Patent US3489379A successfully refreshed from Google Patents.
US7804577B2
Expired / Lapsed
US
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Lithographic apparatus
Assignee: ASML Netherlands BV
•
Filing: 2006-03-29
•
Granted: 2010-09-28
•
Expires: 2026-03-29
Abstract
Abstract A barrier member is provided for use in immersion lithography. The barrier member includes an extractor assembly on a bottom surface configured to face the substrate. The extractor assembly includes a plate configured to split the space between a liquid removal device and the substrate in two such that a meniscus is formed in an upper channel between the liquid removal device and the plate and below the plate between the plate and the substrate.
Inventors
- 👤 Martinus Hendrikus Antonius Leenders
- 👤 Nicolaas Ten Kate
- 👤 Nicolaas Rudolf Kemper
- 👤 Joost Jeroen Ottens
- 👤 Marcel Beckers
- 👤 Johannes Petrus Maria Smeulers
- 👤 Michel Riepen
- 👤 Sergei Shulepov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70341; G03F7/20; G03F7/2041; G03F7/708; G03F7/70808; G03F7/70858; G03F7/70866
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
139 words
A lithographic apparatus, comprising: a barrier member configured to surround a space between a projection system and a substrate and to at least partly constrain liquid in the space, the barrier member comprising: an extractor configured to remove liquid from between the barrier member and the substrate, and a plate located between the extractor and the substrate such that a first channel, open to the space and to the extractor, is formed between the extractor and the plate and a second radially extending channel, open to the space, is formed between the plate and the substrate, wherein the first channel has, in use, an under pressure other than from the extractor or has, in use, an atmospheric pressure, and wherein, in use, liquid flows into the first channel to form a meniscus extending from the extractor in the channel.
Claim 2
Dependent Claim
139 words
A lithographic apparatus, comprising: a barrier member configured to surround a space between a projection system and a substrate and to at least partly constrain liquid in the space, the barrier member comprising: an extractor configured to remove liquid from between the barrier member and the substrate, and a plate located between the extractor and the substrate such that a first channel, open to the space and to the extractor, is formed between the extractor and the plate and a second radially extending channel, open to the space, is formed between the plate and the substrate, wherein the first channel has, in use, an under pressure other than from the extractor or has, in use, an atmospheric pressure, and wherein, in use, liquid flows into the first channel to form a meniscus extending from the extractor in the channel.
Claim 3
Dependent Claim
13 words
The apparatus of claim 1 , wherein the first channel is radially extending.
Claim 4
Dependent Claim
16 words
The apparatus of claim 1 , wherein the first channel is narrower than the second channel.
Claim 5
Dependent Claim
16 words
The apparatus of claim 1 , wherein the first channel narrows in a radially outward direction.
Claim 6
Dependent Claim
16 words
The apparatus of claim 1 , wherein the second channel widens in a radially outward direction.
Claim 7
Dependent Claim
33 words
The apparatus of claim 1 , wherein the plate has a meniscus pinning feature to make it energetically unfavorable for a meniscus attached to the feature to move radially outwardly of the feature.
Claim 8
Dependent Claim
39 words
The apparatus of claim 6 , wherein the feature includes a port configured to be connected to an under pressure source, an over pressure source, or both, to generate a gas flow over the meniscus attached to the feature.
Claim 9
Dependent Claim
17 words
The apparatus of claim 7 , wherein the port extends around the whole of the barrier member.
Claim 10
Dependent Claim
40 words
The apparatus of claim 8 , wherein the port comprises a plurality of individually controllable sections such that a part of the port can be exposed to the under pressure while another part can be exposed to the over pressure.
Claim 11
Dependent Claim
31 words
The apparatus of claim 1 , wherein the bottom surface of the plate has a step formed in it such that the second channel is wider radially outward of the step.
Claim 12
Dependent Claim
31 words
The apparatus of claim 1 , wherein the bottom surface of the plate has a step formed in it such that the second channel is wider radially inward of the step.
