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Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique
Assignee: Oki Electric Industry Co Ltd
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Filing: 2002-01-23
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Granted: 2003-12-02
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Expires: 2022-01-23
Abstract
Abstract In a method for manufacturing a semiconductor device, a semiconductor substrate is provided. On the substrate, conductors spaced apart from one another are formed. Then, an insulating layer is formed on the conductors and the substrate. The insulating layer is formed by a chemical vapor deposition using tetramethylcyclotetrasiloxane as a source gas and oxygen as an adjunction gas. The chemical vapor deposition is performed while the substrate is irradiated by vacuum ultraviolet light. Finally, a part of the insulating layer is removed in a substantial uniform way to form a contact hole through the insulating film.
Inventors
- 👤 Junichi Miyano
- 👤 Kiyohiko Toshikawa
- 👤 Yoshikazu Motoyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:59
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/44; C23C16/48; C23C16/482; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/6336
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
93 words
A method for manufacturing a semiconductor device comprising: forming a plurality of conductors spaced apart from one another on a semiconductor substrate; providing the semiconductor substrate in a chamber of an LPCVD apparatus; introducing a tetramethylcyclotetrasiloxane gas and an oxygen gas to said chamber while irradiating vacuum ultraviolet light to the semiconductor substrate so as to form an insulating layer covering the conductors and the semiconductor substrate; and etching the insulating layer in a substantial uniform way to form a contact hole through the insulating layer, said etching being performed without a mask.
Claim 2
Independent Claim
93 words
A method for manufacturing a semiconductor device comprising: forming a plurality of conductors spaced apart from one another on a semiconductor substrate; providing the semiconductor substrate in a chamber of an LPCVD apparatus; introducing a tetramethylcyclotetrasiloxane gas and an oxygen gas to said chamber while irradiating vacuum ultraviolet light to the semiconductor substrate so as to form an insulating layer covering the conductors and the semiconductor substrate; and etching the insulating layer in a substantial uniform way to form a contact hole through the insulating layer, said etching being performed without a mask.
Claim 3
Dependent Claim
19 words
A method for manufacturing a semiconductor device according to claim 1 , wherein the conductors are gates of transistors.
Claim 4
Dependent Claim
19 words
A method for manufacturing a semiconductor device according to claim 1 , wherein the conductors are composed of tungsten.
Claim 5
Dependent Claim
21 words
A method for manufacturing a semiconductor device according to claim 1 , wherein the chamber is kept at a room temperature.
Claim 6
Dependent Claim
27 words
A method for manufacturing a semiconductor device according to claim 1 , wherein flow rates of the tetramethylcyclotetrasiloxane gas and the oxygen gas are substantially the same.
Claim 7
Dependent Claim
39 words
A method for manufacturing a semiconductor device according to claim 1 , wherein the insulating layer has a first thickness on the conductors and has a second thickness that is smaller than the first thickness on the semiconductor substrate.
Claim 8
Dependent Claim
22 words
A method for manufacturing a semiconductor device according to claim 1 , wherein a pressure in the chamber is about 300 mTorr.
Claim 9
Independent Claim
93 words
A method for manufacturing a semiconductor device comprising: providing a semiconductor substrate; forming a plurality of conductors spaced apart from one another on the substrate; forming an insulating layer on the conductors and the substrate by a chemical vapor deposition using tetramethylcyclotetrasiloxane as a source gas and oxygen as an adjunction gas while the substrate is irradiated by vacuum ultraviolet light; and removing a part of the insulating layer in a substantial uniform way to form a contact hole through the insulating layer, the chemical vapor deposition being performed at a room temperature.
Claim 10
Independent Claim
93 words
A method for manufacturing a semiconductor device comprising: providing a semiconductor substrate; forming a plurality of conductors spaced apart from one another on the substrate; forming an insulating layer on the conductors and the substrate by a chemical vapor deposition using tetramethylcyclotetrasiloxane as a source gas and oxygen as an adjunction gas while the substrate is irradiated by vacuum ultraviolet light; and removing a part of the insulating layer in a substantial uniform way to form a contact hole through the insulating layer, the chemical vapor deposition being performed at a room temperature.
Claim 11
Dependent Claim
25 words
A method for manufacturing a semiconductor device according to claim 8 , wherein said removing a part of the insulating layer comprises a dry etching.
Claim 12
Dependent Claim
19 words
A method for manufacturing a semiconductor device according to claim 8 , wherein the conductors are gates of transistors.
Claim 13
Dependent Claim
19 words
A method for manufacturing a semiconductor device according to claim 8 , wherein the conductors are composed of tungsten.
Claim 14
Dependent Claim
27 words
A method for manufacturing a semiconductor device according to claim 8 , wherein flow rates of the source gas and the adjunction gas are substantially the same.
Claim 15
Dependent Claim
38 words
A method for manufacturing a semiconductor device according to claim 8 , wherein the insulating layer has a first thickness on the conductors and has a second thickness that is smaller than the first thickness on the substrate.
Claim 16
Dependent Claim
26 words
A method for manufacturing a semiconductor device according to claim 8 , wherein the chemical vapor deposition is performed under a pressure of about 300 mTorr.
Claim 17
Independent Claim
106 words
A method of manufacturing a semiconductor device comprising: providing a substrate; forming a plurality of conductors each of which is located spaced apart from one another by a predetermined distance on the substrate; forming an insulating layer on the conductors and the substrate using tetramethylcyclotetrasiloxane as a source gas and oxygen as an adjunct gas while the substrate is irradiated by vacuum ultraviolet light so that the insulating layer has a first thickness on the conductors and has a second thickness that is smaller than the first thickness on the substrate; and removing the insulating layer having the second thickness to form a contact hole therethrough.
Claim 18
Independent Claim
106 words
A method of manufacturing a semiconductor device comprising: providing a substrate; forming a plurality of conductors each of which is located spaced apart from one another by a predetermined distance on the substrate; forming an insulating layer on the conductors and the substrate using tetramethylcyclotetrasiloxane as a source gas and oxygen as an adjunct gas while the substrate is irradiated by vacuum ultraviolet light so that the insulating layer has a first thickness on the conductors and has a second thickness that is smaller than the first thickness on the substrate; and removing the insulating layer having the second thickness to form a contact hole therethrough.
Claim 19
Dependent Claim
22 words
A method of manufacturing a semiconductor device according to claim 15 , wherein said removing the insulating layer comprises a dry etching.
Claim 20
Dependent Claim
19 words
A method of manufacturing a semiconductor device according to claim 15 , wherein the conductors are composed of tungsten.
Claim 21
Dependent Claim
22 words
A method of manufacturing a semiconductor device according to claim 15 , wherein the insulating layer is formed at a room temperature.
Claim 22
Dependent Claim
26 words
A method for manufacturing a semiconductor device according claim 15 , wherein flow rates of the source gas and the adjunct gas are substantially the same.
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