US6797069B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas driven planetary rotation apparatus and methods for forming silicon carbide layers
Assignee: Wolfspeed Inc
•
Filing: 2002-04-08
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Granted: 2004-09-28
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Expires: 2022-04-08
Abstract
Abstract A gas driven rotation apparatus for use with a flow of drive gas includes a base member having an upper surface, a main platter overlying the upper surface of the base member, and a satellite platter overlying the main platter. The apparatus is adapted to direct the flow of drive gas between the upper surface of the base member and the main platter such that the main platter is rotated relative to the base member by the flow of drive gas. At least a portion of the flow of drive gas is directed from between the upper surface of the base member and the main platter to between the main platter and the satellite platter such that the satellite platter is rotated relative to the main platter by the at least a portion of the flow of drive gas.
Inventors
- 👤 Michael James Paisley
- 👤 Joseph John Sumakeris
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 10:43
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/12; H; H10; H10P; H10P95/00; C03; C03B; C03B25/00; C03B25/04; C03B25/10; C03B25/12; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4584; H10P72/00; H10P72/70; H10P72/78
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
146 words
A gas driven rotation apparatus for use with a flow of drive gas, the apparatus comprising: a) a base member having an upper surface; b) a main platter overlying the upper surface of the base member; and c) a satellite platter overlying the main platter; d) wherein the apparatus is adapted to: direct the flow of drive gas between the upper surface of the base member and the main platter such that the main platter is rotated relative to the base member by the flow of drive gas; and direct at least a portion of the flow of drive gas from between the upper surface of the base member and the main platter to between the main platter and the satellite platter such that the satellite platter is rotated relative to the main platter by the at least a portion of the flow of drive gas.
Claim 2
Dependent Claim
146 words
A gas driven rotation apparatus for use with a flow of drive gas, the apparatus comprising: a) a base member having an upper surface; b) a main platter overlying the upper surface of the base member; and c) a satellite platter overlying the main platter; d) wherein the apparatus is adapted to: direct the flow of drive gas between the upper surface of the base member and the main platter such that the main platter is rotated relative to the base member by the flow of drive gas; and direct at least a portion of the flow of drive gas from between the upper surface of the base member and the main platter to between the main platter and the satellite platter such that the satellite platter is rotated relative to the main platter by the at least a portion of the flow of drive gas.
Claim 3
Dependent Claim
71 words
The apparatus of claim 1 including a mounting portion formed in the upper surface of the base member, the mounting portion including at least one generally radially extending drive channel, wherein: the at least one drive channel is substantially straight; and the apparatus is adapted to direct the flow of drive gas through the drive channel to rotate the main platter relative to the base member about an axis of rotation.
Claim 4
Dependent Claim
35 words
The apparatus of claim 2 wherein the at least one drive channel includes a plurality of generally radially extending drive channels formed in the mounting portion and each of the drive channels is substantially straight.
Claim 5
Dependent Claim
24 words
The apparatus of claim 3 wherein each of the drive channels defines a drive channel axis which is offset from the axis of rotation.
Claim 6
Dependent Claim
32 words
The apparatus of claim 2 wherein the mounting portion includes first and second spaced apart recesses and the at least one drive channel extends from the first recess to the second recess.
Claim 7
Dependent Claim
45 words
The apparatus of claim 5 including: a drive gas entrance passage extending through the base member and having an entrance opening in the first recess; and a drive gas exhaust passage extending through the base member and having an exhaust opening in the second recess.
Claim 8
Dependent Claim
19 words
The apparatus of claim 1 including a drive gas supply device operative to provide the flow of drive gas.
Claim 9
Dependent Claim
77 words
The apparatus of claim 1 including a cover portion overlying the main platter, the satellite platter and the base member and a pair of side portions extending between the cover portion and base member on opposed sides of the main platter and the satellite platter, wherein the cover portion, the base member and the side portions define a through passage and opposed end openings, the main platter and the satellite platter being disposed in the through passage.
