US5266409A
Expired / Lapsed
US
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Hydrogenated carbon compositions
Assignee: Case Western Reserve University
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Filing: 1989-04-28
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Granted: 1993-11-30
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Expires: 2009-04-28
Abstract
Abstract A composition of matter having an atomic density between that of pure diamond and at least 0.18 g-atoms per cubic centimeter and the formula: C.sub.1-z-w Si.sub.z A.sub.w [H.sub.1-x F.sub.x ].sub.y where: 0≦z+w≦0.15, 0≦w≦0.05, 0≦x≦0.10, 0<y<1.5, and, A is boron or oxygen. Variation of the constituents and the parameters of production of the compositions in self-biasing RF cavities, or primary or secondary ion beam methods, allows formation of films of, for example, desired hardness, lubricity, density, electrical conductivity, permeability, adhesion and stress. Variation of the properties allows production of films formed by the composition as a function of depth.
Inventors
- 👤 Paul H. Schmidt
- 👤 John C. Angus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:26
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/0605; C23C16/00; C23C16/22; C23C16/26; Y; Y10; Y10S; Y10S428/00; Y10S428/90; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/30
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
109 words
A composition of matter formed by the process of: placing a substrate in a chamber; controllably introducing a gas in the chamber including the elements carbon, hydrogen, silicon and an optional element chosen from fluorine, boron, oxygen, argon or helium; energizing said gas to have an impact energy on said substrate in a range from between about 33-200 eV, and from said energized gas, forming on said substrate a composition having an atomic density between that of pure diamond and at least 0.18 g-atoms per cubic centimeter and the following formula: C.sub.1-z-w Si.sub.z A.sub.w [H.sub.1-x F.sub.x ].sub.y where 0<z+w≦0.15, z>0 0≦w≦0.05 0≦x≦0.10 0.18≦y≦1.5 and, A is boron or oxygen.
Claim 2
Dependent Claim
109 words
A composition of matter formed by the process of: placing a substrate in a chamber; controllably introducing a gas in the chamber including the elements carbon, hydrogen, silicon and an optional element chosen from fluorine, boron, oxygen, argon or helium; energizing said gas to have an impact energy on said substrate in a range from between about 33-200 eV, and from said energized gas, forming on said substrate a composition having an atomic density between that of pure diamond and at least 0.18 g-atoms per cubic centimeter and the following formula: C.sub.1-z-w Si.sub.z A.sub.w [H.sub.1-x F.sub.x ].sub.y where 0<z+w≦0.15, z>0 0≦w≦0.05 0≦x≦0.10 0.18≦y≦1.5 and, A is boron or oxygen.
Claim 3
Dependent Claim
46 words
The composition of claim 1, formed by the process including providing a plasma gas chamber and controlling the pressure in said chamber in the range of about 5 to 100 millitorr and controlling the bias voltage of said substrate in the range of about 100-1500 volts.
Claim 4
Dependent Claim
28 words
The composition of claim 2, formed by the process including controlling the pressure of the gas in said chamber in the range of about 50 millitorr or below.
Claim 5
Dependent Claim
18 words
The composition of claim 3 wherein said bias voltage is in the range less than about 1000 V.
Claim 6
Dependent Claim
13 words
The composition of claim 4 wherein said bias voltage is around 1000 v.
Claim 7
Dependent Claim
24 words
The composition of claim 5 wherein said composition is in the form of a thin film on the order of about 500 Å° thick.
Claim 8
Dependent Claim
45 words
A composition of matter on a substrate having an atomic density between that of pure diamond and at least 0.18 g-atoms per cubic centimeter, the following formula: C.sub.1-z-w Si.sub.z A.sub.w [H.sub.1-x F.sub.x ].sub.y where: 0<z+w≦0.15, z>0 0≦w≦0.05 0≦x≦0.10 0.18≦y≦1.5 and, A is boron or oxygen.
Claim 9
Dependent Claim
45 words
A composition of matter on a substrate having an atomic density between that of pure diamond and at least 0.18 g-atoms per cubic centimeter, the following formula: C.sub.1-z-w Si.sub.z A.sub.w [H.sub.1-x F.sub.x ].sub.y where: 0<z+w≦0.15, z>0 0≦w≦0.05 0≦x≦0.10 0.18≦y≦1.5 and, A is boron or oxygen.
Claim 10
Dependent Claim
14 words
The composition of claim 7, further comprising graphite-like regions of short range atomic order.
Claim 11
Dependent Claim
11 words
The composition of claim 7 wherein: 0<z+w<0.15, z>0 0<w<0.05 0<x<0.10 0.18≦y≦1.5
Claim 12
Dependent Claim
62 words
A magnetic recording medium, having an operative surface to be operated as a bearing, comprising: a coating applied to said surface, said coating having an atomic density between that of pure diamond and at least 0.18 g-atoms per cubic centimeter and the following formula: C.sub.1-z-w Si.sub.z A.sub.w [H.sub.1-x F.sub.x ].sub.y where: 0<z+w0.15, z>0 0≦w≦0.05 0≦x≦0.10 0.18≦y≦1.5 and, A is boron or oxygen.
Claim 13
Dependent Claim
62 words
A magnetic recording medium, having an operative surface to be operated as a bearing, comprising: a coating applied to said surface, said coating having an atomic density between that of pure diamond and at least 0.18 g-atoms per cubic centimeter and the following formula: C.sub.1-z-w Si.sub.z A.sub.w [H.sub.1-x F.sub.x ].sub.y where: 0<z+w0.15, z>0 0≦w≦0.05 0≦x≦0.10 0.18≦y≦1.5 and, A is boron or oxygen.
Claim 14
Dependent Claim
22 words
The composition of any one of claims 1, 8, 9, 2, 3 or 4 wherein said substrate is a magnetic recording medium.
Claim 15
Dependent Claim
18 words
The composition of claim 11 wherein the gas in the plasma chamber is CH 4 /SiH 4 =100.
Claim 16
Dependent Claim
33 words
The composition of any one of claims 1, 7, 8, 9, 2, 3 or 4 wherein said substrate is the disk opposing surface of a head adapted to interface with a recording medium.
Claim 17
Dependent Claim
25 words
The composition of any one of claims 1, 2, 3 or 4 wherein the gas in the plasma chamber is CH 4 /SiH 4 =100.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-29 | 1997-05-31 | 1997-11-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-29 | 2001-05-31 | 2001-11-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-29 | 2005-05-31 | 2005-11-30 | $7700.00 | Window Closed / Lapsed |