US8134685B2
Active / In Force
US
⏱️ 1.4 years remaining
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Assignee: Nikon Corp
•
Filing: 2008-03-17
•
Granted: 2012-03-13
•
Expires: 2028-03-17
Abstract
Abstract A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap interposed therebetween. The liquid recovery system recovers the liquid on a movable object that opposes the first surface of the plate via the liquid recovery part.
Inventors
- 👤 Yasufumi Nishii
- 👤 Hiroyuki Nagasaka
- 👤 Takeshi Okuyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/70; G03F7/70216; G03F7/70341; G03F7/2041; H; H10; H10P; H10P76/00
Claims Analysis
Total Claims: 70
Claim 1
Independent Claim
155 words
A liquid recovery system that is used in an immersion exposure apparatus, comprising: a first surface and a second surface on the side opposite the first surface, an object opposing the first surface being moved relative to the first surface below the first surface; a liquid recovery part, at least a part of which opposes the second surface with a first gap interposed therebetween, gas being prevented from being recovered from the liquid recovery part; a first opening which is connected with the first gap and through which liquid on the object flows into the first gap, the liquid in the gap being recovered via the liquid recovery part; and a second opening different from the first opening, through which gas flows from the first gap, the second opening being located higher than the liquid recovery part and the second opening being located such that the liquid is prevented from flowing to the second opening.
Claim 2
Dependent Claim
155 words
A liquid recovery system that is used in an immersion exposure apparatus, comprising: a first surface and a second surface on the side opposite the first surface, an object opposing the first surface being moved relative to the first surface below the first surface; a liquid recovery part, at least a part of which opposes the second surface with a first gap interposed therebetween, gas being prevented from being recovered from the liquid recovery part; a first opening which is connected with the first gap and through which liquid on the object flows into the first gap, the liquid in the gap being recovered via the liquid recovery part; and a second opening different from the first opening, through which gas flows from the first gap, the second opening being located higher than the liquid recovery part and the second opening being located such that the liquid is prevented from flowing to the second opening.
Claim 3
Dependent Claim
35 words
A liquid recovery system according to claim 1 , wherein the liquid recovery part comprises a recovery region that is capable of recovering the liquid and that has a larger area than the second surface.
Claim 4
Dependent Claim
37 words
A liquid recovery system according to claim 1 , wherein the liquid recovery part comprises a porous member; and at least a part of the liquid that contacts the porous member is recovered via the porous member.
Claim 5
Dependent Claim
19 words
A liquid recovery system according to claim 3 , wherein the porous member prevents the gas from passing therethrough.
Claim 6
Dependent Claim
21 words
A liquid recovery system according to claim 1 , wherein gas being prevented from being recovered from the liquid recovery part.
Claim 7
Dependent Claim
22 words
A liquid recovery system according to claim 1 , wherein, the first gap is open to the atmosphere via the second opening.
Claim 8
Dependent Claim
31 words
A liquid recovery system according to claim 1 , wherein a distance between the second opening and the object is larger than a distance between the first opening and the object.
Claim 9
Dependent Claim
18 words
A liquid recovery system according to claim 1 , wherein the second opening does not face the object.
Claim 10
Dependent Claim
27 words
A liquid recovery system according to claim 1 , wherein the first opening is provided between an edge of the first surface and the liquid recovery part.
Claim 11
Dependent Claim
39 words
A liquid recovery system according to claim 1 , further comprising: a third opening; wherein, the liquid on the object that opposes the third opening can flow from the third opening into the first gap via the first opening.
Claim 12
Dependent Claim
47 words
A liquid recovery system according to claim 10 , comprising: a first member that comprises the liquid recovery part; and a second member that is disposed in a vicinity of the first member; wherein, the third opening is formed between the first member and the second member.
Claim 13
Dependent Claim
52 words
A liquid recovery system according to claim 11 , wherein the second member comprises a liquid contact surface; and the liquid on the object that opposes the liquid contact surface of the second member and the first surface can flow from the third opening into the first gap via the first opening.
Claim 14
Dependent Claim
32 words
A liquid recovery system according to claim 12 , wherein a distance between the object and the first surface is smaller than a distance between the object and the liquid contact surface.
Claim 15
Dependent Claim
55 words
A liquid recovery system according to claim 11 , comprising: a second gap that is provided between the first member and the second member; and a fourth opening that is different from the third opening; wherein, the second gap is connected to the third opening and is open to the atmosphere via the fourth opening.
