said second target being a circular annulus having an axial thickness at an outer perimeter which is greater than an axial thickness at an inner perimeter, the geometries of the first and second targets being such that, when they are in a vacuum, material is sputtered from the sloped emitting surface outside of the first target.
Claim 58
Dependent Claim
21 words
The target set of claim 51 wherein the sloped emitting surface is at an angle displaced from the planar emitting surface.
Claim 59
Dependent Claim
19 words
The target set of claim 52 wherein the sloped surface is inclined by approximately 45° relative to the axis.
Claim 60
Dependent Claim
39 words
The target set of claim 52 wherein the sloped surface being defined by a side wall of a frustum of a cone having an axis coincident with an axis of symmetry of the emitting surface of the first target.
Claim 61
Dependent Claim
19 words
The target set of claim 54 wherein the sloped surface is inclined by approximately 45° relative to the axis.
Claim 62
Dependent Claim
41 words
The target set of claim 55 wherein the circular perimeter has a radius R 2 , and the sloped surface has inner and outer radii of R 3 and R 4 , respectively, where R 2 <R 3 <R 4 .
Claim 63
Dependent Claim
29 words
The target set of claim 56 wherein the first target is formed as a ring having an inner radius of R 1 , where R 1 <R 2 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-18 | 1990-02-17 | 1990-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-18 | 1994-02-17 | 1994-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-18 | 1998-02-17 | 1998-08-19 | $7700.00 | Window Closed / Lapsed |