US5169579A
Expired / Lapsed
US
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Catalyst and plasma assisted nucleation and renucleation of gas phase selective laser deposition
Assignee: The University of Texas System
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Filing: 1991-08-08
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Granted: 1992-12-08
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Expires: 2011-08-08
Abstract
Abstract A method and apparatus for selectively depositing a layer of material from a gas phase to produce a part comprising a plurality of deposited layers. The apparatus includes a computer controlling a directed energy beam, such as a laser, to direct the laser energy into a chamber substantially containing the gas phase to preferably produce photodecomposition or thermal decomposition of the gas phase and selectively deposit material within the boundaries of the desired cross-sectional regions of the part. For each cross section, the aim of the laser beam is scanned over a target area and the beam is switched on to deposit material within the boundaries of the cross-section. Each subsequent layer is joined to the immediately preceding layer to produce a part comprising a plurality of joined layers. In an alternate embodiment of the present invention, a gas phase is condensed on a surface and a laser beam is used to selectively evaporate, transform, activate or decompose material in each layer. A catalytic environment can be created proximate or upon the target area to ensure that initial nucleation and renucleation layers are receptive to substantially rapid and uniform growth of gas phase material at the target location. The catalyst can be placed on the initial substrate layer and/or upon successive layers as the layers are being deposited on the outer surface of the evolving part.
Inventors
- 👤 Harris L. Marcus
- 👤 Guisheng Zong
- 👤 W. Richards Thissell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:04
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/01; B; B29; B29C; B29C64/00; B29C64/10; B29C64/106; B29C64/124; B29C64/129; B29C64/135; B29C64/159; B29C64/40; B33; B33Y; B33Y10/00; C23C16/04; C23C16/047
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
73 words
A method of depositing a layer of material, comprising: preparing a catalytic environment upon a target area; positioning a gas phase proximate to said target area; scanning an energy beam across said target area; depositing material from said gas phase onto said target area at select scan locations of said beam, said material being deposited in a substantially uniform pattern at said locations in accordance with the catalytic environment upon said target area.
Claim 2
Independent Claim
73 words
A method of depositing a layer of material, comprising: preparing a catalytic environment upon a target area; positioning a gas phase proximate to said target area; scanning an energy beam across said target area; depositing material from said gas phase onto said target area at select scan locations of said beam, said material being deposited in a substantially uniform pattern at said locations in accordance with the catalytic environment upon said target area.
Claim 3
Dependent Claim
22 words
The method as recited in claim 1, wherein said preparing step comprises applying a layer of catalyst powder upon said target area.
Claim 4
Dependent Claim
18 words
The method as recited in claim 2, wherein said catalyst powder comprises SiC powder mixed with NaCl powder.
Claim 5
Dependent Claim
31 words
The method as recited in claim 1, wherein said preparing step comprises modifying a structure of said target area to enhance rate of deposition of said material upon said target area.
Claim 6
Dependent Claim
25 words
The method as recited in claim 1, wherein said preparing step comprises introducing a catalyst gas into said gas phase proximate to said target area.
Claim 7
Dependent Claim
37 words
The method as recited in claim 1, wherein said scanning step comprises: focusing said energy beam at select boundary locations between said target area and said gas phase; and thermally decomposing said gas phase at said locations.
Claim 8
Dependent Claim
36 words
The method as recited in claim 1, wherein said scanning step comprises: focusing said energy beam at select boundary locations between said target area and said gas phase; and photodecomposing said gas phase at said locations.
Claim 9
Independent Claim
68 words
A method of depositing a layer of material onto a substrate, comprising: providing a substrate having an upper surface layer; preparing a catalytic composition upon a portion of said surface layer; scanning an energy beam across said surface layer; growing material from said gas phase onto said surface layer at select scan locations of said beam, said material is grown in a substantially uniform pattern at said locations.
Claim 10
Independent Claim
68 words
A method of depositing a layer of material onto a substrate, comprising: providing a substrate having an upper surface layer; preparing a catalytic composition upon a portion of said surface layer; scanning an energy beam across said surface layer; growing material from said gas phase onto said surface layer at select scan locations of said beam, said material is grown in a substantially uniform pattern at said locations.
Claim 11
Dependent Claim
12 words
The method as recited in claim 8, wherein said substrate is flat.
Claim 12
Dependent Claim
12 words
The method as recited in claim 8, wherein said substrate is rounded.
Claim 13
Dependent Claim
32 words
The method as recited in claim 8, wherein said preparing step comprises applying a layer of catalyst powder upon said surface layer, said catalyst powder comprises SiC powder mixed with NaCl powder.
Claim 14
Dependent Claim
32 words
The method as recited in claim 8, wherein said preparing step comprises chemically modifying atomic bonds of said surface layer to enhance rate of deposition of said material upon said surface layer.