Claim 16
Dependent Claim
56 words
A liquid recovery system according to claim 1 , wherein the liquid recovery part comprises a first region, which faces the object, and a second region, which faces the second surface, and the second region of the liquid recovery part is capable of recovering the liquid that flows into the first gap via the first opening.
Claim 17
Dependent Claim
39 words
A liquid recovery system according to claim 15 , wherein the liquid recovery part is provided at at least a part of a space surrounding a liquid contact surface between which and the object the liquid can be retained.
Claim 18
Dependent Claim
31 words
A liquid recovery system according to claim 16 , wherein the second region of the liquid recovery part is provided outside the first region with respect to the liquid contact surface.
Claim 19
Dependent Claim
32 words
A liquid recovery system according to claim 16 , wherein a distance between the object and the liquid contact surface is smaller than a distance between the object and the first region.
Claim 20
Dependent Claim
37 words
A liquid recovery system according to claim 16 , wherein a distance between the object and the liquid contact surface is larger than a distance between the object and at least a part of the first surface.
Claim 21
Dependent Claim
21 words
A liquid recovery system according to claim 16 , wherein the first surface is substantially parallel to the liquid contact surface.
Claim 22
Dependent Claim
35 words
A liquid recovery system according to claim 16 , wherein the second surface comprises an edge that is disposed at the first opening and that is closer to the object than the liquid contact surface.
Claim 23
Dependent Claim
27 words
A liquid recovery system according to claim 1 , wherein the first opening is provided annularly; and the first gap is provided annularly along the first opening.
Claim 24
Dependent Claim
21 words
A liquid recovery system according to claim 22 , wherein the liquid recovery part is provided annularly along the first gap.
Claim 25
Dependent Claim
26 words
A liquid recovery system according to claim 1 , wherein the first gap forms a capillary passage into which the liquid on the object can flow.
Claim 26
Dependent Claim
26 words
A liquid recovery system according to claim 1 , wherein the second surface comprises an inclined part that is inclined with respect to the first surface.
Claim 27
Dependent Claim
38 words
A liquid recovery system according to claim 1 , wherein the second surface comprises an inclined part, which is inclined with respect to the first surface, and a flat part, which is substantially parallel to the first surface.
Claim 28
Dependent Claim
20 words
A liquid recovery system according to claim 1 , wherein the second surface is lyophilic with respect to the liquid.
Claim 29
Dependent Claim
21 words
A liquid recovery system according to claim 1 , wherein the first surface is liquid repellent with respect to the liquid.
Claim 30
Dependent Claim
159 words
An immersion exposure apparatus that exposes a substrate, comprising: an optical member that comprises an emergent surface from which exposure light is emitted; and an immersion member which includes: the first surface, an object opposing the first surface being moved relative to the first surface below the first surface, a second surface on the side opposite the first surface; a liquid recovery part, at least a part of which opposes the second surface with a first gap interposed therebetween; a first opening which is connected with the first gap and through which liquid on the object flows into the first gap, the liquid in the gap being recovered via the liquid recovery part; and a second opening different from the first opening, through which gas flows from the first gap, the second opening being located higher than the liquid recovery part and the second opening being located such that the liquid is prevented from flowing to the second opening.
Claim 31
Dependent Claim
159 words
An immersion exposure apparatus that exposes a substrate, comprising: an optical member that comprises an emergent surface from which exposure light is emitted; and an immersion member which includes: the first surface, an object opposing the first surface being moved relative to the first surface below the first surface, a second surface on the side opposite the first surface; a liquid recovery part, at least a part of which opposes the second surface with a first gap interposed therebetween; a first opening which is connected with the first gap and through which liquid on the object flows into the first gap, the liquid in the gap being recovered via the liquid recovery part; and a second opening different from the first opening, through which gas flows from the first gap, the second opening being located higher than the liquid recovery part and the second opening being located such that the liquid is prevented from flowing to the second opening.
Claim 32
Dependent Claim
35 words
An immersion exposure apparatus according to claim 29 , wherein the liquid recovery part comprises a recovery region that is capable of recovering the liquid and that has a larger area than the second surface.
Claim 33
Dependent Claim
26 words
An immersion exposure apparatus according to claim 29 , wherein the object is moved to a position that opposes the emergent surface of the optical member.
