Patent US6143276A successfully refreshed from Google Patents.
US3878085A
Expired / Lapsed
US
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Cathode sputtering apparatus
Assignee: Sloan Technology Corp
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Filing: 1973-07-05
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Granted: 1975-04-15
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Expires: 1993-07-05
Abstract
Abstract Cathode sputtering apparatus for operation within an evacuable enclosure for coating a substrate which is also contained within the enclosure. The apparatus includes a cathode which carries a face of material to be sputtered. Magnetic means is placed adjacent to the cathode at a side thereof opposite from the face, and the magnetic means includes a pair of magnetic poles, between which there are developed magnetic lines of force. At least some of these lines of force enter and leave the face at spaced-apart intersections therewith and include segments which extend between the intersections and are spaced from the face whereby to form a boundary, along with the face, of a closed area in the plane of the respective lines of force. An anode is placed in proximity to the cathode. Connector means is provided to connect the cathode and anode to a source of electrical potential. Preferably, at least one of the magnetic poles is elongated and generally aligned with the face so as to generate a magnetic field wherein closed areas are continuously and contiguously formed over a substantial distance along the face whereby to form a tunnel-like path within which charged particles tend to be retained, and along which they tend to move. Preferably, this tunnel-like path is closed upon itself to form a continuous path without beginning or end.
Inventors
- 👤 John F Corbani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:41
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
175 words
Cathode sputtering apparatus for operation within an evacuable enclosure, for coating a substrate which is also contained within said enclosure, said apparatus comprising: a cathode having a face of material to be sputtered; magnetic means adjacent to the cathode and at a side thereof opposite from the face, said magnetic means including a pair of magentic poles, at least one of which is elongated, and between which there are developed magnetic lines of force, at least some of said lines of force entering and leaving said face at spaced-apart intersections therewith, and including continuously arched segments extending between said intersections which are spaced from the face, said face together with said lines of force forming a boundary of a closed area in the plane of each of the respective lines of force, a tunnel-like path within which charged particles tend to be retained, and along which they tend to move; an anode in proximity to the cathode; and connector means whereby said cathode and said anode can be connected to a source of electrical potential.
Claim 2
Dependent Claim
175 words
Cathode sputtering apparatus for operation within an evacuable enclosure, for coating a substrate which is also contained within said enclosure, said apparatus comprising: a cathode having a face of material to be sputtered; magnetic means adjacent to the cathode and at a side thereof opposite from the face, said magnetic means including a pair of magentic poles, at least one of which is elongated, and between which there are developed magnetic lines of force, at least some of said lines of force entering and leaving said face at spaced-apart intersections therewith, and including continuously arched segments extending between said intersections which are spaced from the face, said face together with said lines of force forming a boundary of a closed area in the plane of each of the respective lines of force, a tunnel-like path within which charged particles tend to be retained, and along which they tend to move; an anode in proximity to the cathode; and connector means whereby said cathode and said anode can be connected to a source of electrical potential.
Claim 3
Dependent Claim
26 words
Cathode sputtering apparatus according to claim 1 in which the tunnel-like path is closed on itself, whereby to form a continuous path without beginning or end.
Claim 4
Dependent Claim
20 words
Cathode sputtering apparatus according to claim 2 in which the face opens in a direction generally opposite from said side.
Claim 5
Dependent Claim
15 words
Cathode sputtering apparatus according to claim 3 in which the path is a closed loop.
Claim 6
Dependent Claim
15 words
Cathode sputtering apparatus to claim 4 in which the path includes straight and curved portions.
Claim 7
Dependent Claim
13 words
Cathode sputtering apparatus according to claim 4 in which the path is circular.
Claim 8
Dependent Claim
15 words
Cathode sputtering apparatus according to claim 4 in which the path lies on a plane.
Claim 9
Dependent Claim
16 words
Cathode sputtering apparatus according to claim 4 in which the path lies on a curved surface.
Claim 10
Dependent Claim
18 words
Cathode sputtering apparatus according to claim 2 in which the magnetic means is formed as a closed loop.
Claim 11
Dependent Claim
41 words
Cathode sputtering apparatus according to claim 9 in which the magnetic means includes a central pole piece, a peripheral pole piece, and a magnet extending between them, the cathode lying adjacent to the pole pieces whereby to form said closed path.
Claim 12
Dependent Claim
28 words
Cathode sputtering apparatus according to claim 10 in which the peripheral pole piece is closed by a bight section to suppress a magnetic field except at the cathode.
Claim 13
Dependent Claim
26 words
Cathode sputtering apparatus according to claim 2 in which the face comprises a curved surface with a central axis which it and the magnetic means surround.
Claim 14
Dependent Claim
16 words
Cathode sputtering apparatus according to claim 1 in which the magnetic means comprises a permanent magnet.