Claim 13
Dependent Claim
29 words
The apparatus of claim 11 , configured such that the liquid would have a contact angle with the bottom surface radially outward of the step of more than 45°.
Claim 14
Dependent Claim
25 words
The apparatus of claim 1 , wherein the plate has a radially inner most bottom edge which has a radius of less than 0.1 mm.
Claim 15
Dependent Claim
28 words
The apparatus of claim 1 , wherein the plate has a change in surface property on an under side from liquid-phobic to liquid-philic in a direction radially outwardly.
Claim 16
Dependent Claim
29 words
The apparatus of claim 1 , wherein the plate has a change in surface roughness from relatively rough to relatively smooth on an underside in a direction radially outwardly.
Claim 17
Dependent Claim
21 words
The apparatus of claim 1 , wherein the extractor comprises a porous material through which the liquid is to be removed.
Claim 18
Dependent Claim
38 words
The apparatus of claim 16 , wherein the porous material extends in a radial direction and an extraction capacity of the extractor is configured to increase with increasing area of the porous material covered by liquid during use.
Claim 19
Dependent Claim
23 words
The apparatus of claim 1 , wherein the plate is moveable in a plane substantially parallel to a top surface of the substrate.
Claim 20
Dependent Claim
58 words
The apparatus of claim 18 , further comprising a controller adapted to control the movement of the plate in substantially the same direction relative to the projection system as the substrate is moved and at a speed equal to two times the speed of the substrate or less during at least a portion of movement of the substrate.
Claim 21
Dependent Claim
33 words
The apparatus of claim 19 , wherein the controller is further adapted to move the moveable plate in the substantially same direction as the substrate during a highest speed movement of the substrate.
Claim 22
Dependent Claim
73 words
The apparatus of claim 19 , wherein the controller is further adapted to move the moveable plate in a direction against the movement of the substrate during at least a portion of a low speed movement of the substrate in the direction or to move the moveable plate in a direction in which the substrate is substantially stationary during a portion of time in which the substrate is substantially stationary in the direction.
Claim 23
Dependent Claim
17 words
The apparatus of claim 18 , wherein the moveable plate is moveable relative to the barrier member.
Claim 24
Dependent Claim
25 words
The apparatus of claim 1 , further comprising an inlet, an outlet, or both, in a face of the plate configured to face the substrate.
Claim 25
Dependent Claim
39 words
The apparatus of claim 23 , wherein the inlet, the outlet, or both, is configured to be connected to a low pressure source, a high pressure source, or both, to generate a vortex between the plate and the substrate.
Claim 26
Dependent Claim
34 words
The apparatus of claim 24 , configured to provide, to the inlet, the outlet, or both, a pressure of between 0.5 and 1.0 atm below that of liquid between the plate and the substrate.
Claim 27
Dependent Claim
29 words
The apparatus of claim 23 , further comprising a meniscus pinning feature on the face of the plate and positioned radially outwardly of the inlet, the outlet, or both.
Claim 28
Dependent Claim
21 words
The apparatus of claim 1 , further comprising an inlet in a face of the plate configured to face the substrate.
Claim 29
Dependent Claim
53 words
The apparatus of claim 27 , wherein the inlet is shaped to generate a flow of liquid at least partly radially inwardly to generate a vortex in liquid between the plate and the substrate that would be radially outwardly nearer the substrate, vertically towards the plate and then radially inwardly along the plate.
Claim 30
Dependent Claim
25 words
The apparatus of claim 27 , further comprising a meniscus pinning feature on the face of the plate and positioned radially outwardly of the inlet.
Claim 31
Dependent Claim
27 words
The apparatus of claim 27 , wherein inlet is configured to generate a jet to generate a counter flow of liquid between the plate and the substrate.
Claim 32
Dependent Claim
26 words
The apparatus of claim 1 , further comprising a port in the plate configured to generate a vortex in liquid between the plate and the substrate.
