US4636435A — Polymeric thin film, process for producing the sa…

Claim 1

Independent Claim 192 words

A process for preparing a polymeric thin film having a thickness of not less than 10 Å and having a Vicker's hardness of at least 1,000 on the surface of substrate placed in reaction zone by providing a gas containing at least one monomeric compound selected from the group consisting of halogenated alkanes (A), alkanes (B), hydrogen (C) and halogens (D) in accordance with any of the combinations set forth as follows: (1) only A; (2) A and B; (3) A and C; (4) A and D; (5) A, B and C; (6) A, B and D; (7) A, C and D; (8) A, B, C and D; (9) B and D; or (10) B, C and D, for plasma polymerization, wherein the atomic ratio of halogen/hydrogen in said gas is 0.1 to 5, the flow rate of said gas flowing into the reactor in which said plasma polymerization is carried out is from 0.1 to 100 cc (STP)/min. per 100 liter of inner volume of the reactor and the electron temperature of the plasma in the reaction zone for plasma polymerization is at least 6,000° K. and lower than 30,000° K.

Claim 2

Dependent Claim 192 words

A process for preparing a polymeric thin film having a thickness of not less than 10 Å and having a Vicker's hardness of at least 1,000 on the surface of substrate placed in reaction zone by providing a gas containing at least one monomeric compound selected from the group consisting of halogenated alkanes (A), alkanes (B), hydrogen (C) and halogens (D) in accordance with any of the combinations set forth as follows: (1) only A; (2) A and B; (3) A and C; (4) A and D; (5) A, B and C; (6) A, B and D; (7) A, C and D; (8) A, B, C and D; (9) B and D; or (10) B, C and D, for plasma polymerization, wherein the atomic ratio of halogen/hydrogen in said gas is 0.1 to 5, the flow rate of said gas flowing into the reactor in which said plasma polymerization is carried out is from 0.1 to 100 cc (STP)/min. per 100 liter of inner volume of the reactor and the electron temperature of the plasma in the reaction zone for plasma polymerization is at least 6,000° K. and lower than 30,000° K.

Claim 3

Dependent Claim 28 words

The process according to claim 1, wherein said halogenated alkanes are fluoroalkanes, chloroalkanes, fluorochloroalkanes or the mixtures thereof and said halogens are fluorine, chlorine or the mixture thereof.

Claim 4

Dependent Claim 42 words

The process according to claim 1, wherein the concentration ratio of hydrogen halide (HX), which is a by-product of the plasma polymerization, to hydrogen (H 2 ) in the reaction zone for plasma polymerization is in the range of 0.1 to 500.

Claim 5

Dependent Claim 207 words

A process for preparing a polymeric thin film having a thickness of not less than 10 Å and having a Vicker's hardness of at least 1,000 on the surface of a substrate placed in a reaction zone by providing a gas containing at least one monomeric compound selected from the group consisting of halogenated alkanes (A), alkanes (B), hydrogen (C) and halogens (D) in accordance with any of the combination set forth as follows: (1) only A; (2) A and B; (3) A and C; (4) A and D; (5) A, B and C; (6) A, B and D; (7) A, C and D; (8) A, B, C and D; (9) B and D; or (10) B, C and D, for plasma polymerization, wherein the atomic ratio of halogen/hydrogen in said gas is 0.1 to 5, the flow rate of said gas flowing into the reactor in which said plasma polymerization is carried out is from 0.1 to 100 cc (STP)/min. per 100 liter of inner volume of the reactor and the electron termperature of the plasma in the reaction zone for plasma polymerization is at least 6,000° K. and lower than 30,000° K., and the polymeric thin film thus formed is further treated with hydrogen plasma.

