US6468642B1
Expired / Lapsed
US
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Fluorine-doped diamond-like coatings
Assignee: Oerlikon Metaplas GmbH
•
Filing: 1998-12-02
•
Granted: 2002-10-22
•
Expires: 2018-12-02
Abstract
Abstract The invention relates to fluorine-doped coatings which include a diamond-like composition containing carbon, silicon, oxygen, hydrogen, and fluorine on various substrates. Preferred substrates include flexible substrates, precision-edged substrates, and electrosurgical instruments. The present invention also relates to a method of making a substrate coated with a fluorine-doped diamond-like coating which includes positioning the substrate in a vacuum coating chamber and depositing a diamond-like composition containing carbon, silicon, oxygen, hydrogen, and fluorine onto the substrate by co-deposition of clusterless particle beams comprised of ions, atoms, or radicals of the carbon, silicon, oxygen, hydrogen, and fluorine, the mean free path of each particle species being in excess of the distance between its source and the growing particle coating surface of the substrate.
Inventors
- 👤 Donald J. Bray
- 👤 Chandra Venkatraman
- 👤 Craig A. Outten
- 👤 Christopher Halter
- 👤 Arvind Goel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:46
CPC Classifications
B; B26; B26B; B26B21/00; B26B21/54; B26B21/58; B26B21/60; C; C23; C23C; C23C16/00; C23C16/02; C23C16/0227; C23C16/0245; C23C16/0272; C23C16/22; C23C16/26; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/24967; Y10T428/24975; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/30; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 62
Claim 1
Independent Claim
52 words
An article comprising a substrate coated with a fluorine-doped coating, wherein said coating comprises a diamond-like composition comprised of carbon, silicon, oxygen, hydrogen, and fluorine and wherein the coating has a hardness of from about 5 to about 32 GPa and a surface energy of from about 19 to about 29 dyne/cm.
Claim 2
Dependent Claim
52 words
An article comprising a substrate coated with a fluorine-doped coating, wherein said coating comprises a diamond-like composition comprised of carbon, silicon, oxygen, hydrogen, and fluorine and wherein the coating has a hardness of from about 5 to about 32 GPa and a surface energy of from about 19 to about 29 dyne/cm.
Claim 3
Dependent Claim
12 words
An article according to claim 1 , wherein the coating is amorphous.
Claim 4
Dependent Claim
16 words
An article according to claim 1 , wherein the carbon is bonded to hydrogen or fluorine.
Claim 5
Dependent Claim
14 words
An article according to claim 1 , wherein the silicon is bonded to oxygen.
Claim 6
Dependent Claim
24 words
An article according to claim 1 , wherein the fluorine-doped coating has a surface energy of from about 19.5 dyne/cm to about 26 dyne/cm.
Claim 7
Dependent Claim
15 words
An article according to claim 5 , wherein the flexible substrate is a polymeric film.
Claim 8
Dependent Claim
26 words
An article according to claim 6 , wherein the polymeric film is selected from the group consisting of polyimide, polyester, polythermide, polyamide-imide and polyethylene terephthalate films.
Claim 9
Dependent Claim
16 words
An article according to claim 7 , wherein the fluorine-doped coating further comprises an additional dopant.
Claim 10
Dependent Claim
28 words
An article according to claim 8 , wherein the additional dopant is selected from the group consisting of elements from groups Ib-VIIb and VIII of the periodic table.
Claim 11
Dependent Claim
47 words
An article according to claim 9 , wherein the additional dopant is selected from the group consisting of B, Si, Ge, Te, O, Mo, W, Ta, Nb, Pd, Ir, Pt, V, Fe, Co, Mg, Mn, Ni, Ti, Zr, Cr, Re, Hf, Cu, Al, N, Ag and Au.
Claim 12
Dependent Claim
13 words
An article according to claim 10 , wherein the additional dopant is titanium.
Claim 13
Dependent Claim
22 words
An article according to claim 5 , wherein the fluorine-doped coating has a thickness from about 0.005 micrometers to about 10 micrometers.
Claim 14
Dependent Claim
32 words
An article according to claim 5 , wherein the carbon, hydrogen, silicon, oxygen and fluorine are obtained from the decomposition of an organosiloxane having from about 1 to about 10 silicon atoms.
Claim 15
Dependent Claim
12 words
An article according to claim 13 , wherein the organosiloxane is polytrifluoropropylmethylsiloxane.
