US4431505A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High rate magnetron sputtering of high permeability materials
Assignee: Hauzer Industries BV
•
Filing: 1983-06-29
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Granted: 1984-02-14
•
Expires: 2003-06-29
Abstract
Abstract A magnetron sputtering apparatus for high permeable materials where the target may include first and second elements separated from one another by a gap and the magnetic field source preferably exceeds 1000 gauss adjacent a pole thereof. The source is preferably a solid, oriented crystal ferrite magnet. A number of different configurations are disclosed.
Inventors
- 👤 Charles F. Morrison, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 00:04
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3423; H01J37/3402; H01J37/3405; H01J37/3408; H01J37/3426
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
61 words
Sputtering apparatus comprising a target of material to be sputtered; an anode; means for generating an electric field between the anode and target; and a magnetic field source for generating a magnetic field to confine plasma adjacent the target, the source including a solid, oriented crystal magnet having a flux density adjacent a pole thereof of at least about 1000 gauss.
Claim 2
Dependent Claim
61 words
Sputtering apparatus comprising a target of material to be sputtered; an anode; means for generating an electric field between the anode and target; and a magnetic field source for generating a magnetic field to confine plasma adjacent the target, the source including a solid, oriented crystal magnet having a flux density adjacent a pole thereof of at least about 1000 gauss.
Claim 3
Dependent Claim
15 words
Apparatus as in claim 1 where said target consists essentially of a magnetically permeable material.
Claim 4
Dependent Claim
23 words
Apparatus as in claim 2 where said target includes at least first and second target elements spaced from one another by a gap.
Claim 5
Dependent Claim
31 words
Apparatus as in claim 3 wherein said first target element is annular and the second target element is disposed at least adjacent the open portion of the annular first target element.
Claim 6
Dependent Claim
16 words
Apparatus as in claims 3 or 4 where said first and second target elements are co-planar.
Claim 7
Dependent Claim
19 words
Apparatus as in claims 3 or 4 where said first and second target elements are disposed in different planes.
Claim 8
Dependent Claim
20 words
Apparatus as in claim 4 where said first and second target elements are perpendicularly disposed with respect to one another.
Claim 9
Dependent Claim
20 words
Apparatus as in claim 7 where said second target element is disposed within the open portion of the first element.
Claim 10
Dependent Claim
20 words
Apparatus as in claims 3 or 4 where said first and second target elements are disposed in different, parallel planes.
Claim 11
Dependent Claim
33 words
Apparatus as in claim 9 where the gap between said first and second elements extends between the inner, lower periphery of said first element and the outer, upper periphery of the second element.
Claim 12
Dependent Claim
33 words
Apparatus as in claim 9 where the gap between said first and second elements extends between the outer, lower periphery of the second element and the inner, upper periphery of the first element.
Claim 13
Dependent Claim
22 words
Apparatus as in claim 11 where said solid, oriented crystal magnet extends through the open portion of the annular first target element.
Claim 14
Dependent Claim
13 words
Apparatus as in claim 12 where said magnet contacts said second target element.
Claim 15
Dependent Claim
22 words
Apparatus as in claim 12 where said magnet has a layer of thermally conductive material disposed thereon to facilitate removal of heat.
Claim 16
Dependent Claim
36 words
Apparatus as in claims 10 or 11 where a joint is provided in the lower target element adjacent the gap to facilitate removal of the lower element from the apparatus without moving the upper target element.
Claim 17
Dependent Claim
56 words
Apparatus as in claim 3 where said first target element comprises a plate, said solid, oriented crystal ferrite magnet is disposed on said plate, and said second target element comprises a cap disposed on the magnet, said gap extending between the outer, lower periphery of the cap and exposed portion of the plate adjacent the magnet.
Claim 18
Dependent Claim
40 words
Apparatus as in claim 2 where said solid, oriented crystal ferrite magnet has an elongated configuration and is lengthwise disposed on the surface of the target where the flux direction in the magnet is substantially perpendicular to the target surface.
Claim 19
Dependent Claim
26 words
Apparatus as in claim 17 where said target is a plate of symmetrical configuration and said magnet is a bar magnet centrally disposed on said plate.
Claim 20
Dependent Claim
34 words
Apparatus as in claim 17 including a plurality of said magnets of elongated configuration where each magnet is lengthwise disposed on the target and the flux therein is substantially perpendicular to the target surface.
Claim 21
Dependent Claim
33 words
Apparatus as in claim 19 including three of said magnets disposed in parallel on said target where the flux in the outer two magnets is oppositely directed to that in the inner magnet.
Claim 22
Dependent Claim
22 words
Apparatus as in claim 2 where said target has an opening and said solid, oriented crystal ferrite magnet extends through said opening.
Claim 23
Dependent Claim
22 words
Apparatus as in claim 2 where the upper surface of said magnet is substantially parallel to the upper surface of the target.
Claim 24
Dependent Claim
32 words
Apparatus as in claims 17, 19, or 21 including coupling means disposed adjacent the lower surface of the target for coupling the magnetic field back to said solid, oriented crystal ferrite magnet.
