US4198283A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetron sputtering target and cathode assembly
Assignee: Tokyo Electron Ltd
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Filing: 1978-11-06
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Granted: 1980-04-15
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Expires: 1998-11-06
Abstract
Abstract A magnetron cathode assembly for use in a cathode sputtering apparatus includes a support means for a rectangular frame-like annular target and spaced apart inner and outer pole pieces fastened to the support member and providing a rectangular annular channel for mounting the target in electrically and thermally conductive contact with the support means. Preferably, the target is a set of four straight bars shaped at the ends to assemble together as a rectangular frame. Target bars having a symmetrical hourglass cross section with overhanging flanged side portions adjacent to front and rear faces are adapted to be reversibly clamped to the support means by the inner and outer poles for simple and rapid replacement in the field, said hourglass shape providing maximum utilization of target material.
Inventors
- 👤 Walter H. Class
- 👤 George J. Unterkofler
- 👤 Steven D. Hurwitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3423; H01J37/3402; H01J37/3405; H01J37/3408; H01J37/3435
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
224 words
A cathode assembly for use in a magnetron sputtering apparatus having an evacuable chamber, the cathode assembly being adapted to be mounted in the chamber and including a sputtering target, a support means for the sputtering target, means for mounting the sputtering target in electrically and thermally conductive contact with the support means, and magnetic means positioned in the vicinity of the target for providing an arched, closed-loop magnetic field over a sputtering surface of the target, the improvement wherein the sputtering target comprises: a set of four straight bars composed at least partly of material to be sputter-deposited onto substrates, the set containing a pair of side bars and a pair of end bars, each side bar and each end bar having an inner side, an outer side, a front face, a rear face, and two ends, the four bars of the set being shaped at the ends so that the bars can be assembled as a rectangular frame with the inner sides of each pair of bars facing each other and with the front faces of the four bars providing a rectangular annular sputtering surface, the thus assembled set of target bars being adapted to be held by said mounting means with the rear faces of said bars in electrically and thermally conductive contact with the support means of said cathode assembly.
Claim 2
Dependent Claim
224 words
A cathode assembly for use in a magnetron sputtering apparatus having an evacuable chamber, the cathode assembly being adapted to be mounted in the chamber and including a sputtering target, a support means for the sputtering target, means for mounting the sputtering target in electrically and thermally conductive contact with the support means, and magnetic means positioned in the vicinity of the target for providing an arched, closed-loop magnetic field over a sputtering surface of the target, the improvement wherein the sputtering target comprises: a set of four straight bars composed at least partly of material to be sputter-deposited onto substrates, the set containing a pair of side bars and a pair of end bars, each side bar and each end bar having an inner side, an outer side, a front face, a rear face, and two ends, the four bars of the set being shaped at the ends so that the bars can be assembled as a rectangular frame with the inner sides of each pair of bars facing each other and with the front faces of the four bars providing a rectangular annular sputtering surface, the thus assembled set of target bars being adapted to be held by said mounting means with the rear faces of said bars in electrically and thermally conductive contact with the support means of said cathode assembly.
Claim 3
Dependent Claim
16 words
A cathode assembly according to claim 1 wherein each target bar has a constant cross section.
Claim 4
Dependent Claim
17 words
A cathode assembly according to claim 2 wherein all of the target bars have identical cross sections.
Claim 5
Dependent Claim
21 words
A cathode assembly according to claim 1 wherein the target side bars are identical, and the target end bars are identical.
Claim 6
Dependent Claim
38 words
A cathode assembly according to claim 1 wherein the four target bars have rectangular cross sections and are adapted to be held by frictional engagement between said mounting means and the inner and outer sides of said bars.
Claim 7
Dependent Claim
31 words
A cathode assembly according to claim 1 or 5 wherein the ends of said side bars and end bars are mitered to permit assembly of said bars as a rectangular frame.