Claim 34
Dependent Claim
30 words
An immersion exposure apparatus according to claim 29 , wherein the object comprises the substrate; and the substrate is irradiated with the exposure light through the liquid on the substrate.
Claim 35
Dependent Claim
37 words
An immersion exposure apparatus according to claim 29 , wherein the liquid recovery part comprises a porous member; and at least a part of the liquid that contacts the porous member is recovered via the porous member.
Claim 36
Dependent Claim
19 words
An immersion exposure apparatus according to claim 33 , wherein the porous member prevents a gas from passing therethrough.
Claim 37
Dependent Claim
21 words
An immersion exposure apparatus according to claim 29 , wherein gas being prevented from being recovered from the liquid recovery part.
Claim 38
Dependent Claim
22 words
An immersion exposure apparatus according to claim 29 , wherein, the first gap is open to the atmosphere via the second opening.
Claim 39
Dependent Claim
31 words
An immersion exposure apparatus according to claim 29 , wherein a distance between the second opening and the object is larger than a distance between the first opening and the object.
Claim 40
Dependent Claim
18 words
An immersion exposure apparatus according to claim 29 , wherein the second opening does not face the object.
Claim 41
Dependent Claim
27 words
An immersion exposure apparatus according to claim 29 , wherein the first opening is provided between an edge of the first surface and the liquid recovery part.
Claim 42
Dependent Claim
39 words
An immersion exposure apparatus according to claim 29 , further comprising: a third opening; wherein, the liquid on the object that opposes the third opening can flow from the third opening into the first gap via the first opening.
Claim 43
Dependent Claim
60 words
An immersion exposure apparatus according to claim 40 , comprising: a first member that comprises the liquid recovery part; and a second member that is disposed in a vicinity of the optical member so that the second member surrounds an optical path of the exposure light; wherein, the third opening is formed between the first member and the second member.
Claim 44
Dependent Claim
55 words
An immersion exposure apparatus according to claim 41 , wherein the second member comprises a liquid contact surface; and the liquid on the object that opposes the liquid contact surface of the second member and the first surface of the plate can flow from the third opening into the first gap via the first opening.
Claim 45
Dependent Claim
32 words
An immersion exposure apparatus according to claim 42 , wherein a distance between the object and the first surface is smaller than a distance between the object and the liquid contact surface.
Claim 46
Dependent Claim
27 words
An immersion exposure apparatus according to claim 42 , wherein the liquid contact surface of the second member is parallel to a front surface of the object.
Claim 47
Dependent Claim
22 words
An immersion exposure apparatus according to claim 42 , wherein the second member has an opening through which the exposure light passes.
Claim 48
Dependent Claim
55 words
An immersion exposure apparatus according to claim 41 , comprising: a second gap that is provided between the first member and the second member; and a fourth opening that is different from the third opening; wherein, the second gap is connected to the third opening and is open to the atmosphere via the fourth opening.
Claim 49
Dependent Claim
56 words
An immersion exposure apparatus according to claim 29 , wherein the liquid recovery part comprises a first region, which faces the object, and a second region, which faces the second surface, and the second region of the liquid recovery part is capable of recovering the liquid that flows into the first gap via the first opening.
Claim 50
Dependent Claim
61 words
An immersion exposure apparatus according to claim 47 , further comprising: an opening through which the exposure light passes; and a liquid contact surface that is provided surrounding the opening, and between which and the object the liquid can be retained, wherein the liquid recovery part is provided at at least a part of a space surrounding the liquid contact surface.
Claim 51
Dependent Claim
31 words
An immersion exposure apparatus according to claim 48 , wherein the second region of the liquid recovery part is provided outside the first region with respect to the liquid contact surface.
Claim 52
Dependent Claim
32 words
An immersion exposure apparatus according to claim 48 , wherein a distance between the object and the liquid contact surface is smaller than a distance between the object and the first region.
Claim 53
Dependent Claim
37 words
An immersion exposure apparatus according to claim 48 , wherein a distance between the object and at least a part of the first surface is smaller than a distance between the object and the liquid contact surface.
Claim 54
Dependent Claim
21 words
An immersion exposure apparatus according to claim 48 , wherein the first surface is substantially parallel to the liquid contact surface.
Claim 55
Dependent Claim
35 words
An immersion exposure apparatus according to claim 48 , wherein the second surface comprises an edge that is disposed at the first opening and that is closer to the object than the liquid contact surface.
