Multi-chip module employing a carrier substrate with micromachined alignment structures and method of forming

Claim 2

A carrier substrate for a semiconductor element, comprising: a substrate with a substantially planar surface having at least one elongated, substantially linear mesa defined by two inclined sidewalls rising therefrom and extending to a top surface substantially parallel to said substantially planar surface; an insulating layer disposed over said substantially planar substrate surface and said at least one elongated substantially linear mesa; and a plurality of conductive traces extending over said insulating layer and including mutually parallel, laterally spaced, substantially linear segments oriented transversely to said at least one elongated, substantially linear mesa, said mutually parallel, laterally spaced, substantially linear segments of said plurality of conductive traces each extending over a first portion of said planar substrate surface on one side of said at least one elongated mesa, over said at least one elongated, substantially linear mesa and onto a second portion of said substantially planar substrate surface on an opposing side of said at least one elongated, substantially linear mesa.

Claim 3

The carrier substrate of claim 1, wherein said substrate is selected from a group consisting of monocrystalline silicon, silicon-on-glass, silicon-on-sapphire, germanium, and ceramic.

Claim 4

The carrier substrate of claim 1, wherein said insulating layer includes silicon dioxide.

Claim 5

The carrier substrate of claim 1, wherein said plurality of conductive traces includes copper.

Claim 6

The carrier substrate of claim 4, wherein said plurality of conductive traces further comprises a layer of chrome on said insulating layer, a layer of copper/chrome alloy on said chrome layer, and a layer of copper on said copper/chrome alloy layer.

Claim 7

The carrier substrate of claim 1, further comprising a passivation layer over said insulating layer and said plurality of conductive traces, said passivation layer including apertures therethrough exposing contact areas at predetermined locations on said plurality of conductive traces.

Claim 8

The carrier substrate of claim 1, wherein said at least one elongated mesa comprises a plurality of substantially parallel elongated mesas of similar length, and at least one of said plurality of conductive traces extends into an area between at least two of said plurality of substantially parallel elongated mesas after passing over at least one of said at least one elongated mesa.

Claim 9

The carrier substrate of claim 1, wherein said at least one elongated, substantially linear mesa comprises four elongated, substantially linear mesas substantially defining a rectangle bounding a substantially enclosed area into which said plurality of conductive traces extends after passing over at least one of said four elongated, substantially linear mesas.

Claim 10

The carrier substrate of claim 1, wherein said at least one elongated, substantially linear mesa comprises two substantially parallel, elongated, substantially linear mesas, and said plurality of conductive traces comprises two groups of traces, each of said two groups comprising a plurality of traces, each group of traces extending over a different one of said two substantially parallel, elongated, substantially linear mesas from a location remote from an area between said two substantially parallel, elongated, substantially linear mesas and terminating at a location on said substantially planar substrate element between said two substantially parallel, elongated, substantially linear mesas.

Claim 11

The carrier substrate of claim 9, wherein each trace of at least one of said two groups terminates between said two substantially parallel, elongated, substantially linear mesa along a common boundary parallel to the elongated, substantially linear mesa over which said plurality of traces of said at least one of said two groups extend.

Claim 12

The carrier substrate of claim 9, wherein at least some traces of said plurality of traces extend substantially to a peripheral edge of said substrate.

Claim 13

The carrier substrate of claim 1, further comprising a passivation layer covering said plurality of conductive traces and having apertures therethrough exposing portions of said plurality of conductive traces lying over said substantially planar substrate surface on said opposing side of said at least one elongated, substantially linear mesa and over a sidewall of said at least one elongated, substantially linear sidewall adjacent thereto.

Claim 14

The carrier substrate of claim 1, wherein said at least one elongated mesa comprises two mutually parallel elongated mesas, and at least one of said plurality of conductive traces extends from a location outside said two mutually parallel elongated mesas and over one of said two mutually parallel elongated mesas to an area between said two mutually parallel elongated mesas and at least partially up a sidewall of the second of said two mutually parallel elongated mesas.

Claim 15

The carrier substrate of claim 13, wherein said two mutually parallel elongated mesas are spaced apart by a distance substantially corresponding to a lateral dimension of conductive connectors of a flip-chip semiconductor element to be carried by said carrier substrate so that at least one of said conductive connectors will contact said at least one of said plurality of conductive traces over a sidewall of each of said two mutually parallel elongated mesas and over said substantially planar substrate surface therebetween.

Claim 16

The carrier substrate of claim 1, further comprising a layer of reflowable material disposed on said plurality of conductive traces at a location over said substantially planar substrate surface on said opposing side of said at least one elongated, substantially linear mesa and over an adjacent sidewall thereof.

Claim 17

The carrier substrate of claim 15, wherein said reflowable material comprises a solder material comprised substantially of tin and lead.

Claim 18

The carrier substrate of claim 1, wherein said substrate possesses a CTE substantially the same as that of a flip-chip configured semiconductor element to be carried thereon.