Claim 8
Dependent Claim
32 words
A cathode assembly according to claim 1 or 5 wherein at least the side target bars are provided with overhanging flanged portions forming lateral extensions of the front faces of said bars.
Claim 9
Dependent Claim
27 words
A cathode assembly according to claim 1 wherein the cross sections of the target bars are symmetrical about a plane midway between said front and rear faces.
Claim 10
Dependent Claim
38 words
A cathode assembly according to claim 1 wherein the cross sections of the target bars are symmetrical about both a plane midway between said front and rear faces and a plane midway between said inner and outer sides.
Claim 11
Dependent Claim
149 words
A sputtering target for a magnetron sputtering apparatus, the target comprising: a set of four straight bars composed at least partly of material to be sputter-deposited onto substrates, the set containing a pair of side bars and a pair of end bars, each side bar and each end bar having an inner side, an outer side, a front face, a rear face, and two ends, the four bars of the set each having a centrally positioned longitudinal groove in the front face thereof and being shaped at the ends so that the bars can be assembled as a rectangular frame with the inner sides of each pair of bars facing each other and with the front faces of the four bars providing a rectangular annular sputtering surface, and at least the side target bars being provided with flanged portions forming lateral extensions of the front faces of said bars.
Claim 12
Dependent Claim
149 words
A sputtering target for a magnetron sputtering apparatus, the target comprising: a set of four straight bars composed at least partly of material to be sputter-deposited onto substrates, the set containing a pair of side bars and a pair of end bars, each side bar and each end bar having an inner side, an outer side, a front face, a rear face, and two ends, the four bars of the set each having a centrally positioned longitudinal groove in the front face thereof and being shaped at the ends so that the bars can be assembled as a rectangular frame with the inner sides of each pair of bars facing each other and with the front faces of the four bars providing a rectangular annular sputtering surface, and at least the side target bars being provided with flanged portions forming lateral extensions of the front faces of said bars.
Claim 13
Dependent Claim
40 words
A sputtering target according to claim 10 wherein each target bar comprises a front portion and a rear portion, the front portion being composed of a material to be sputter-deposited on the rear portion being composed of a base metal.
Claim 14
Dependent Claim
16 words
A sputtering target according to claim 10 wherein the longitudinal groove has a V-shaped cross section.
Claim 15
Dependent Claim
16 words
A sputter target according to claim 10 wherein the longitudinal groove has a rectangular cross section.
Claim 16
Dependent Claim
138 words
A sputtering target for a magnetron sputtering apparatus, the target comprising a set of four straight bars composed at least partly of material to be sputter-deposited onto substrates, the set containing a pair of side bars and a pair of end bars, each side bar and each end bar having an inner side, an outer side, a front face, a rear face, and two ends, the four bars of the set being shaped at the ends so that the bars can be assembled as a rectangular frame with the inner sides of each pair of bars facing each other and with the front faces of the four bars providing a rectangular annular sputtering surface, and wherein each target bar has an hourglass cross section and is provided with overhanging flanged portions adjacent both the front and rear faces.
Claim 17
Dependent Claim
138 words
A sputtering target for a magnetron sputtering apparatus, the target comprising a set of four straight bars composed at least partly of material to be sputter-deposited onto substrates, the set containing a pair of side bars and a pair of end bars, each side bar and each end bar having an inner side, an outer side, a front face, a rear face, and two ends, the four bars of the set being shaped at the ends so that the bars can be assembled as a rectangular frame with the inner sides of each pair of bars facing each other and with the front faces of the four bars providing a rectangular annular sputtering surface, and wherein each target bar has an hourglass cross section and is provided with overhanging flanged portions adjacent both the front and rear faces.
Claim 18
Dependent Claim
53 words
A sputtering target according to claim 14 wherein a midplane between the front and rear faces of each target bar divides the bar into a front portion and a rear portion, the front portion being composed of a material to be sputter-deposited, and the rear portion being composed of a non-sputtered base material.