Claim 6

Dependent Claim 207 words

A process for preparing a polymeric thin film having a thickness of not less than 10 Å and having a Vicker's hardness of at least 1,000 on the surface of a substrate placed in a reaction zone by providing a gas containing at least one monomeric compound selected from the group consisting of halogenated alkanes (A), alkanes (B), hydrogen (C) and halogens (D) in accordance with any of the combination set forth as follows: (1) only A; (2) A and B; (3) A and C; (4) A and D; (5) A, B and C; (6) A, B and D; (7) A, C and D; (8) A, B, C and D; (9) B and D; or (10) B, C and D, for plasma polymerization, wherein the atomic ratio of halogen/hydrogen in said gas is 0.1 to 5, the flow rate of said gas flowing into the reactor in which said plasma polymerization is carried out is from 0.1 to 100 cc (STP)/min. per 100 liter of inner volume of the reactor and the electron termperature of the plasma in the reaction zone for plasma polymerization is at least 6,000° K. and lower than 30,000° K., and the polymeric thin film thus formed is further treated with hydrogen plasma.

Claim 7

Dependent Claim 17 words

The amorphous polymeric thin film prepared on a substrate by the process of claim 1 or 2.

Claim 8

Dependent Claim 54 words

The amorphous polymeric thin film according to claim 5, wherein the substrate is a base material for a magnetic recording medium comprising a non-magnetic support and a magnetic metal thin-film provided therein, the amorphous polymeric thin film having a thickness of 20 Å to 0.1 μm being formed on said magnetic metal thin film.

Claim 9

Dependent Claim 17 words

The amorphous polymeric thin film according to claim 6 on which a lubricant layer is further formed.

Claim 10

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 5, wherein the substrate is a metallic article.

Claim 11

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 5, wherein the substrate is a plastic article.

Claim 12

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 5, wherein the substrate is finely powdered metal.

Claim 13

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 5, wherein the substrate is finely powdered diamond.

Claim 14

Dependent Claim 102 words

An amorphous polymeric thin film having a thickness of not less than 10 Å and having a Vicker's hardness of at least 1,000 formed on a substrate, consisting essentially of carbon (C), hydrogen (H), halogen (X) and oxygen (O) at an atomic ratio of these elements represented by the formula: C.sub.1.0. H.sub.0.005-0.2 X.sub.0.005-0.2 O.sub.0.005-0.3 and having a ratio of the number of hydrogen atoms bonded to carbon atoms having a double bond ##STR9## to the number of hydrogen atoms bonded to carbon atoms having only single bonds ##STR10## of 0 to 0.1 and a density of 1.6 to 3.5 g/cm 3 .

Claim 15

Dependent Claim 102 words

An amorphous polymeric thin film having a thickness of not less than 10 Å and having a Vicker's hardness of at least 1,000 formed on a substrate, consisting essentially of carbon (C), hydrogen (H), halogen (X) and oxygen (O) at an atomic ratio of these elements represented by the formula: C.sub.1.0. H.sub.0.005-0.2 X.sub.0.005-0.2 O.sub.0.005-0.3 and having a ratio of the number of hydrogen atoms bonded to carbon atoms having a double bond ##STR9## to the number of hydrogen atoms bonded to carbon atoms having only single bonds ##STR10## of 0 to 0.1 and a density of 1.6 to 3.5 g/cm 3 .

Claim 16

Dependent Claim 35 words

The amorphous polymeric thin film according to claim 12, wherein the atomic ratio of halogen (X) to carbon (C) is 0.005 to 0.05 and that of oxygen (O) to carbon (C) is 0.005 to 0.15.

Claim 17

Dependent Claim 55 words

The amorphous polymeric thin film according to claim 12, wherein the substrate is a base material for a magnetic recording medium comprising a non-magnetic support and a magnetic metal thin film provided thereon, the amorphous polymeric thin film having a thickness of 20 Å to 0.1 μm being formed on said magnetic metal thin film.

Claim 18

Dependent Claim 17 words

The amorphous polymeric thin film according to claim 14 on which a lubricant layer is further formed.

Claim 19

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 12, wherein the substrate is a metallic article.

Claim 20

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 12, wherein the substrate is a plastic article.

Claim 21

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 12, wherein the substrate is finely powdered metal.

Claim 22

Dependent Claim 16 words

The amorphous polymeric thin film according to claim 12, wherein the substrate is finely powdered diamond.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1990-01-12	1990-07-14	1991-01-13	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1994-01-12	1994-07-14	1995-01-13	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1998-01-12	1998-07-14	1999-01-13	$7700.00	Window Closed / Lapsed

Polymeric thin film, process for producing the same and products containing said thin film

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