US4394245A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering apparatus
Assignee: Hitachi Ltd
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Filing: 1982-02-08
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Granted: 1983-07-19
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Expires: 2002-02-08
Abstract
Abstract Herein disclosed is a sputtering apparatus in which a substrate electrode has its electrode surface plate made of a soft magnetic material. The thickness distribution of the film deposited is made uniform by the use of the sputtering apparatus.
Inventors
- 👤 Yoshio Homma
- 👤 Sukeyoshi Tsunekawa
- 👤 Hiroshi Morisaki
- 👤 Seiki Harada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 06:15
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32532; H01J37/3255; H01J37/34; H01J37/3402; H01J37/3405; H01J37/3408
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
62 words
A sputtering apparatus comprising at least one cathode and at least one substrate electrode facing the cathode and having an electrode surface plate, the improvement wherein the electrode surface plate of said at least one substrate electrode facing said cathode has at least a portion thereof that is made of a soft magnetic material having an initial permeability of at least 100.
Claim 2
Dependent Claim
62 words
A sputtering apparatus comprising at least one cathode and at least one substrate electrode facing the cathode and having an electrode surface plate, the improvement wherein the electrode surface plate of said at least one substrate electrode facing said cathode has at least a portion thereof that is made of a soft magnetic material having an initial permeability of at least 100.
Claim 3
Dependent Claim
20 words
A sputtering apparatus as set forth in claim 1, wherein said cathode is the planar magnetron high rate type cathode.
Claim 4
Dependent Claim
28 words
A sputtering apparatus as set forth in claim 2, wherein at least 20% of the area of said electrode surface plate is made of said soft magnetic material.
Claim 5
Dependent Claim
25 words
A sputtering apparatus as set forth in claim 2, wherein the entire area of said electrode surface plate is made of said soft magnetic material.
Claim 6
Dependent Claim
36 words
A sputtering apparatus as set forth in claim 2, wherein said at least a portion of said electrode surface plate that is made of said soft magnetic material has a surface covered with a non-magnetic material.
Claim 7
Dependent Claim
42 words
A sputtering apparatus as set forth in claim 2, wherein said at least a portion of said electrode surface place that is made of a soft magnetic material covers a portion of said electrode surface plate that is made of non-magnetic material.
Claim 8
Dependent Claim
38 words
A sputtering apparatus as set forth in claim 2, wherein said electrode surface plate has its center portion made of a non-magnetic material having a high heat conductivity and its peripheral portion made of said soft magnetic material.
Claim 9
Dependent Claim
24 words
A sputtering apparatus as set forth in claim 1, wherein said substrate electrode is connected through a power divider with a high-frequency power source.
Claim 10
Dependent Claim
36 words
A sputtering apparatus as set forth in claim 1, wherein said at least a portion of said electrode surface plate that is made of said soft magnetic material has a thickness of at least 1 μm.
Claim 11
Dependent Claim
22 words
A sputtering apparatus as set forth in claim 1, wherein said soft magnetic material is comprised of iron or an iron alloy.
Claim 12
Dependent Claim
30 words
A sputtering apparatus as set forth in claim 1, wherein the entire electrode surface plate is made from the soft magnetic material having an initial permeability of at least 100.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-07-18 | 1987-01-17 | 1987-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-07-18 | 1991-01-17 | 1991-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-07-18 | 1995-01-17 | 1995-07-19 | $7700.00 | Window Closed / Lapsed |