Semiconductor processing method of forming openings in a material

Claim 1

A semiconductor processing method comprising: forming a first material layer over a substrate; forming a second material layer on and in direct physical contact with the first material layer; depositing photoresist over the second material layer and forming an opening within the photoresist to the second material layer, the photoresist defining a periphery of the opening and being a same thickness on one peripheral side of the opening as on an other peripheral side of the opening; first etching into the second material layer through the photoresist opening to a degree insufficient to outwardly expose the first material layer, the first etching forming an opening in the second material; after the first etching, the photoresist on the one peripheral side of the photoresist opening still being a same thickness as the photoresist on the other peripheral side of the photoresist opening; after the first etching, stripping the photoresist from the substrate; and after the stripping, blanket etching the second material layer and the first material layer to extend the opening through the second material and into the first material; the portion of the opening in the first material being defined as a first material opening, and the portion of the opening in the second material being defined as a second material opening.