Claim 15
Dependent Claim
53 words
Cathode sputtering apparatus according to claim 13 in which the magnetic means includes a pair of magnetizable pole pieces placed adjacent to the magnet and forming said magnetic poles, and disposed adjacent to the said side of the cathode, whereby the said magnetic lines of forces are principally directed through the said cathode.
Claim 16
Dependent Claim
31 words
Cathode sputtering apparatus according to claim 14 in which a cathode is disposed between and is embraced by said pole pieces, and which supports said cathode in surface-to-surface contiguous contact therewith.
Claim 17
Dependent Claim
18 words
Cathode sputtering apparatus according to claim 15 in which cooling means is provided to cool said cathode support.
Claim 18
Dependent Claim
19 words
Cathode sputtering apparatus according to claim 14 in which the magnetizable pole pieces abut said side of the cathode.
Claim 19
Dependent Claim
32 words
Cathode sputtering apparatus according to claim 14 in which the magnetic pole pieces are continuously joined to one another at their sides on the opposite side of the magnet from the cathode.
Claim 20
Dependent Claim
28 words
Cathode sputtering apparatus according to claim 14 in which the magnetizable pole pieces are spaced from said side of the cathode whereby to leave an air gap therebetween.
Claim 21
Dependent Claim
26 words
Cathode sputtering apparatus according to claim 1 in which the magnetic means comprises an electromagnet adapted to be energized to generate said magnetic lines of force.
Claim 22
Dependent Claim
53 words
Cathode sputtering apparatus according to claim 20 in which the magnetic means includes a pair of magnetizable pole pieces placed adjacent to the magnet and forming said magnetic poles, and disposed adjacent to the said side of the cathode, whereby the said magnetic lines of force are principally directed through the said cathode.
Claim 23
Dependent Claim
19 words
Cathode sputtering apparatus according to claim 21 in which the magnetizable pole pieces abut said side of the cathode.
Claim 24
Dependent Claim
28 words
Cathode sputtering apparatus according to claim 21 in which the magnetizable pole pieces are spaced from said side of the cathode whereby to leave an air gap therebetween.
Claim 25
Dependent Claim
32 words
Cathode sputtering apparatus according to claim 21 in which the magnetic pole pieces are continuously joined to one another at their sides on the opposite side of the magnet from the cathode.
Claim 26
Dependent Claim
14 words
Cathode sputtering apparatus according to claim 1 wherein said face comprises a curved surface.
Claim 27
Dependent Claim
22 words
Cathode sputtering apparatus according to claim 25 in which the face has a central axis which it and the magnetic means surround.
Claim 28
Dependent Claim
15 words
Cathode sputtering apparatus according to claim 26 in which the face is a circular cylinder.
Claim 29
Dependent Claim
14 words
Cathode sputtering apparatus according to claim 25 in which the curved surface is concave.
Claim 30
Dependent Claim
14 words
Cathode sputtering apparatus according to claim 25 in which the curved surface is convex.
Claim 31
Dependent Claim
21 words
Cathode sputtering apparatus according to claim 1 in which a conductive cathode support supports said cathode in surface-to-surface contiguous contact therewith.
Claim 32
Dependent Claim
46 words
Cathode sputtering apparatus according to claiM 30 in which the cathode support forms a recess, and in which the cathode closely fits in said recess, whereby when the cathode temperature increases and the cathode expands, the cathode is pressed into firm contact with the cathode support.
Claim 33
Dependent Claim
46 words
Cathode sputtering apparatus according to claim 30 in which said cathode support includes abutment means adapted to engage a pair of opposite edges of said cathode, whereby when the cathode temperature increases and the cathode expands, the cathode is pressed into firm contact with the support.
Claim 34
Dependent Claim
52 words
Cathode sputtering apparatus according to claim 1 in which the face comprises a curved surface on which one and only one straight line can be drawn through each and every point thereon, said lines being normal to the plane of the closed area, all of said lines being parallel to one another.
Claim 35
Dependent Claim
21 words
Cathode sputtering apparatus according to claim 1 in which the face opens in a direction generally opposite from the said side.
Claim 36
Dependent Claim
13 words
Cathode sputtering apparatus according to claim 1 in which the face is planar.
Claim 37
Dependent Claim
27 words
In combination: an evacuable enclosure; means for evacuating said closure; a substrate support in said enclosure; and cathode sputtering apparatus according to claim 1 in said enclosure.
Claim 38
Dependent Claim
25 words
A combination according to claim 36 in which the tunnel-like path is closed on itself, whereby to form a continuous path without beginning or end.
References Cited (Backward Citations)
US3616450A
Cited
US3711398A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-04-14 | 1978-10-14 | 1979-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-04-14 | 1982-10-14 | 1983-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-04-14 | 1986-10-14 | 1987-04-15 | $7700.00 | Window Closed / Lapsed |