US5256483A
Expired / Lapsed
US
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Plasma processing method and apparatus
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1990-10-31
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Granted: 1993-10-26
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Expires: 2010-10-31
Abstract
Abstract A plasma process and an apparatus therefor are described. A number of substrates are disposed between a pair of electrodes, to which a high frequency electric power is applied in order to generate glow discharge and induce a plasma. The substrates in the plasma are applied with an alternating electric field. By virtue of the alternating electric field, the substrates are subjected to sputtering action.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Mitsunori Tsuchiya
- 👤 Atsushi Kawano
- 👤 Shinji Imatou
- 👤 Kazuhisa Nakashita
- 👤 Toshiji Hamatani
- 👤 Takashi Inushima
- 👤 Kenji Itou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:35
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/517; H01J37/32137; H01J37/32155; H01J37/32165; H01J37/32431; H01J37/32532; H01J37/32568; H01J37/34; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3321; Y; Y10; Y10S; Y10S428/00; Y10S428/906; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
78 words
A printing drum having: a metallic substrate; an organic photoconductive film provided on said metallic substrate; and a protective layer comprising carbon including sp 3 carbon bonds formed on said organic photoconductive film, said protective layer having a thickness of 0.1 to 8 μm, wherein said protective layer is formed by plasma chemical vapor deposition and said metallic substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 2
Dependent Claim
78 words
A printing drum having: a metallic substrate; an organic photoconductive film provided on said metallic substrate; and a protective layer comprising carbon including sp 3 carbon bonds formed on said organic photoconductive film, said protective layer having a thickness of 0.1 to 8 μm, wherein said protective layer is formed by plasma chemical vapor deposition and said metallic substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 3
Dependent Claim
14 words
A printing drum of claim 1 wherein said metlalic substrate is an aluminum substrate.
Claim 4
Dependent Claim
22 words
A printing drum of claim 1 wherein an optical energy band gap of said protective layer is from 1.0 to 5.5 eV.
Claim 5
Dependent Claim
21 words
A printing drum of claim 1 wherein said carbon layer has a Vickers hardness not lower than 2000 Kg/mm 2 .
Claim 6
Dependent Claim
13 words
A printing drum of claim 1 wherein said protective layer contains diamond particles.
Claim 7
Dependent Claim
26 words
The printing drum of claim 1 where the protective layer contains nitrogen at 0.3 to 10 atom % and fluorine at 0.3 to 3 atom %.
Claim 8
Dependent Claim
79 words
A printing drum comprising: a metallic substrate; an organic photoconductive film provided on said metallic substrate; and a protective layer comprising carbon including sp 3 carbon bonds formed on said organic photoconductive film, said protective layer containing either one or both of nitrogen and fluorine, wherein said protective layer is formed by plasma chemical vapor deposition and said metallic substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 9
Dependent Claim
79 words
A printing drum comprising: a metallic substrate; an organic photoconductive film provided on said metallic substrate; and a protective layer comprising carbon including sp 3 carbon bonds formed on said organic photoconductive film, said protective layer containing either one or both of nitrogen and fluorine, wherein said protective layer is formed by plasma chemical vapor deposition and said metallic substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 10
Dependent Claim
22 words
A printing drum of claim 7 wherein an optical energy band gap of said protective layer is from 1.0 to 5.5 eV.
Claim 11
Dependent Claim
19 words
A printing drum of claim 7 wherein a thickness of said protective layer is from 0.1 to 8 μm.
Claim 12
Dependent Claim
21 words
A printing drum of claim 7 wherein said carbon layer has a Vickers hardness not lower than 2000 Kg/mm 2 .
Claim 13
Dependent Claim
13 words
A printing drum of claim 7 wherein said protective layer contains diamond particles.
Claim 14
Dependent Claim
14 words
A printing drum of claim 7 wherein said metallic substrate is an aluminum substrate.
