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US6716676B2 Expired / Lapsed US ⏱️ 0.0 years remaining

Thermally-enhanced stacked-die ball grid array semiconductor package and method of fabricating the same

Assignee: Siliconware Precision Industries Co Ltd
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Filing: 2002-09-19
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Granted: 2004-04-06
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Expires: 2022-09-19
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Abstract

Abstract A new semiconductor packaging technology is proposed for the fabrication of a thermally-enhanced stacked-die BGA (Ball Grid Array) semiconductor package. By the proposed semiconductor packaging technology, a substrate is used as a chip carrier for the mounting of two semiconductor chips in conjunction with a heat spreader thereon, wherein the first semiconductor chip is mounted over the substrate through flip-chip (FC) technology; the heat spreader is mounted over the first semiconductor chip and supported on the substrate; and the second semiconductor chip is mounted on the heat spreader and electrically coupled to the substrate through wire-bonding (WB) technology. To facilitate the wire-bonding process, the heat spreader is formed with a plurality of wire-routing openings to allow the bonding wires to be routed therethrough. Since chip-produced heat during operation can be dissipated through the heat spreader, it allows an enhanced heat-dissipation efficiency. In addition, the heat spreader can serve as a grounding plane to the package chips, so that the packaged chips would have better electrical performance during operation.

Inventors

  • 👤 Eing-Chieh Chen
  • 👤 Cheng-Yuan Lai
  • 👤 Tzu-Yi Tien

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 16:28
CPC Classifications
H; H10; H10W; H10W40/00; H10W40/70; H10W40/77; H10W40/778; H10W74/00; H10W74/10; H10W74/111; H10W74/114; H10W74/117; H10W90/00; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; H10W72/50; H10W72/541; H10W72/5445; H10W72/551; H10W72/552; H10W72/5522; H10W72/59; H10W72/851; H10W72/874; H10W72/877; H10W90/20; H10W90/231; H10W90/291; H10W90/701; H10W90/721; H10W90/724; H10W90/751; H10W90/754; H10W90/756

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 279 words
A method for fabricating a thermally-enhanced stacked-die BGA semiconductor package, comprising the steps of: (1) preparing a substrate having a front surface and a back surface; (2) mounting a first semiconductor chip having an active surface and an inactive surface over the substrate, wherein the active surface of the first semiconductor chip is bonded and electrically coupled to the front surface of the substrate through flip-chip technology; (3) mounting a heat spreader over the first semiconductor chip, the heat spreader having a support portion and an overhead portion formed with a plurality of wire-routing openings, the heat spreader being mounted in such a manner that the support portion is supported on the front surface of the substrate, while the overhead portion is abutted on the inactive surface of the first semiconductor chip; (4) mounting a second semiconductor chip having an active surface and an inactive surface over the overhead portion of the heat spreader, wherein the inactive surface of the second semiconductor chip is thermally coupled to the overhead portion of the heat spreader; (5) providing a plurality of bonding wires for electrically coupling the second semiconductor chip to the substrate, wherein the bonding wires are routed from the active surface of the second semiconductor chip through die wire-routing openings in the overhead portion of the heat spreader down to the front surface of the substrate; (6) performing an encapsulation process to form an encapsulation body for encapsulating the front surface of the substrate, the first semiconductor chip, the heat spreader, the second semiconductor chip, and the bonding wires; and (7) performing a ball-implantation process to implant an array of solder balls over the back surface of the substrate.
Claim 2
Independent Claim 279 words
A method for fabricating a thermally-enhanced stacked-die BGA semiconductor package, comprising the steps of: (1) preparing a substrate having a front surface and a back surface; (2) mounting a first semiconductor chip having an active surface and an inactive surface over the substrate, wherein the active surface of the first semiconductor chip is bonded and electrically coupled to the front surface of the substrate through flip-chip technology; (3) mounting a heat spreader over the first semiconductor chip, the heat spreader having a support portion and an overhead portion formed with a plurality of wire-routing openings, the heat spreader being mounted in such a manner that the support portion is supported on the front surface of the substrate, while the overhead portion is abutted on the inactive surface of the first semiconductor chip; (4) mounting a second semiconductor chip having an active surface and an inactive surface over the overhead portion of the heat spreader, wherein the inactive surface of the second semiconductor chip is thermally coupled to the overhead portion of the heat spreader; (5) providing a plurality of bonding wires for electrically coupling the second semiconductor chip to the substrate, wherein the bonding wires are routed from the active surface of the second semiconductor chip through die wire-routing openings in the overhead portion of the heat spreader down to the front surface of the substrate; (6) performing an encapsulation process to form an encapsulation body for encapsulating the front surface of the substrate, the first semiconductor chip, the heat spreader, the second semiconductor chip, and the bonding wires; and (7) performing a ball-implantation process to implant an array of solder balls over the back surface of the substrate.
Claim 3
Dependent Claim 18 words
The method of claim 1 , wherein in said step (3), the heat spreader is made of copper.
Claim 4
Dependent Claim 17 words
The method of claim 1 , wherein in said step (5), the bonding wires are gold wires.
Claim 5
Dependent Claim 32 words
The method of claim 1 , wherein the overhead portion of the heat spreader is adhered by means of an electrically-and-thermally-conductive adhesive layer to the inactive surface of the first semiconductor chip.
Claim 6
Dependent Claim 32 words
The method of claim 1 , wherein the inactive surface of the second semiconductor chip is adhered by means of an electrically-and-thermally-conductive adhesive layer to the overhead portion of the heat spreader.
Claim 7
Dependent Claim 33 words
The method claim 1 , wherein the support portion of the heat spreader is adhered by means of an electrically-conductive adhesive layer to a ground pad on the front surface of the substrate.
Claim 8
Dependent Claim 31 words
The method of claim 1 , wherein the ground pad on the second semiconductor chip is bonded by means of a grounding wire to the overhead portion of the heat spreader.
Claim 9
Dependent Claim 25 words
The method of claim 1 , wherein the overhead portion of the heat spreader is further coupled to a heat spreader having an exposed surface.
Claim 10
Dependent Claim 29 words
The method of claim 1 , wherein the heat spreader is further formed with a sideward-extending portion having an end portion exposed to the outside of the encapsulation body.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2007-04-06 2007-10-06 2008-04-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2011-04-06 2011-10-06 2012-04-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2015-04-06 2015-10-06 2016-04-06 $7700.00 Window Closed / Lapsed

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