Claim 56
Dependent Claim
21 words
An immersion exposure apparatus according to claim 29 , wherein the first surface is movable relative to the liquid recovery part.
Claim 57
Dependent Claim
40 words
An immersion exposure apparatus according to claim 29 , wherein the first opening is provided annularly so that the first opening surrounds the optical path of the exposure light; and the first gap is provided annularly along the first opening.
Claim 58
Dependent Claim
21 words
An immersion exposure apparatus according to claim 55 , wherein the liquid recovery part is provided annularly along the first gap.
Claim 59
Dependent Claim
26 words
An immersion exposure apparatus according to claim 29 , wherein the first gap forms a capillary passage into which the liquid on the object can flow.
Claim 60
Dependent Claim
73 words
An immersion exposure apparatus according to claim 29 , wherein the first surface is disposed so that the first surface surrounds the optical path of the exposure light; and at least a part of the first surface comprises an inclined part that gradually becomes more spaced apart from the front surface of the object, which opposes the first surface, in a direction that leads away from the optical path of the exposure light.
Claim 61
Dependent Claim
26 words
An immersion exposure apparatus according to claim 29 , wherein the second surface comprises an inclined part that is inclined with respect to the first surface.
Claim 62
Dependent Claim
37 words
An immersion exposure apparatus according to claim 29 , wherein the second surface comprises an inclined part, which is inclined with respect to the first surface, and a flat part, which is parallel to the first surface.
Claim 63
Dependent Claim
44 words
An immersion exposure apparatus according to claim 59 , wherein the inclined part gradually becomes more spaced apart from the front surface of the object, which opposes the first surface, in a direction that leads away from the optical path of the exposure light.
Claim 64
Dependent Claim
20 words
An immersion exposure apparatus according to claim 29 , wherein the second surface is lyophilic with respect to the liquid.
Claim 65
Dependent Claim
21 words
An immersion exposure apparatus according to claim 29 , wherein the first surface is liquid repellent with respect to the liquid.
Claim 66
Dependent Claim
23 words
A device fabricating method, comprising: exposing a substrate using an immersion exposure apparatus according to claim 29 ; and developing the exposed substrate.
Claim 67
Dependent Claim
187 words
An immersion exposing method that exposes a substrate, the method comprising: exposing the substrate with exposure light through a liquid on the substrate; and recovering the liquid on the substrate using a liquid recovery system during the exposure of the substrate; wherein, the liquid recovery system comprises; a first surface and a second surface on the side opposite the first surface, an object opposing the first surface being moved relative to the first surface below the first surface; and a liquid recovery part that is disposed so that at least a part of the liquid recovery part opposes the second surface with a first gap interposed therebetween; a first opening which is connected with the first gap and through which liquid on the object flows into the first gap, the liquid in the gap being recovered via the liquid recovery part; and a second opening different from the first opening, through which gas flows from the first gap, the second opening being located higher than the liquid recovery part and the second opening being located such that the liquid is prevented from flowing to the second opening.
Claim 68
Dependent Claim
187 words
An immersion exposing method that exposes a substrate, the method comprising: exposing the substrate with exposure light through a liquid on the substrate; and recovering the liquid on the substrate using a liquid recovery system during the exposure of the substrate; wherein, the liquid recovery system comprises; a first surface and a second surface on the side opposite the first surface, an object opposing the first surface being moved relative to the first surface below the first surface; and a liquid recovery part that is disposed so that at least a part of the liquid recovery part opposes the second surface with a first gap interposed therebetween; a first opening which is connected with the first gap and through which liquid on the object flows into the first gap, the liquid in the gap being recovered via the liquid recovery part; and a second opening different from the first opening, through which gas flows from the first gap, the second opening being located higher than the liquid recovery part and the second opening being located such that the liquid is prevented from flowing to the second opening.
Claim 69
Dependent Claim
18 words
An immersion exposing method according to claim 65 , wherein the liquid recovery part comprises a porous member.
Claim 70
Dependent Claim
22 words
A device fabricating method comprising: exposing a substrate using an exposing method according to claim 65 ; and developing the exposed substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2015-03-13 | 2015-09-12 | 2016-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2019-03-13 | 2019-09-12 | 2020-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2023-03-13 | 2023-09-12 | 2024-03-13 | $7700.00 | Window Closed / Lapsed |