Claim 15
Dependent Claim
26 words
The printing drum of claim 7 where the protective layer contains nitrogen at 0.3 to 10 atom % and fluorine at 0.3 to 3 atom %.
Claim 16
Dependent Claim
82 words
A printing drum comprising: a metallic substrate; an organic photoconductive film formed on said metallic substrate; a protective film comprising carbon including sp 3 carbon bonds formed on said organic photoconductive film, said protective film having a resistivity in the range of 10 7 to 10 14 Ωcm, wherein said protective film is formed by plasma chemical vapor deposition and said metallic substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 17
Dependent Claim
82 words
A printing drum comprising: a metallic substrate; an organic photoconductive film formed on said metallic substrate; a protective film comprising carbon including sp 3 carbon bonds formed on said organic photoconductive film, said protective film having a resistivity in the range of 10 7 to 10 14 Ωcm, wherein said protective film is formed by plasma chemical vapor deposition and said metallic substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 18
Dependent Claim
19 words
A printing drum of claim 14 wherein a thickness of said protective film is from 0.1 to 8 μm.
Claim 19
Dependent Claim
21 words
A printing drum of claim 14 wherein said carbon film has a Vickers hardness not lower than 2000 Kg/mm 2 .
Claim 20
Dependent Claim
13 words
A printing drum of claim 14 wherein said protective film contains diamond particles.
Claim 21
Dependent Claim
14 words
A printing drum of claim 14 wherein said metallic substrate is an aluminum substrate.
Claim 22
Dependent Claim
22 words
A printing drum of claim 14 wherein an optical energy band gap of said protective film is from 1.0 to 5.5 eV.
Claim 23
Dependent Claim
26 words
The printing drum of claim 14 where the protective layer contains nitrogen at 0.3 to 10 atom % and fluorine at 0.3 to 3 atom %.
Claim 24
Dependent Claim
62 words
An article comprising: a substrate in the form of a dish, plate, vessel, pincette, or drinking glass; and a carbon coating including sp 3 carbon bonds formed on said substrate, wherein said coating is formed by plasma chemical vapor deposition and said substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 25
Dependent Claim
62 words
An article comprising: a substrate in the form of a dish, plate, vessel, pincette, or drinking glass; and a carbon coating including sp 3 carbon bonds formed on said substrate, wherein said coating is formed by plasma chemical vapor deposition and said substrate is given a sufficient amount of bias voltage during the deposition so that the substrate functions as a cathode.
Claim 26
Dependent Claim
29 words
The article of claim 21 where said first layer has a thickness of 0.01 to 0.1 micron and said second layer has a thickness of 0.2 to 2 microns.
Claim 27
Dependent Claim
30 words
An article of claim 21 wherein said substrate is a plastic substrate, a polyethylene terephthalate substrate, a PMMA substrate, a teflon substrate, an epoxy resin substrate, or a polyimide substrate.
Claim 28
Dependent Claim
26 words
A glass plate comprising: a glass substrate; a silicon nitride film formed on said glass substrate; and a carbon film formed on said silicon nitride film.
Claim 29
Dependent Claim
26 words
A glass plate comprising: a glass substrate; a silicon nitride film formed on said glass substrate; and a carbon film formed on said silicon nitride film.
Claim 30
Dependent Claim
12 words
The glass plate of claim 24 where said carbon film contains fluorine.
Claim 31
Dependent Claim
32 words
A glass plate of claim 24 wherein said glass plate is a front window, a side window, a rear window, or a side mirror of a motor-car, a motor-cycle, or an airplane.
Claim 32
Dependent Claim
16 words
A glass plate of claim 24 wherein said glass plate is a window of a building.
Claim 33
Dependent Claim
15 words
A glass plate of claim 24 wherein said carbon film includes sp 3 carbon bonds.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-10-25 | 1997-04-26 | 1997-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-25 | 2001-04-26 | 2001-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-25 | 2005-04-26 | 2005-10-26 | $7700.00 | Window Closed / Lapsed |