Claim 16
Dependent Claim
14 words
An article according to claim 13 , wherein the organosiloxane is poly-3,3,3-trifluoropropylmethylsiloxane-(50%) dimethylsiloxane copolymer.
Claim 17
Dependent Claim
26 words
An article according to claim 5 , wherein the carbon content of the fluorine-doped coating is from about 40 wt. % to about 98 wt. %.
Claim 18
Dependent Claim
25 words
An article according to claim 5 , wherein the carbon to silicon weight ratio of the fluorine-doped coating is from about 4:1 to about 9:1.
Claim 19
Dependent Claim
25 words
An article according to claim 5 , wherein the silicon to oxygen weight ratio of the fluorine-doped coating is from about 0.6:1 to about 1.7:1.
Claim 20
Dependent Claim
58 words
An article according to claim 5 , wherein the carbon content of the fluorine-doped coating is at least 40 atomic % of the fluorine-doped coating, the hydrogen content is up to about 40 atomic % of the carbon, and the sum of the silicon, oxygen and dopants together is greater than about 2 atomic % of the coating.
Claim 21
Dependent Claim
23 words
An article according to claim 5 , wherein the fluorine-doped coating has a dielectric strength from about 1 MV/cm to about 4 MV/cm.
Claim 22
Dependent Claim
24 words
An article according to claim 5 , wherein the fluorine-doped coating has a resistivity from about 10 14 ohm-cm to about 10 −2 ohm-cm.
Claim 23
Dependent Claim
23 words
An article according to claim 5 , wherein the fluorine-doped coating has a surface energy from about 19.5 dyne/cm to about 26 dyne/cm.
Claim 24
Dependent Claim
22 words
An article according to claim 5 , wherein the fluorine-doped coating has a water contact angle from about 80° to about 101°.
Claim 25
Dependent Claim
14 words
An article according to claim 1 , wherein the substrate is a precision-edged substrate.
Claim 26
Dependent Claim
14 words
An article according to claim 24 , wherein the precision-edged substrate comprises a metal.
Claim 27
Dependent Claim
14 words
An article according to claim 24 , wherein the precision-edged substrate comprises a non-metal.
Claim 28
Dependent Claim
24 words
An article according to claim 24 , wherein the substrate is selected from the group consisting of industrial tools, surgical instruments, knives and razors.
Claim 29
Dependent Claim
14 words
An article according to claim 27 , wherein the substrate is a razor blade.
Claim 30
Dependent Claim
16 words
An article according to claim 24 , wherein the fluorine-doped coating further comprises an additional dopant.
Claim 31
Dependent Claim
28 words
An article according to claim 29 , wherein the additional dopant is selected from the group consisting of elements from groups Ib-VIIb and VIII of the periodic table.
Claim 32
Dependent Claim
47 words
An article according to claim 30 , wherein the additional dopant is selected from the group consisting of B, Si, Ge, Te, O, Mo, W, Ta, Nb, Pd, Ir, Pt, V, Fe, Co, Mg, Mn, Ni, Ti, Zr, Cr, Re, Hf, Cu, Al, N, Ag, and Au.
Claim 33
Dependent Claim
27 words
An article according to claim 24 , wherein the fluorine-doped coating is deposited on the substrate to a thickness from about 5 nm to about 12 micrometers.
Claim 34
Dependent Claim
26 words
An article according to claim 24 , wherein the coating is deposited on the substrate to a thickness from about 5 nm to about 150 nm.
Claim 35
Dependent Claim
20 words
An article according to claim 24 , wherein the fluorine-doped coating is deposited directly into the substrate without an interlayer.
Claim 36
Dependent Claim
32 words
An article according to claim 24 , wherein the carbon, hydrogen, silicon, oxygen and fluorine are obtained from the decomposition of an organosiloxane having from about 1 to about 10 silicon atoms.
Claim 37
Dependent Claim
12 words
An article according to claim 35 , wherein the organosiloxane is polytrifluoropropylmethylsiloxane.
Claim 38
Dependent Claim
14 words
An article according to claim 35 , wherein the organosiloxane is poly-3,3,3-trifluoropropylmethylsiloxane-(50%) dimethylsiloxane copolymer.
Claim 39
Dependent Claim
26 words
An article according to claim 24 , wherein the carbon content of the fluorine-doped coating is from about 40 wt. % to about 98 wt. %.
Claim 40
Dependent Claim
25 words
An article according to claim 24 , wherein the carbon to silicon weight ratio of the fluorine-doped coating is from about 2:1 to about 8:1.
