US7864292B2 — Lithographic apparatus and device manufacturing m…

Claim 1

Independent Claim 167 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; a liquid supply system configured to provide a space between the projection system and the substrate with liquid, at least a part of the liquid supply system being linearly translateable with respect to the projection system in at least one direction which is substantially parallel to a top surface of the substrate and linearly translateable independent of the projection system and the substrate; and a positional controller configured to control linear translation of the at least a part of the liquid supply system such that, during a portion of movement of the substrate relative to the projection system during imaging, the at least a part of the liquid supply system is linearly translated to reduce relative velocity between the at least a part of the liquid supply system and the substrate, while maintaining the space between the projection system and the substrate substantially full of liquid.

Claim 2

Dependent Claim 167 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; a liquid supply system configured to provide a space between the projection system and the substrate with liquid, at least a part of the liquid supply system being linearly translateable with respect to the projection system in at least one direction which is substantially parallel to a top surface of the substrate and linearly translateable independent of the projection system and the substrate; and a positional controller configured to control linear translation of the at least a part of the liquid supply system such that, during a portion of movement of the substrate relative to the projection system during imaging, the at least a part of the liquid supply system is linearly translated to reduce relative velocity between the at least a part of the liquid supply system and the substrate, while maintaining the space between the projection system and the substrate substantially full of liquid.

Claim 3

Dependent Claim 30 words

The apparatus of claim 1 , further comprising an actuator configured to linearly translate the at least a part of the liquid supply system in the at least one direction.

Claim 4

Dependent Claim 29 words

The apparatus of claim 1 , wherein, in use, a boundary of the liquid extends between the substrate and the at least a part of the liquid supply system.

Claim 5

Dependent Claim 12 words

The apparatus of claim 3 , wherein the boundary is a meniscus.

Claim 6

Dependent Claim 34 words

The apparatus of claim 1 , wherein the liquid supply system comprises a gas knife configured to seal between the liquid supply system and substrate to at least partly contain liquid in the space.

Claim 7

Dependent Claim 34 words

The apparatus of claim 1 , wherein the liquid supply system is configured to provide liquid to an area of the substrate which is, in plan, smaller than a top surface of the substrate.

Claim 8

Dependent Claim 53 words

The apparatus of claim 1 , wherein, in use, movement of the at least a part of the liquid supply system in the at least one direction is effective to move a volume, to which the at least a part of the liquid supply system provides liquid, in the at least one direction.

Claim 9

Dependent Claim 38 words

The apparatus of claim 1 , further comprising a substrate table configured to hold the substrate and move it relative to the projection system independent of movement of the at least a part of the liquid supply system.

Claim 10

Dependent Claim 108 words

The apparatus of claim 1 , wherein the positional controller is configured to control linear translation of the at least a part of the liquid supply system, during a scanning of the substrate under the projection system in a scanning direction, with a major component in the scanning direction and a minor component in a direction substantially orthogonal to the scanning direction, such that the at least a part of the liquid supply system moves during the scan from a position to one side of the projection system to a position toward the other side of the projection system in a direction substantially orthogonal to the scanning direction.

Claim 11

Dependent Claim 46 words

The apparatus of claim 1 , wherein the positional controller is configured to control linear translation of the at least a part of the liquid supply system, during a step motion of the substrate under the projection system in a step direction, in the step direction.

Claim 12

Dependent Claim 32 words

The apparatus of claim 1 , wherein the at least a part of the liquid supply system is configured to form a contactless seal between the liquid supply system and the substrate.

Claim 13

Dependent Claim 62 words

The apparatus of claim 11 , wherein the at least a part of the liquid supply system comprises a barrier member configured to surround the space and provide a physical barrier to liquid escaping radially outwardly from an optical axis of the apparatus from the space and wherein, in use, the contactless seal is provided between the barrier member and the substrate.

Claim 14

Dependent Claim 23 words

The apparatus of claim 11 , wherein, in use, the contactless seal at least partly relies on a meniscus force of the liquid.

Claim 15

Dependent Claim 36 words

The apparatus of claim 1 , further comprising a first actuator configured to move the at least a part of the liquid supply system in a second direction substantially orthogonal to the at least one direction.

Claim 16

Dependent Claim 20 words

The apparatus of claim 1 , wherein the at least a part of the liquid supply system comprises a plate.

Claim 17

Dependent Claim 27 words

The apparatus of claim 1 , wherein the at least a part of the liquid supply system comprises a liquid supply part or the liquid supply system.

Claim 18

Dependent Claim 45 words

The apparatus of claim 1 , further comprising a force decoupling member, positioned around the projection system and, in use, in the liquid, to at least reduce transfer of forces from the part of the liquid supply system to the projection system through the liquid.

Claim 19

Dependent Claim 20 words

The apparatus of claim 17 , wherein, in use, the force decoupling member is dynamically decoupled from the projection system.

Claim 20

Dependent Claim 33 words

The apparatus of claim 17 , wherein the force decoupling member is attached to a frame to which the projection system is attached or attached to a frame configured to support the substrate.

Claim 21

Dependent Claim 155 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; a liquid supply system configured to provide a space between the projection system and the substrate with liquid, at least a part of the liquid supply system being linearly translateable with respect to the projection system in at least one direction which is substantially parallel to a to surface of the substrate and linearly translateable independent of the projection system and the substrate; a first actuator configured to move the at least a part of the liquid supply system in a second direction substantially orthogonal to the at least one direction; and a second actuator configured to linearly translate the at least a part of the liquid supply system in the at least one direction and wherein the stroke of the second actuator is at least 1½ times the stroke of the first actuator.