Claim 19

A semiconductor device, comprising: a carrier substrate with a substantially planar surface having at least one elongated mesa defined by inclined sidewalls rising therefrom to a top substantially parallel to said substantially planar surface; an insulating layer disposed over said substantially planar substrate surface and said at least one elongated mesa; a plurality of conductive traces extending over said insulating layer and including mutually parallel, laterally spaced segments oriented transversely to said at least one elongated mesa, said plurality of mutually parallel, laterally spaced segments of said conductive traces each extending over a first portion of said substantially planar substrate surface on one side of said at least one elongated mesa, over said at least one elongated mesa and onto a second portion of said substantially planar substrate surface on an opposing side of said at least one elongated mesa; and at least one semiconductor element having an active surface including a plurality of conductive connectors projecting transversely therefrom, each conductive connector of said plurality being in electrical contact with one of said plurality of conductive trace segments on a first area thereof located over a sidewall of said at least one elongated mesa and a second area thereof adjacent said first area and located over said substantially planar substrate surface.

Claim 20

A semiconductor device, comprising: a carrier substrate with a substantially planar surface having at least one elongated mesa defined by inclined sidewalls rising therefrom to a top substantially parallel to said substantially planar surface; an insulating layer disposed over said substantially planar substrate surface and said at least one elongated mesa; a plurality of conductive traces extending over said insulating layer and including mutually parallel, laterally spaced segments oriented transversely to said at least one elongated mesa, said plurality of mutually parallel, laterally spaced segments of said conductive traces each extending over a first portion of said substantially planar substrate surface on one side of said at least one elongated mesa, over said at least one elongated mesa and onto a second portion of said substantially planar substrate surface on an opposing side of said at least one elongated mesa; and at least one semiconductor element having an active surface including a plurality of conductive connectors projecting transversely therefrom, each conductive connector of said plurality being in electrical contact with one of said plurality of conductive trace segments on a first area thereof located over a sidewall of said at least one elongated mesa and a second area thereof adjacent said first area and located over said substantially planar substrate surface.

Claim 21

The semiconductor device of claim 18, wherein said carrier substrate is selected from a group consisting of monocrystalline silicon, silicon-on-glass, silicon-on-sapphire, germanium, and ceramic.

Claim 22

The semiconductor device of claim 18, wherein said insulating layer includes silicon dioxide.

Claim 23

The semiconductor device of claim 18, wherein said plurality of conductive traces includes copper.

Claim 24

The semiconductor device of claim 21, wherein said plurality of conductive traces further comprises a layer of chrome on said insulating layer, a layer of copper/chrome alloy on said chrome layer, and a layer of copper on said copper/chrome alloy layer.

Claim 25

The semiconductor device of claim 18, further comprising a passivation layer over said insulating layer and said plurality of conductive traces, said passivation layer including apertures therethrough exposing contact areas over predetermined locations on said plurality of conductive traces.

Claim 26

The semiconductor device of claim 18, wherein said at least one semiconductor element includes a semiconductor chip.

Claim 27

The semiconductor device of claim 18, wherein said carrier substrate and said at least one semiconductor element each comprise an entire silicon wafer.

Claim 28

The semiconductor device of claim 18, wherein said at least one elongated mesa comprises at least two mutually parallel, adjacent elongated mesas, and further comprising at least one conductive trace extending down a sidewall of one of said at least two elongated mesas, onto said substantially planar substrate surface, and up a sidewall of another of said at least two elongated mesas; and wherein said at least one conductive connector of said plurality of conductive connectors is received between said one and said another of said at least two elongated mesas and electrically contacts said at least one conductive trace over said sidewall of said one of said at least two elongated mesas, over said substantially planar substrate surface, and over said sidewall of said another of said at least two elongated mesas.

Claim 29

The semiconductor device of claim 18, wherein said conductive connectors comprise balls of reflowable material.

Claim 30

The semiconductor device of claim 27, wherein said balls comprise a lead/tin alloy.

Claim 31

The semiconductor device of claim 18, wherein said at least some of said plurality of traces lying over said sidewall of said at least one elongated mesa are at least partially covered with a reflowable material compatible with a material of said plurality of conductive connectors.

Claim 32

The semiconductor device of claim 29, wherein said conductive connectors are comprised of a tin/lead composition having a first melting point, and said reflowable material comprises a tin/lead composition having a second, lower melting point.

Claim 33

The semiconductor device of claim 18, wherein said conductive connectors are comprised of a reflowable material.

Claim 34

The semiconductor device of claim 31, wherein said reflowable material comprises a tin/lead composition.

Claim 35

The semiconductor device of claim 18, wherein said conductive connectors comprise an epoxy.

Claim 36

The semiconductor device of claim 18, wherein said conductive connectors comprise a thermoplastic.

Claim 37

The semiconductor device of claim 18, wherein said plurality of conductive traces is substantially covered with a passivation layer in an area between said at least one semiconductor element and said carrier substrate, with the exception of areas of contact between said conductive connectors and said plurality of conductive traces.