Claim 10
Dependent Claim
13 words
The apparatus of claim 1 wherein the axis of rotation is vertically oriented.
Claim 11
Dependent Claim
23 words
The apparatus of claim 1 wherein the apparatus is operative to rotate the main platter and the satellite platter in opposite rotative directions.
Claim 12
Dependent Claim
46 words
The apparatus of claim 1 including a feed passage extending through the main platter and providing a path for the flow of drive gas from between the upper surface of the base member and the main platter to between the main platter and the satellite platter.
Claim 13
Dependent Claim
57 words
The apparatus of claim 11 including at least one satellite drive channel formed in an upper surface of the main platter and underlying the satellite platter, wherein the apparatus is adapted to direct the flow of drive gas through the feed passage and the satellite drive channel to rotate the satellite platter relative to the main platter.
Claim 14
Dependent Claim
48 words
The apparatus of claim 12 including a feed recess in the upper surface of the base member and underlying the feed passage, wherein the apparatus is adapted to direct the flow of drive gas into the feed recess, through the feed passage, and through the satellite drive channel.
Claim 15
Dependent Claim
43 words
The apparatus of claim 13 wherein: the satellite drive channel does not overlie the feed recess; and the apparatus includes a feed channel formed in the upper surface of the main platter and fluidly connecting the feed passage and the satellite drive channel.
Claim 16
Dependent Claim
17 words
The apparatus of claim 14 including a second satellite drive channel fluidly connected to the feed channel.
Claim 17
Dependent Claim
29 words
The apparatus of claim 12 wherein the at least one satellite drive channel includes a plurality of satellite drive channels formed in the upper surface of the main platter.
Claim 18
Dependent Claim
13 words
The apparatus of claim 12 wherein the satellite drive channel extends generally radially.
Claim 19
Dependent Claim
13 words
The apparatus of claim 17 wherein the satellite drive channel is substantially straight.
Claim 20
Dependent Claim
76 words
The apparatus of claim 1 including a second satellite platter overlying the main platter, wherein the apparatus is adapted to direct a further portion of the flow of drive gas from between the upper surface of the base member and the main platter to between the main platter and the second satellite platter such that the second satellite platter is rotated relative to the main platter by the further portion of the flow of drive gas.
Claim 21
Dependent Claim
17 words
The apparatus of claim 1 wherein the satellite platter includes a plurality of wafer pockets formed therein.
Claim 22
Dependent Claim
16 words
The apparatus of claim 1 wherein the satellite platter is formed of graphite impregnated with carbon.
Claim 23
Dependent Claim
18 words
The apparatus of claim 1 wherein the satellite platter is formed of graphite coated with SiC or TaC.
Claim 24
Dependent Claim
13 words
The apparatus of claim 1 wherein the satellite platter is formed of SiC.
Claim 25
Dependent Claim
13 words
The apparatus of claim 23 wherein the satellite platter is coated with TaC.
Claim 26
Dependent Claim
62 words
The apparatus of claim 1 including at least one generally radially extending, substantially straight satellite drive channel formed in an upper surface of the main platter, wherein the apparatus is adapted to directat least a portion of the flow of drive gas through the satellite drive channel to rotate the satellite platter to the main platter about an axis of rotation. rotation.
Claim 27
Dependent Claim
20 words
The apparatus of claim 25 wherein the apparatus is operable to rotate the main platter relative to the base member.
Claim 28
Dependent Claim
47 words
The apparatus of claim 26 wherein the apparatus is adapted to direct the flow of drive gas between the upper surface of the base member and the main platter such that the main platter is rotated relative to the base member by the flow of drive gas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-09-28 | 2008-03-29 | 2008-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-09-28 | 2012-03-29 | 2012-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-09-28 | 2016-03-29 | 2016-09-28 | $7700.00 | Window Closed / Lapsed |