Claim 22

Dependent Claim 155 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; a liquid supply system configured to provide a space between the projection system and the substrate with liquid, at least a part of the liquid supply system being linearly translateable with respect to the projection system in at least one direction which is substantially parallel to a to surface of the substrate and linearly translateable independent of the projection system and the substrate; a first actuator configured to move the at least a part of the liquid supply system in a second direction substantially orthogonal to the at least one direction; and a second actuator configured to linearly translate the at least a part of the liquid supply system in the at least one direction and wherein the stroke of the second actuator is at least 1½ times the stroke of the first actuator.

Claim 23

Dependent Claim 115 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; and a liquid supply system comprising a barrier member, surrounding the projection system, configured to at least partly contain liquid in a volume including a space between the projection system and the substrate, wherein the barrier member is configured to be moveable independently of the substrate in a first direction in a plane substantially parallel to a top surface of the substrate, and wherein the barrier member is sized and shaped such that it is moveable in the first direction by at least a distance equal to a slit height of the lithographic apparatus.

Claim 24

Dependent Claim 115 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; and a liquid supply system comprising a barrier member, surrounding the projection system, configured to at least partly contain liquid in a volume including a space between the projection system and the substrate, wherein the barrier member is configured to be moveable independently of the substrate in a first direction in a plane substantially parallel to a top surface of the substrate, and wherein the barrier member is sized and shaped such that it is moveable in the first direction by at least a distance equal to a slit height of the lithographic apparatus.

Claim 25

Dependent Claim 56 words

The apparatus of claim 21 , wherein the barrier member is sized and shaped such that it is moveable in a second direction substantially orthogonal to the first direction and in a plane substantially parallel to the top surface of the substrate by at least a distance equal to the slit height of the lithographic apparatus.

Claim 26

Dependent Claim 34 words

The apparatus of claim 21 , wherein the barrier member is sized and shaped such that it is moveable by more distance in the first direction than it is moveable in a second direction.

Claim 27

Dependent Claim 39 words

The apparatus of claim 21 , wherein the barrier member is sized and shaped such that it is moveable in the first direction by a distance of at least 20% of a maximum scan length of the lithographic apparatus.

Claim 28

Dependent Claim 37 words

The apparatus of claim 21 , wherein the barrier member is sized and shaped such that it is moveable in a second direction by a distance of at least 20% of the slit width of the apparatus.

Claim 29

Dependent Claim 80 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; a liquid supply system configured to provide a space between the projection system and the substrate with liquid; and a force decoupling member, positioned around the projection system and not in direct contact with the projection system and, in use, in the liquid, to at least reduce transfer of forces from the liquid supply system to the projection system.

Claim 30

Dependent Claim 80 words

A lithographic apparatus, comprising: a projection system; a table configured to hold a substrate to be imaged by the projection system; a liquid supply system configured to provide a space between the projection system and the substrate with liquid; and a force decoupling member, positioned around the projection system and not in direct contact with the projection system and, in use, in the liquid, to at least reduce transfer of forces from the liquid supply system to the projection system.

Claim 31

Dependent Claim 28 words

The apparatus of claim 26 , further comprising a base frame configured to support the substrate and wherein the force decoupling member is attached to the base frame.

Claim 32

Independent Claim 117 words

A device manufacturing method, comprising: providing a liquid between a projection system and a substrate using a liquid supply system, part of which forms a seal between the liquid supply system and the substrate; using the projection system to project a patterned beam of radiation onto the substrate; moving the substrate under the projection system; and during moving of the substrate, moving the part of the liquid supply system in a direction with a component perpendicular to the optical axis of the projection system and at a speed to reduce the relative velocity between the substrate and the part, wherein the part of the liquid supply system is not supported by a substrate table holding the substrate.

Claim 33

Independent Claim 117 words

A device manufacturing method, comprising: providing a liquid between a projection system and a substrate using a liquid supply system, part of which forms a seal between the liquid supply system and the substrate; using the projection system to project a patterned beam of radiation onto the substrate; moving the substrate under the projection system; and during moving of the substrate, moving the part of the liquid supply system in a direction with a component perpendicular to the optical axis of the projection system and at a speed to reduce the relative velocity between the substrate and the part, wherein the part of the liquid supply system is not supported by a substrate table holding the substrate.

Claim 34

Dependent Claim 80 words

The method of claim 28 , wherein during scanning movement of the substrate in a scanning direction, the part is moved with a major component in the scanning direction and a minor component in a direction substantially orthogonal to the scanning direction, such that the part moves during the scan from a position to one side of the projection system to a position toward the other side of the projection system in a direction substantially orthogonal to the scanning direction.

Claim 35

Dependent Claim 30 words

The method of claim 28 , wherein, during a step motion of the substrate under the projection system in a step direction, the part is moved in the step direction.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2014-01-03	2014-07-05	2015-01-04	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2018-01-03	2018-07-05	2019-01-04	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2022-01-03	2022-07-05	2023-01-04	$7700.00	Window Closed / Lapsed

Lithographic apparatus and device manufacturing method

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