US4356073A — Magnetron cathode sputtering apparatus

Claim 1

Independent Claim 123 words

A method of sputtering thin films of a selected coating material upon substantially planar substrates, in which there is provided an evacuated coating chamber enclosing an elongated, cylindrical tubular member having a layer of the coating material to be sputtered applied to the outer surface thereof, establishing within said tubular member a magnetic field to provide an erosion zone on the coating material extending substantially the entire length of the tubular member and circumferentially along a relatively narrow region thereof, rotating said tubular member about its longitudinal axis to bring different portions of the coating material into sputtering position opposite the magnetic field, and moving the substantially planar substrates horizontally beneath said erosion zone in a linear path to receive the sputtered material.

Claim 2

Independent Claim 123 words

A method of sputtering thin films of a selected coating material upon substantially planar substrates, in which there is provided an evacuated coating chamber enclosing an elongated, cylindrical tubular member having a layer of the coating material to be sputtered applied to the outer surface thereof, establishing within said tubular member a magnetic field to provide an erosion zone on the coating material extending substantially the entire length of the tubular member and circumferentially along a relatively narrow region thereof, rotating said tubular member about its longitudinal axis to bring different portions of the coating material into sputtering position opposite the magnetic field, and moving the substantially planar substrates horizontally beneath said erosion zone in a linear path to receive the sputtered material.

Claim 3

Dependent Claim 138 words

In apparatus for sputtering thin films of a selected coating material upon substantially planar substrates, an evacuable coating chamber, a cathode mounted horizontally in said coating chamber comprising an elongated, cylindrical tubular member having a layer of the coating material to be sputtered applied to the outer surface thereof, magnetic means located in said tubular member for providing a sputter zone extending substantially the entire length of the tubular member and circumferentially along a relatively narrow region thereof, means for rotating said tubular member about its longitudinal axis to bring different portions of the coating material into sputtering position opposite said magnetic means and within said sputter zone, and means in the coating chamber for supporting the substantially planar substrates horizontally and for transporting them in a linear path beneath the magnetic means to receive the sputtered material.

Claim 4

Dependent Claim 138 words

In apparatus for sputtering thin films of a selected coating material upon substantially planar substrates, an evacuable coating chamber, a cathode mounted horizontally in said coating chamber comprising an elongated, cylindrical tubular member having a layer of the coating material to be sputtered applied to the outer surface thereof, magnetic means located in said tubular member for providing a sputter zone extending substantially the entire length of the tubular member and circumferentially along a relatively narrow region thereof, means for rotating said tubular member about its longitudinal axis to bring different portions of the coating material into sputtering position opposite said magnetic means and within said sputter zone, and means in the coating chamber for supporting the substantially planar substrates horizontally and for transporting them in a linear path beneath the magnetic means to receive the sputtered material.

Claim 5

Dependent Claim 29 words

Apparatus as claimed in claim 2, in which said magnetic means comprises an array of individual permanent magnets arranged in at least one row extending lengthwise of said tube.

Claim 6

Dependent Claim 43 words

Apparatus as claimed in claim 3, in which said magnets are substantially U-shaped permanent magnets and including magnetic strips extending longitudinally in said tube and engaged by the legs of the U-shaped magnets, and means for securing said magnets to said magnetic strips.

Claim 7

Dependent Claim 43 words

Apparatus as claimed in claim 4, in which the magnetic strips are arranged in face-to-face relation with the tube, and in which the surfaces of said magnetic strips facing the tube are shaped to conform to the curvature of the inner surface thereof.

Claim 8

Dependent Claim 53 words

Apparatus as claimed in claim 4, including a conduit extending longitudinally within said tube for receiving a cooling liquid in one end and for discharging it through openings therein into said tube from which it exits through an opening at one end thereof, and in which said magnets are secured to said conduit.

Claim 9

Dependent Claim 43 words

Apparatus as claimed in claim 6, in which said magnetic strips are arranged in face-to-face relation with the tube, and in which the surfaces of said magnetic strips facing said tube are shaped to conform to the curvature of the inner surface thereof.

Claim 10

Dependent Claim 31 words

Apparatus as claimed in claim 4, in which the magnets are arranged in two parallel rows, with the magnets in the two rows being arranged alternately with and overlapping one another.

Claim 11

Dependent Claim 69 words

Apparatus as claimed in claim 4, in which the U-shaped magnets are arranged in two parallel rows, with the magnets in the two rows being alternately arranged with and overlapping one another, in which the magnetic strips are arranged in face-to-face relation with the tube, and in which the surfaces of the said strips facing the tube are shaped to conform to the curvature of the inner surface thereof.

Claim 12

Dependent Claim 71 words

Apparatus as claimed in claim 9, including a conduit extending longitudinally within said tube for receiving a cooling liquid in one end thereof and for discharging it through openings therein into said tube from which it exits through an opening at one end thereof, in which said magnets are secured to said conduit, and including means for turning said conduit about its longitudinal to move the magnets relative to said tube.

Claim 13

Dependent Claim 57 words

Apparatus as claimed in claim 2, in which said tube is closed at one end and open at its opposite end, and including a conduit extending longitudinally within said tube for receiving a cooling liquid in one end and for discharging it through openings therein into said tube from which it exits through the open end thereof.

Claim 14

Dependent Claim 34 words

Apparatus as claimed in claim 11, in which said conduit is rotatable about its longitudinal axis relative to said tube, and in which said magnetic means is secured to said conduit for movement therewith.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1985-10-25	1986-04-26	1986-10-26	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1989-10-25	1990-04-26	1990-10-26	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1993-10-25	1994-04-26	1994-10-26	$7700.00	Window Closed / Lapsed

Magnetron cathode sputtering apparatus

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