Patent US6687895B2 successfully refreshed from Google Patents.
US6687895B2
Expired / Lapsed
US
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Method and apparatus for reducing optical proximity correction output file size
Assignee: Synopsys Inc
•
Filing: 2002-07-03
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Granted: 2004-02-03
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Expires: 2022-07-03
Abstract
Abstract An approach to reducing the size of an output file generated by an optical proximity correction (OPC) process is described. An OPC output can be examined to identify identically sized segments with identical biases. Adjoining segments to those first identified to identify repeating basic shapes. Those basic shapes can be further refined and expanded as desired. Finally, the output is rewritten making use of the repeating shapes in a hierarchical output that places each shape once as a child cell of the original geometry and uses references to that shape in other locations thereby reducing data volume size. The data volume savings can be considerable.
Inventors
- 👤 Youping Zhang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:58
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/36
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
111 words
A method for reducing an optical proximity correction (OPC) output file size, comprising: receiving an OPC output from an OPC process; examining the OPC output to identify groups of identically sized segments with identical biases; identifying adjoining segments with identical joining effects from the groups of identically sized segments; creating a basic shape from the adjoining segments with identical joining effects; forming a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; defining a child cell to represent the shape group; and using the child cell to represent different instances of the shape group, thereby reducing the OPC output file size.
Claim 2
Independent Claim
111 words
A method for reducing an optical proximity correction (OPC) output file size, comprising: receiving an OPC output from an OPC process; examining the OPC output to identify groups of identically sized segments with identical biases; identifying adjoining segments with identical joining effects from the groups of identically sized segments; creating a basic shape from the adjoining segments with identical joining effects; forming a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; defining a child cell to represent the shape group; and using the child cell to represent different instances of the shape group, thereby reducing the OPC output file size.
Claim 3
Dependent Claim
31 words
The method of claim 1 , further comprising creating a transformation for each repetition of the child cell, wherein the transformation can specify a translation and/or rotation of the child cell.
Claim 4
Dependent Claim
26 words
The method of claim 2 , further comprising linking the child cell and the transformation for each repetition of the child cell into a current cell.
Claim 5
Dependent Claim
15 words
The method of claim 3 , further comprising patching remaining geometries into the current cell.
Claim 6
Dependent Claim
32 words
The method of claim 1 , wherein forming the shape group involves forming a connected shape group, wherein the connected shape group includes extending the basic shape to include additional adjacent segments.
Claim 7
Dependent Claim
29 words
The method of claim 1 , wherein forming the shape group includes forming a disjoint shape group, wherein the disjoint shape group includes additional segments that are not adjacent.
Claim 8
Dependent Claim
31 words
The method of claim 1 , further comprising: forming multiple shape groups from the group of identical segments; and representing each of the multiple shape groups with a different child cell.
Claim 9
Dependent Claim
32 words
The method of claim 7 , further comprising generating an output, wherein the output includes the multiple shape groups and remaining basic shapes that do not belong to the multiple shape groups.
Claim 10
Dependent Claim
130 words
A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for reducing an optical proximity correction (OPC) output file size, the method comprising: receiving an OPC output from an OPC process; examining the OPC output to identify groups of identically sized segments with identical biases; identifying adjoining segments with identical joining effects from the groups of identically sized segments; creating a basic shape from the adjoining segments with identical joining effects; forming a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; defining a child cell to represent the shape group; and using the child cell to represent different instances of the shape group, thereby reducing the OPC output file size.
Claim 11
Dependent Claim
130 words
A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for reducing an optical proximity correction (OPC) output file size, the method comprising: receiving an OPC output from an OPC process; examining the OPC output to identify groups of identically sized segments with identical biases; identifying adjoining segments with identical joining effects from the groups of identically sized segments; creating a basic shape from the adjoining segments with identical joining effects; forming a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; defining a child cell to represent the shape group; and using the child cell to represent different instances of the shape group, thereby reducing the OPC output file size.