Claim 41
Dependent Claim
25 words
An article according to claim 24 , wherein the silicon to oxygen weight ratio of the fluorine-doped coating is from about 0.5:1 to about 3:1.
Claim 42
Dependent Claim
58 words
An article according to claim 24 , wherein the carbon content of the fluorine-doped coating is at least 40 atomic % of the fluorine-doped coating, the hydrogen content is up to about 40 atomic % of the carbon, and the sum of the silicon, oxygen and dopants together is greater than about 2 atomic % of the coating.
Claim 43
Dependent Claim
24 words
An article according to claim 24 , wherein the fluorine-doped coating has a resistivity from about 10 14 ohm-cm to about 10 −2 ohm-cm.
Claim 44
Dependent Claim
22 words
An article according to claim 24 , wherein the fluorine-doped coating has a water contact angle from about 80° to about 101°.
Claim 45
Dependent Claim
14 words
An article according to claim 1 , wherein the substrate is an electrosurgical instrument.
Claim 46
Dependent Claim
29 words
An article according to claim 44 , wherein the electrosurgical instrument is selected from the group consisting of electrosurgical blades, bipolar forceps, laparoscopic instruments, dental brackets, and biomedical devices.
Claim 47
Dependent Claim
15 words
An article according to claim 44 , wherein the electrosurgical instrument is a precision-edged substrate.
Claim 48
Dependent Claim
16 words
An article according to claim 44 , wherein the fluorine-doped coating further comprises an additional dopant.
Claim 49
Dependent Claim
28 words
An article according to claim 47 , wherein the additional dopant is selected from the group consisting of elements from groups Ib-VIIb and VIII of the periodic table.
Claim 50
Dependent Claim
54 words
An article according to claim 48 , wherein the additional dopant is selected from the group consisting of B, Li, Na, Si, Ge, Te, O, Mo, W, Ta, Nb, Pd, Ir, Pt, V, Fe, Co, Mg, Mn, Ni, Ti, Zr, Cr, Re, Hf, Cu, Al, N, Ag, Au, TiN, BN, AlN, ZrN and CrN.
Claim 51
Dependent Claim
24 words
An article according to claim 44 , wherein the fluorine-doped coating is deposited to a thickness from about 0.5 μm to about 5 μm.
Claim 52
Dependent Claim
24 words
An article according to claim 44 , wherein the fluorine-doped coating is deposited to a thickness from about 2 μm to about 3 μm.
Claim 53
Dependent Claim
31 words
An article according to claim 44 , wherein the carbon, hydrogen, silicon and oxygen are obtained from the decomposition of an organosiloxane having from about 1 to about 10 silicon atoms.
Claim 54
Dependent Claim
12 words
An article according to claim 52 , wherein the organosiloxane is polytrifluoropropylmethylsiloxane.
Claim 55
Dependent Claim
14 words
An article according to claim 52 , wherein the organosiloxane is poly-3,3,3-trifluoropropylmethylsiloxane-(50%) dimethylsiloxane copolymer.
Claim 56
Dependent Claim
26 words
An article according to claim 44 , wherein the carbon content of the fluorine-doped coating is from about 40 wt. % to about 98 wt. %.
Claim 57
Dependent Claim
25 words
An article according to claim 44 , wherein the carbon to silicon weight ratio of the fluorine-doped coating is from about 2:1 to about 8:1.
Claim 58
Dependent Claim
25 words
An article according to claim 44 , wherein the silicon to oxygen weight ratio of the fluorine-doped coating is from about 0.5:1 to about 3:1.
Claim 59
Dependent Claim
58 words
An article according to claim 44 , wherein the carbon content of the fluorine-doped coating is at least 40 atomic % of the fluorine-doped coating, the hydrogen content is up to about 40 atomic % of the carbon, and the sum of the silicon, oxygen and dopants together is greater than about 2 atomic % of the coating.
Claim 60
Dependent Claim
21 words
An article according to claim 44 , wherein the article has an impedance from about 1 ohm to about 1000 ohms.
Claim 61
Dependent Claim
24 words
An article according to claim 44 , wherein the fluorine-doped coating has a resistivity from about 10 −2 ohm-cm to about 10 15 ohm-cm.
Claim 62
Dependent Claim
21 words
An article according to claim 44 , wherein the fluorine-doped coating has a water contact angle from about 80°to about 101°.
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