Claim 25
Dependent Claim
17 words
Apparatus as in claim 23 where said coupling means includes a further solid, oriented crystal ferrite magnet.
Claim 26
Dependent Claim
13 words
Apparatus as in claim 23 where said coupling means includes a permeable coupler.
Claim 27
Dependent Claim
23 words
Apparatus as in claim 1 where said target includes a plurality of target elements spaced from one another by a plurality of gaps.
Claim 28
Dependent Claim
32 words
Apparatus as in claim 1 were said magnetic field source includes a flexible source comprising a stack of overlapping strips where each strip comprises an oriented ferrite impregnated in a flexible binder.
Claim 29
Dependent Claim
79 words
Apparatus as in claim 27 including first and second solid, oriented crystal ferrite magnets disposed beneath the target respectively at the edge and central portions thereof where the fluxes in said first and second magnets are oppositely directed and are both perpendicular to the lower surface of the target and where said flexible source is disposed between said first and second magnets, the flux in said flexible source being substantially perpendicular to that in said first and second sources.
Claim 30
Dependent Claim
16 words
Apparatus as in claims 27 or 28 where said target consists of an essentially non-permeable material.
Claim 31
Dependent Claim
18 words
Apparatus as in claim 29 where the width of said target is no greater than about 31/2 inches.
Claim 32
Dependent Claim
17 words
Apparatus as in claims 27 or 28 where said target consists essentially of a magnetically permeable material.
Claim 33
Dependent Claim
28 words
Apparatus as in claim 1 where said target consists of an essentially magnetically permeable material and the width of said target is no greater than about 11/2 inches.
Claim 34
Dependent Claim
67 words
Sputtering apparatus comprising a target of material to be sputtered where said target consists essentially of a magnetically permeable material, said target including at least first and second elements spaced from one another by a gap; an anode; means for generating an electric field between the anode and target; and means for generating a magnetic field to confine at least some of said plasma adjacent the target.
Claim 35
Dependent Claim
67 words
Sputtering apparatus comprising a target of material to be sputtered where said target consists essentially of a magnetically permeable material, said target including at least first and second elements spaced from one another by a gap; an anode; means for generating an electric field between the anode and target; and means for generating a magnetic field to confine at least some of said plasma adjacent the target.
Claim 36
Dependent Claim
31 words
Apparatus as in claim 33 where said means for generating the magnetic field includes a magnet, the flux density of which is at least about 1000 gauss adjacent a pole thereof.
Claim 37
Dependent Claim
15 words
Apparatus as in claim 34 where said magnet is a solid, oriented crystal ferrite magnet.
Claim 38
Dependent Claim
12 words
Apparatus as in claim 34 where said magnet is an alnico magnet.
Claim 39
Dependent Claim
11 words
Apparatus as in claim 34 where said magnet is an electromagnet.
Claim 40
Dependent Claim
33 words
Apparatus as in claims 33 or 34 where said first target element is annular and the second target element is disposed at least adjacent the open portion of the annular first target element.
Claim 41
Dependent Claim
18 words
Apparatus as in claim 38 where said first and second target elements are disposed in different, parallel planes.
Claim 42
Dependent Claim
33 words
Apparatus as in claim 39 where the gap between said first and second elements extends between the inner, lower periphery of said first element and the outer, upper periphery of the second element.
Claim 43
Dependent Claim
33 words
Apparatus as in claim 39 where the gap between said first and second elements extends between the outer, lower periphery of the second element and the inner, upper periphery of the first element.
Claim 44
Dependent Claim
22 words
Apparatus as in claim 41 where said solid, oriented crystal magnet extends through the open portion of the annular first target element.
Claim 45
Dependent Claim
13 words
Apparatus as in claim 42 where said magnet contacts said second target element.
Claim 46
Dependent Claim
22 words
Apparatus as in claim 43 where said magnet has a layer of thermally conductive material disposed thereon to facilitate removal of heat.
Claim 47
Dependent Claim
34 words
Apparatus as in claim 40 where a joint is provided in the lower target element adjacent the gap to facilitate removal of the lower element from the apparatus without moving the upper target element.
Claim 48
Dependent Claim
34 words
Apparatus as in claim 41 where a joint is provided in the lower target element adjacent the gap to facilitate removal of the lower element from the apparatus without moving the upper target element.
Claim 49
Dependent Claim
54 words
Apparatus as in claims 33 or 34 where said first target element comprises a plate, said magnet is disposed on said plate, and said second target element comprises a cap disposed on the magnet, said gap extending between the outer, lower periphery of the cap and exposed portion of the plate adjacent the magnet.
Claim 50
Dependent Claim
25 words
Apparatus as in claims 33 or 34 where said target includes a plurality of target elements spaced from one another by a plurality of gaps.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-13 | 1987-08-15 | 1988-02-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-13 | 1991-08-15 | 1992-02-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-13 | 1995-08-15 | 1996-02-14 | $7700.00 | Window Closed / Lapsed |