Claim 12
Dependent Claim
35 words
The computer-readable storage medium of claim 9 , the method further comprising creating a transformation for each repetition of the child cell, wherein the transformation can specify a translation and/or rotation of the child cell.
Claim 13
Dependent Claim
30 words
The computer-readable storage medium of claim 10 , the method further comprising linking the child cell and the transformation for each repetition of the child cell into a current cell.
Claim 14
Dependent Claim
19 words
The computer-readable storage medium of claim 11 , the method further comprising patching remaining geometries into the current cell.
Claim 15
Dependent Claim
34 words
The computer-readable storage medium of claim 9 , wherein forming the shape group involves forming a connected shape group, wherein the connected shape group includes extending the basic shape to include additional adjacent segments.
Claim 16
Dependent Claim
31 words
The computer-readable storage medium of claim 9 , wherein forming the shape group includes forming a disjoint shape group, wherein the disjoint shape group includes additional segments that are not adjacent.
Claim 17
Dependent Claim
35 words
The computer-readable storage medium of claim 9 , the method further comprising: forming multiple shape groups from the group of identical segments; and representing each of the multiple shape groups with a different child cell.
Claim 18
Dependent Claim
36 words
The computer-readable storage medium of claim 15 , the method further comprising generating an output, wherein the output includes the multiple shape groups and remaining basic shapes that do not belong to the multiple shape groups.
Claim 19
Independent Claim
160 words
An apparatus for reducing an optical proximity correction (OPC) output file size, comprising: a receiving mechanism that is configured to receive an OPC output from an OPC process; an examining mechanism that is configured to examine the OPC output to identify groups of identically sized segments with identical biases; an identifying mechanism that is configured to identify adjoining segments with identical joining effects from the groups of identically sized segments; a creating mechanism that is configured to create a basic shape from the adjoining segments with identical joining effects; a forming mechanism that is configured to form a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; a defining mechanism that is configured to define a child cell to represent the shape group; and a representing mechanism that is configured to use the child cell to represent different instances of the shape group, thereby reducing the OPC output file size.
Claim 20
Independent Claim
160 words
An apparatus for reducing an optical proximity correction (OPC) output file size, comprising: a receiving mechanism that is configured to receive an OPC output from an OPC process; an examining mechanism that is configured to examine the OPC output to identify groups of identically sized segments with identical biases; an identifying mechanism that is configured to identify adjoining segments with identical joining effects from the groups of identically sized segments; a creating mechanism that is configured to create a basic shape from the adjoining segments with identical joining effects; a forming mechanism that is configured to form a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; a defining mechanism that is configured to define a child cell to represent the shape group; and a representing mechanism that is configured to use the child cell to represent different instances of the shape group, thereby reducing the OPC output file size.
Claim 21
Dependent Claim
37 words
The apparatus of claim 17 , wherein the creating mechanism is further configured to create a transformation for each repetition of the child cell, wherein the transformation can specify a translation and/or rotation of the child cell.
Claim 22
Dependent Claim
33 words
The apparatus of claim 18 , further comprising a linking mechanism that is configured to link the child cell and the transformation for each repetition of the child cell into a current cell.
Claim 23
Dependent Claim
22 words
The apparatus of claim 19 , further comprising a patching mechanism that is configured to patch remaining geometries into the current cell.
Claim 24
Dependent Claim
32 words
The apparatus of claim 17 , wherein forming the shape group involves forming a connected shape group, wherein the connected shape group includes extending the basic shape to include additional adjacent segments.
Claim 25
Dependent Claim
29 words
The apparatus of claim 17 , wherein forming the shape group includes forming a disjoint shape group, wherein the disjoint shape group includes additional segments that are not adjacent.
Claim 26
Dependent Claim
46 words
The apparatus of claim 17 ; wherein the forming mechanism is further configured to form multiple shape groups from the group of identical segments; and further comprising a representing mechanism that is configured to represent each of the multiple shape groups with a different child cell.
Claim 27
Dependent Claim
39 words
The apparatus of claim 23 , further comprising a generating mechanism that is configured to generate an output, wherein the output includes the multiple shape groups and remaining basic shapes that do not belong to the multiple shape groups.