Claim 19
Dependent Claim
44 words
A sputtering target according to claim 14 wherein the ends of one pair of said set of target bars are profiled to fit against the inner sides of the other pair of said set to permit assembly of said bars as a rectangular frame.
Claim 20
Dependent Claim
143 words
A cathode assembly for use in a magnetron sputtering apparatus having an evacuable chamber, the cathode assembly being adapted to be mounted in the chamber and including a sputtering target, a support means for the sputtering target, means for mounting the sputtering target in electrically and thermally conductive contact with the support means, and magnetic means positioned in the vicinity of the mounting means for providing an arched closed-loop magnetic field over the sputtering surface of the target, wherein the improvement comprises: said sputtering target being in the form of a rectangular annular frame and said mounting means including a magnetically permeable rectangular, frame-like, annular outer pole means fastened to the support means and an inner pole means having sides spaced from the opposing inner sides of the frame-like outer pole means to provide a rectangular annular channel for receiving said sputtering target.
Claim 21
Dependent Claim
143 words
A cathode assembly for use in a magnetron sputtering apparatus having an evacuable chamber, the cathode assembly being adapted to be mounted in the chamber and including a sputtering target, a support means for the sputtering target, means for mounting the sputtering target in electrically and thermally conductive contact with the support means, and magnetic means positioned in the vicinity of the mounting means for providing an arched closed-loop magnetic field over the sputtering surface of the target, wherein the improvement comprises: said sputtering target being in the form of a rectangular annular frame and said mounting means including a magnetically permeable rectangular, frame-like, annular outer pole means fastened to the support means and an inner pole means having sides spaced from the opposing inner sides of the frame-like outer pole means to provide a rectangular annular channel for receiving said sputtering target.
Claim 22
Dependent Claim
60 words
A cathode assembly according to claim 17 wherein said sputtering target has a rear face making electrically and thermally conductive contact with said support means, a front face forming a rectangular annular sputtering surface, and inner and outer sides, said inner and outer pole means engaging said inner and outer sides, respectively, for holding the target in the cathode assembly.
Claim 23
Dependent Claim
25 words
A cathode assembly according to claim 18 wherein the inner and outer pole means frictionally engage the respective inner and outer sides of the target.
Claim 24
Dependent Claim
34 words
A cathode assembly according to claim 19 wherein the inner pole means comprises two members and means for urging the two members apart into frictional engagement with the opposed inner sides of the target.
Claim 25
Dependent Claim
29 words
A cathode assembly according to claim 20 wherein the means for urging apart the two members of the inner pole means comprises spring means positioned between the two members.
Claim 26
Dependent Claim
34 words
A cathode assembly according to claim 20 wherein the means for urging apart the two members of the inner pole means comprises screw means threadably engaged in at least one of said two members.
Claim 27
Dependent Claim
49 words
A cathode assembly according to claim 17 wherein the outer poles means comprises a pair of parallel, spaced apart, side pole members, a pair of parallel, spaced apart, end pole members, and mounting bolts for detachably fastening the side pole members and end pole members to the support means.
Claim 28
Dependent Claim
65 words
A cathode assembly according to claim 23 wherein said side pole members include means on the inward facing sides thereof spaced from the support means and adapted to bear against overhanging flanged portions extending laterally from the opposing sides of a target mounted in the annular channel for clamping the rear face of the target into electrically and thermally conductive contact with the support means.
Claim 29
Dependent Claim
24 words
A cathode assembly according to claim 24 wherein said clamping means comprises nonmagnetic members mounted on the inward facing sides of side pole members.
Claim 30
Dependent Claim
30 words
A cathode assembly according to claim 17 wherein the front outer edge of said outer pole means is bevelled, thereby concentrated the arched magnetic field adjacent to the annular channel.
References Cited (Backward Citations)
US4100055A
Cited
US4116806A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-04-15 | 1983-10-15 | 1984-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-04-15 | 1987-10-15 | 1988-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-04-15 | 1991-10-15 | 1992-04-15 | $7700.00 | Window Closed / Lapsed |