Claim 15
Dependent Claim
34 words
The method as recited in claim 8, wherein said preparing step comprises mechanically modifying the surface texture of said surface layer to enhance the rate of deposition of said material upon said surface layer.
Claim 16
Independent Claim
82 words
A method of depositing a layer of material, comprising: providing a part having an outer layer; positioning a gas phase proximate said outer layer; introducing a catalyst gas into said gas phase; scanning an energy beam across said outer layer; and depositing material from said gas phase onto said outer layer at select scan locations of said beam, said material being deposited in a substantially uniform pattern at said locations in accordance with concentration of the catalytic gas within said gas phase.
Claim 17
Independent Claim
82 words
A method of depositing a layer of material, comprising: providing a part having an outer layer; positioning a gas phase proximate said outer layer; introducing a catalyst gas into said gas phase; scanning an energy beam across said outer layer; and depositing material from said gas phase onto said outer layer at select scan locations of said beam, said material being deposited in a substantially uniform pattern at said locations in accordance with concentration of the catalytic gas within said gas phase.
Claim 18
Dependent Claim
29 words
The method as recited in claim 14, wherein said introducing step comprises injecting said catalyst gas into a chamber containing said part, said gas phase and said energy beam.
Claim 19
Dependent Claim
14 words
The method as recited in claim 14, wherein said catalyst gas comprises atomic hydrogen.
Claim 20
Dependent Claim
14 words
The method as recited in claim 14, wherein said catalyst gas comprises atomic oxygen.
Claim 21
Dependent Claim
32 words
The method as recited in claim 14, wherein said gas phase comprises at least one gas selected from the group consisting of organometallic, hydrocarbon, chloride, fluoride, oxide, nitride and polymer precursor gases.
Claim 22
Independent Claim
143 words
A method of producing a part upon a substrate, comprising: providing a sealable chamber; placing a substrate within said sealable chamber, said substrate having an outer surface layer; preparing a catalytic composition upon a portion of said surface layer; introducing a gas phase into said sealable chamber and proximate said surface layer; scanning an energy beam across said surface layer; introducing a catalyst gas into said sealable chamber and within said gas phase; scanning said energy beam across said surface layer; depositing material from said gas phase onto said surface layer in a three dimensional growth pattern at select scan locations of said beam, said material is deposited in a substantially uniform pattern at said locations in accordance with concentration of the catalyst gas and the catalytic composition; and repeating the last three steps to deposit successive layers of materials comprising said part.
Claim 23
Independent Claim
143 words
A method of producing a part upon a substrate, comprising: providing a sealable chamber; placing a substrate within said sealable chamber, said substrate having an outer surface layer; preparing a catalytic composition upon a portion of said surface layer; introducing a gas phase into said sealable chamber and proximate said surface layer; scanning an energy beam across said surface layer; introducing a catalyst gas into said sealable chamber and within said gas phase; scanning said energy beam across said surface layer; depositing material from said gas phase onto said surface layer in a three dimensional growth pattern at select scan locations of said beam, said material is deposited in a substantially uniform pattern at said locations in accordance with concentration of the catalyst gas and the catalytic composition; and repeating the last three steps to deposit successive layers of materials comprising said part.
Claim 24
Dependent Claim
21 words
The method as recited in claim 19, wherein said depositing step comprises growing said material having a substantially smooth surface topography.
Claim 25
Dependent Claim
24 words
The method as recited in claim 20, wherein said topography comprises uniformly deposited material having less than 1% variation in thickness at said locations.
Claim 26
Independent Claim
49 words
An apparatus for producing a part, comprising: a gas-filled chamber; a target area within said chamber; a catalyst formed upon said target area; and at least one energy beam directed upon said target area to selectively nucleate and renucleate said gas upon said target area to form a part.
Claim 27
Independent Claim
49 words
An apparatus for producing a part, comprising: a gas-filled chamber; a target area within said chamber; a catalyst formed upon said target area; and at least one energy beam directed upon said target area to selectively nucleate and renucleate said gas upon said target area to form a part.
Claim 28
Dependent Claim
19 words
The apparatus as recited in claim 22, wherein said catalyst comprises a catalyst powder placed upon said target area.
Claim 29
Independent Claim
20 words
The apparatus as recited in claims 22, wherein said catalyst comprises means for modifying a structure of said target area.
Claim 30
Dependent Claim
19 words
The apparatus as recited in claim 22, wherein said catalyst comprises a catalyst gas interspersed within said gas-filled chamber.
References Cited (Backward Citations)
US4944817A
Cited
US5017317A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-08 | 1996-06-08 | 1996-12-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-08 | 2000-06-08 | 2000-12-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-08 | 2004-06-08 | 2004-12-08 | $7700.00 | Window Closed / Lapsed |