Claim 28
Independent Claim
137 words
A system for reducing an optical proximity correction (OPC) output file size, comprising: a receiving means for receiving an OPC output from an OPC process; an examining means for examining the OPC output to identify groups of identically sized segments with identical biases; an identifying means for identifying adjoining segments with identical joining effects within the groups of identically sized segments; a basic shape creating means for creating a basic shape from adjoining segments with identical joining effects; a shape group forming means for forming a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; a defining means for defining a child cell to represent the shape group; and a representing means for representing different instances of the shape group, thereby reducing the OPC output file size.
Claim 29
Independent Claim
137 words
A system for reducing an optical proximity correction (OPC) output file size, comprising: a receiving means for receiving an OPC output from an OPC process; an examining means for examining the OPC output to identify groups of identically sized segments with identical biases; an identifying means for identifying adjoining segments with identical joining effects within the groups of identically sized segments; a basic shape creating means for creating a basic shape from adjoining segments with identical joining effects; a shape group forming means for forming a shape group from the basic shape, wherein forming the shape group involves adding additional shapes to the basic shape; a defining means for defining a child cell to represent the shape group; and a representing means for representing different instances of the shape group, thereby reducing the OPC output file size.
Claim 30
Dependent Claim
36 words
The system of claim 25 , further comprising a transformation creating means for creating a transformation for each repetition of the child cell, wherein the transformation can specify a translation and/or rotation of the child cell.
Claim 31
Dependent Claim
30 words
The system of claim 26 , further comprising a linking means for linking the child cell and the transformation for each repetition of the child cell into a current cell.
Claim 32
Dependent Claim
19 words
The system of claim 27 , further comprising a patching means for patching remaining geometries into the current cell.
Claim 33
Dependent Claim
32 words
The system of claim 25 , wherein forming the shape group involves forming a connected shape group, wherein the connected shape group includes extending the basic shape to include additional adjacent segments.
Claim 34
Dependent Claim
29 words
The system of claim 25 , wherein forming the shape group includes forming a disjoint shape group, wherein the disjoint shape group includes additional segments that are not adjacent.
Claim 35
Dependent Claim
39 words
The system of claim 25 , further comprising: a forming means for forming multiple shape groups from the group of identical segments; and a representing means for representing each of the multiple shape groups with a different child cell.
Claim 36
Dependent Claim
36 words
The system of claim 31 , further comprising a generating means for generating an output, wherein the output includes the multiple shape groups and remaining basic shapes that do not belong to the multiple shape groups.
References Cited (Backward Citations)
US5182718A
Cited
JPH0380525A
Cited
US5538815A
Cited
US5432714A
Cited
US5533148A
Cited
US5631110A
Cited
US5815685A
Cited
US6425117B1
Cited
US5682323A
Cited
US5825647A
Cited
US5657235A
Cited
US6249597B1
Cited
US6014456A
Cited
US6154563A
Cited
US6077310A
Cited
US5723233A
Cited
WO1997038381A1
Cited
US5885734A
Cited
US5991006A
Cited
GB2324169A
Cited
US6470489B1
Cited
WO1999014636A1
Cited
US6370679B1
Cited
WO1999014638A1
Cited
WO1999014637A1
Cited
US6011911A
Cited
US6243855B1
Cited
US6009251A
Cited
US6009250A
Cited
US6064806A
Cited
US6453452B1
Cited
US6081658A
Cited
US6289499B1
Cited
US6298473B1
Cited
US6339836B1
Cited
WO2000067074A1
Cited
US20020152454A1
Cited
US20020010904A1
Cited
WO2002029491A1
Cited
US6453457B1
Cited
US20020100004A1
Cited
US20020152449A1
Cited
US6560766B2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-02-02 | 2007-08-04 | 2008-02-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-02-02 | 2011-08-04 | 2012-02-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-02-02 | 2015-08-04 | 2016-02-03 | $7700.00 | Window Closed / Lapsed |