Claim 33
Dependent Claim
26 words
The apparatus of claim 1 , wherein the first channel is connected to an under pressure source to generate an under pressure in the first channel.
Claim 34
Dependent Claim
37 words
The apparatus of claim 1 , wherein the plate is constructed and arranged to make it energetically favorable for a meniscus below the plate to be positioned attached to a radially inner most edge of the plate.
Claim 35
Dependent Claim
55 words
The lithographic apparatus of claim 1 , wherein the plate is moveable in a plane substantially parallel to a top surface of the substrate and biased towards a neutral position and the barrier member is configured such that, in use, a meniscus of the liquid in the space extends between the plate and the substrate.
Claim 36
Dependent Claim
42 words
The apparatus of claim 34 , wherein the biasing is such that forces transmitted through the liquid from the substrate to the plate are high enough during high speed movement of the substrate to move the plate relative to the barrier member.
Claim 37
Dependent Claim
123 words
A lithographic apparatus, comprising: a liquid supply system including a barrier member which surrounds a space between a projection system and a substrate and configured to form a contactless seal between the barrier member and the substrate; a liquid removal device configured to remove liquid and which surrounds the space and has an inlet which extends in the radial direction, the removal capacity of the liquid removal device being dependent on an amount of the inlet being covered by liquid; and a radially inwardly extending projection positioned between the inlet and the substrate to split the area between the inlet and the substrate in two, wherein, in use, a meniscus extends from the inlet in the area between the inlet and the projection.
Claim 38
Dependent Claim
123 words
A lithographic apparatus, comprising: a liquid supply system including a barrier member which surrounds a space between a projection system and a substrate and configured to form a contactless seal between the barrier member and the substrate; a liquid removal device configured to remove liquid and which surrounds the space and has an inlet which extends in the radial direction, the removal capacity of the liquid removal device being dependent on an amount of the inlet being covered by liquid; and a radially inwardly extending projection positioned between the inlet and the substrate to split the area between the inlet and the substrate in two, wherein, in use, a meniscus extends from the inlet in the area between the inlet and the projection.
Claim 39
Dependent Claim
36 words
The apparatus of claim 36 , wherein the area between the inlet and the projection narrows in a radially outward direction or the area between the projection and the substrate widens in a radially outward direction.
Claim 40
Dependent Claim
33 words
The apparatus of claim 36 , wherein the projection has a meniscus pinning feature to make it energetically unfavorable for a meniscus attached to the feature to move radially outwardly of the feature.
Claim 41
Dependent Claim
39 words
The apparatus of claim 38 , wherein the feature includes a port configured to be connected to an under pressure source, an over pressure source, or both, to generate a gas flow over the meniscus attached to the feature.
Claim 42
Dependent Claim
25 words
The apparatus of claim 36 , further comprising an inlet, an outlet, or both, in a face of the projection configured to face the substrate.
Claim 43
Dependent Claim
39 words
The apparatus of claim 40 , wherein the inlet, the outlet, or both, is configured to be connected to a low pressure source, a high pressure source, or both, to generate a vortex between the projection and the substrate.
Claim 44
Dependent Claim
29 words
The apparatus of claim 40 , further comprising a meniscus pinning feature on the face of the projection and positioned radially outwardly of the inlet, the outlet, or both.
Claim 45
Dependent Claim
60 words
The apparatus of claim 40 , wherein the projection comprises the inlet and wherein the inlet is shaped to generate a flow of liquid at least partly radially inwardly to generate a vortex in liquid between the projection and the substrate that would be radially outwardly nearer the substrate, vertically towards the projection and then radially inwardly along the projection.
Claim 46
Dependent Claim
34 words
The apparatus of claim 40 , wherein the projection comprises the inlet and wherein inlet is configured to generate a jet to generate a counter flow of liquid between the projection and the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2013-09-27 | 2014-03-29 | 2014-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2017-09-27 | 2018-03-29 | 2018-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2021-09-27 | 2022-03-29 | 2022-09-28 | $7700.00 | Window Closed / Lapsed |