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US6319829B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Enhanced interconnection to ceramic substrates

Assignee: International Business Machines Corp
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Filing: 1999-08-18
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Granted: 2001-11-20
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Expires: 2019-08-18
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Abstract

Abstract A semiconductor chip interposer increases fatigue life of interconnections between a first component having a relatively high thermal coefficient of expansion (TCE) and a second component having a relatively low TCE. The semiconductor chip interposer includes a thin metal plate having a plurality of through holes, the thin metal plate having a TCE intermediate the relatively high TCE and the relatively low TCE. An insulation coating on the thin metal plate is also included on walls of the through holes. An electrical conductive material fills each of the insulated through holes for electrical interconnection between the first component and the second component.

Inventors

  • 👤 Robert W. Pasco
  • 👤 Srinivasa S. N. Reddy
  • 👤 Rao V. Vallabhaneni

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 19:46
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H05; H05K; H05K3/00; H05K3/30; H05K3/32; H05K3/34; H05K3/341; H05K3/3431; H05K3/3436; H05K1/00; H05K1/02; H05K1/14; H05K1/141; H05K2201/00; H05K2201/06; H05K2201/068; H05K2201/10; H05K2201/10227; H05K2201/10378; H10W90/00; H10W90/701; H10W90/721; H10W90/724; Y; Y02; Y02P; Y02P70/00; Y02P70/50

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 102 words
A semiconductor chip interposer for increasing fatigue life of interconnections between a first component having a relatively high thermal coefficient of expansion (TCE) and a second component having a relatively low TCE, comprising: a thin substrate having a TCE intermediate the relatively high TCE and the relatively low TCE and a plurality of through holes that are electrically insulated from one another, wherein the substrate is a thin metal plate having a thickness in the range of 2-8 mil; and an electrical conductive material filling each of the insulated through holes for electrical interconnection between the first component and the second component.
Claim 2
Dependent Claim 102 words
A semiconductor chip interposer for increasing fatigue life of interconnections between a first component having a relatively high thermal coefficient of expansion (TCE) and a second component having a relatively low TCE, comprising: a thin substrate having a TCE intermediate the relatively high TCE and the relatively low TCE and a plurality of through holes that are electrically insulated from one another, wherein the substrate is a thin metal plate having a thickness in the range of 2-8 mil; and an electrical conductive material filling each of the insulated through holes for electrical interconnection between the first component and the second component.
Claim 3
Dependent Claim 24 words
The interposer of claim 1 wherein the substrate includes an insulation coating on said thin metal plate including on walls of the through holes.
Claim 4
Dependent Claim 13 words
The interposer of claim 2 wherein the insulation coating comprises an oxide coating.
Claim 5
Dependent Claim 98 words
A semiconductor chip interposer for increasing fatigue life of interconnections between a first component having a relatively high thermal coefficient of expansion (TCE) and a second component having a relatively low TCE, comprising: a thin metal plate having a plurality of through holes, the thin metal plate having a TCE intermediate the relatively high TCE and the relatively low TCE; an insulation coating on said thin metal plate including on walls of the through holes; and an electrical conductive material filling each of the insulated through holes for electrical interconnection between the first component and the second component.
Claim 6
Dependent Claim 98 words
A semiconductor chip interposer for increasing fatigue life of interconnections between a first component having a relatively high thermal coefficient of expansion (TCE) and a second component having a relatively low TCE, comprising: a thin metal plate having a plurality of through holes, the thin metal plate having a TCE intermediate the relatively high TCE and the relatively low TCE; an insulation coating on said thin metal plate including on walls of the through holes; and an electrical conductive material filling each of the insulated through holes for electrical interconnection between the first component and the second component.
Claim 7
Dependent Claim 23 words
The interposer of claim 4 wherein the thin metal plate is a metal foil having a thickness in the range of 2-8 mil.
Claim 8
Dependent Claim 13 words
The interposer of claim 4 wherein the insulation coating comprises an oxide coating.
Claim 9
Dependent Claim 19 words
The interposer of claim 4 wherein the chip comprises a multi-chip module and the interposer comprises a segmented interposer.
Claim 10
Dependent Claim 23 words
The interposer of claim 4 further comprising conductive I/O pads on either side of the through openings electrically connected to the conductive material.
Claim 11
Dependent Claim 35 words
The interposer of claim 8 wherein the second component is a glass-ceramic substrate having I/O pads and the interposer is joined to the substrate by co-sintering the substrate I/O pads and the interposer I/O pads.
Claim 12
Dependent Claim 19 words
The interposer of claim 8 further comprising conductive pins brazed to I/O pads on one side of the interposer.
Claim 13
Dependent Claim 43 words
The interposer of claim 10 wherein the second component is a glass-ceramic substrate having I/O pads and the interposer is joined to the substrate by co-sintering using the substrate I/O pads and the interposer I/O pads to provide a glass-ceramic pin grid array.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2004-11-19 2005-05-21 2005-11-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2008-11-19 2009-05-21 2009-11-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2012-11-19 2013-05-21 2013-11-20 $7700.00 Window Closed / Lapsed

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